7/8/2012	12:29:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	12:29:50 PM	Recipe started at 12:29 PM
7/8/2012	12:29:50 PM	Helium valve closed
7/8/2012	12:29:50 PM	H2 valve closed
7/8/2012	12:29:50 PM	BCl3 valve closed
7/8/2012	12:29:50 PM	PH3 valve closed
7/8/2012	12:29:50 PM	SiCl4 pre valve closed
7/8/2012	12:29:50 PM	SiCl4 post valve closed
7/8/2012	12:29:50 PM	Main Vac valve closed
7/8/2012	12:29:50 PM	Bypass valve closed
7/8/2012	12:29:50 PM	Bubbler valve closed
7/8/2012	12:29:50 PM	Helium MFC set to  0.000000
7/8/2012	12:29:50 PM	H2 MFC set to  0.000000
7/8/2012	12:29:50 PM	BCl3 MFC set to  0.000000
7/8/2012	12:29:50 PM	PH3 MFC set to  0.000000
7/8/2012	12:29:50 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:29:50 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:29:50 PM	Tube furnace set to 0
7/8/2012	12:29:53 PM	H2 valve closed
7/8/2012	12:29:53 PM	BCl3 valve closed
7/8/2012	12:29:53 PM	PH3 valve closed
7/8/2012	12:29:53 PM	SiCl4 pre valve closed
7/8/2012	12:29:53 PM	SiCl4 post valve closed
7/8/2012	12:29:53 PM	Main Vac valve closed
7/8/2012	12:29:53 PM	Bypass valve closed
7/8/2012	12:29:53 PM	Bubbler valve closed
7/8/2012	12:29:53 PM	Helium valve opened
7/8/2012	12:29:53 PM	Helium MFC set to  500.000000
7/8/2012	12:29:53 PM	H2 MFC set to  0.000000
7/8/2012	12:29:53 PM	BCl3 MFC set to  0.000000
7/8/2012	12:29:53 PM	PH3 MFC set to  0.000000
7/8/2012	12:29:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:29:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:29:54 PM	Tube furnace set to 0
7/8/2012	12:31:01 PM	Helium valve closed
7/8/2012	12:31:01 PM	H2 valve closed
7/8/2012	12:31:01 PM	BCl3 valve closed
7/8/2012	12:31:01 PM	PH3 valve closed
7/8/2012	12:31:01 PM	SiCl4 pre valve closed
7/8/2012	12:31:01 PM	SiCl4 post valve closed
7/8/2012	12:31:01 PM	Main Vac valve closed
7/8/2012	12:31:01 PM	Bypass valve closed
7/8/2012	12:31:01 PM	Bubbler valve closed
7/8/2012	12:31:01 PM	Helium MFC set to  0.000000
7/8/2012	12:31:01 PM	H2 MFC set to  0.000000
7/8/2012	12:31:01 PM	BCl3 MFC set to  0.000000
7/8/2012	12:31:01 PM	PH3 MFC set to  0.000000
7/8/2012	12:31:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:31:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:31:01 PM	Tube furnace set to 0
7/8/2012	12:31:02 PM	Run finished at 12:31 PM
7/8/2012	12:31:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	12:32:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	12:32:47 PM	Recipe started at 12:32 PM
7/8/2012	12:32:47 PM	Helium valve closed
7/8/2012	12:32:47 PM	H2 valve closed
7/8/2012	12:32:47 PM	BCl3 valve closed
7/8/2012	12:32:47 PM	PH3 valve closed
7/8/2012	12:32:47 PM	SiCl4 pre valve closed
7/8/2012	12:32:47 PM	SiCl4 post valve closed
7/8/2012	12:32:47 PM	Main Vac valve closed
7/8/2012	12:32:47 PM	Bubbler valve closed
7/8/2012	12:32:47 PM	Bypass valve opened
7/8/2012	12:32:47 PM	Helium MFC set to  0.000000
7/8/2012	12:32:47 PM	H2 MFC set to  0.000000
7/8/2012	12:32:47 PM	BCl3 MFC set to  0.000000
7/8/2012	12:32:47 PM	PH3 MFC set to  0.000000
7/8/2012	12:32:47 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:32:47 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:32:47 PM	Tube furnace set to 0
7/8/2012	12:33:53 PM	Helium valve closed
7/8/2012	12:33:53 PM	H2 valve closed
7/8/2012	12:33:53 PM	BCl3 valve closed
7/8/2012	12:33:53 PM	PH3 valve closed
7/8/2012	12:33:53 PM	SiCl4 pre valve closed
7/8/2012	12:33:53 PM	SiCl4 post valve closed
7/8/2012	12:33:53 PM	Main Vac valve closed
7/8/2012	12:33:53 PM	Bubbler valve closed
7/8/2012	12:33:53 PM	Bypass valve opened
7/8/2012	12:33:53 PM	Helium MFC set to  0.000000
7/8/2012	12:33:53 PM	H2 MFC set to  0.000000
7/8/2012	12:33:53 PM	BCl3 MFC set to  0.000000
7/8/2012	12:33:53 PM	PH3 MFC set to  0.000000
7/8/2012	12:33:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:33:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:33:53 PM	Tube furnace set to 0
7/8/2012	12:34:53 PM	Helium valve closed
7/8/2012	12:34:53 PM	H2 valve closed
7/8/2012	12:34:53 PM	BCl3 valve closed
7/8/2012	12:34:53 PM	PH3 valve closed
7/8/2012	12:34:53 PM	SiCl4 pre valve closed
7/8/2012	12:34:53 PM	SiCl4 post valve closed
7/8/2012	12:34:53 PM	Bypass valve closed
7/8/2012	12:34:53 PM	Bubbler valve closed
7/8/2012	12:34:53 PM	Main Vac valve opened
7/8/2012	12:34:53 PM	Helium MFC set to  0.000000
7/8/2012	12:34:53 PM	H2 MFC set to  0.000000
7/8/2012	12:34:53 PM	BCl3 MFC set to  0.000000
7/8/2012	12:34:53 PM	PH3 MFC set to  0.000000
7/8/2012	12:34:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:34:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:34:53 PM	Tube furnace set to 0
7/8/2012	12:34:54 PM	Run finished at 12:34 PM
7/8/2012	12:34:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	12:38:35 PM	Recipe started at 12:38 PM
7/8/2012	12:38:35 PM	Helium valve closed
7/8/2012	12:38:35 PM	H2 valve closed
7/8/2012	12:38:35 PM	BCl3 valve closed
7/8/2012	12:38:35 PM	PH3 valve closed
7/8/2012	12:38:35 PM	SiCl4 pre valve closed
7/8/2012	12:38:35 PM	SiCl4 post valve closed
7/8/2012	12:38:35 PM	Bypass valve closed
7/8/2012	12:38:35 PM	Bubbler valve closed
7/8/2012	12:38:35 PM	Main Vac valve opened
7/8/2012	12:38:35 PM	Helium MFC set to  0.000000
7/8/2012	12:38:35 PM	H2 MFC set to  0.000000
7/8/2012	12:38:35 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:35 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:35 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:35 PM	Tube furnace set to 0
7/8/2012	12:38:46 PM	H2 valve closed
7/8/2012	12:38:46 PM	BCl3 valve closed
7/8/2012	12:38:46 PM	PH3 valve closed
7/8/2012	12:38:46 PM	SiCl4 pre valve closed
7/8/2012	12:38:46 PM	SiCl4 post valve closed
7/8/2012	12:38:46 PM	Bypass valve closed
7/8/2012	12:38:46 PM	Bubbler valve closed
7/8/2012	12:38:46 PM	Helium valve opened
7/8/2012	12:38:46 PM	Main Vac valve opened
7/8/2012	12:38:46 PM	Helium MFC set to  20.000000
7/8/2012	12:38:46 PM	H2 MFC set to  0.000000
7/8/2012	12:38:46 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:46 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:46 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:46 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:46 PM	Tube furnace set to 0
7/8/2012	12:38:48 PM	Helium valve closed
7/8/2012	12:38:48 PM	H2 valve closed
7/8/2012	12:38:48 PM	BCl3 valve closed
7/8/2012	12:38:48 PM	PH3 valve closed
7/8/2012	12:38:48 PM	SiCl4 pre valve closed
7/8/2012	12:38:48 PM	SiCl4 post valve closed
7/8/2012	12:38:48 PM	Bypass valve closed
7/8/2012	12:38:48 PM	Bubbler valve closed
7/8/2012	12:38:48 PM	Main Vac valve opened
7/8/2012	12:38:48 PM	Helium MFC set to  0.000000
7/8/2012	12:38:48 PM	H2 MFC set to  0.000000
7/8/2012	12:38:48 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:48 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:48 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:48 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:48 PM	Tube furnace set to 0
7/8/2012	12:38:49 PM	H2 valve closed
7/8/2012	12:38:49 PM	BCl3 valve closed
7/8/2012	12:38:49 PM	PH3 valve closed
7/8/2012	12:38:49 PM	SiCl4 pre valve closed
7/8/2012	12:38:49 PM	SiCl4 post valve closed
7/8/2012	12:38:49 PM	Bypass valve closed
7/8/2012	12:38:49 PM	Bubbler valve closed
7/8/2012	12:38:49 PM	Helium valve opened
7/8/2012	12:38:49 PM	Main Vac valve opened
7/8/2012	12:38:49 PM	Helium MFC set to  20.000000
7/8/2012	12:38:49 PM	H2 MFC set to  0.000000
7/8/2012	12:38:49 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:49 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:49 PM	Tube furnace set to 0
7/8/2012	12:38:49 PM	Helium valve closed
7/8/2012	12:38:49 PM	H2 valve closed
7/8/2012	12:38:49 PM	BCl3 valve closed
7/8/2012	12:38:49 PM	PH3 valve closed
7/8/2012	12:38:49 PM	SiCl4 pre valve closed
7/8/2012	12:38:49 PM	SiCl4 post valve closed
7/8/2012	12:38:49 PM	Bypass valve closed
7/8/2012	12:38:49 PM	Bubbler valve closed
7/8/2012	12:38:49 PM	Main Vac valve opened
7/8/2012	12:38:49 PM	Helium MFC set to  0.000000
7/8/2012	12:38:49 PM	H2 MFC set to  0.000000
7/8/2012	12:38:49 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:49 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:50 PM	Tube furnace set to 0
7/8/2012	12:38:50 PM	H2 valve closed
7/8/2012	12:38:50 PM	BCl3 valve closed
7/8/2012	12:38:50 PM	PH3 valve closed
7/8/2012	12:38:50 PM	SiCl4 pre valve closed
7/8/2012	12:38:50 PM	SiCl4 post valve closed
7/8/2012	12:38:50 PM	Bypass valve closed
7/8/2012	12:38:50 PM	Bubbler valve closed
7/8/2012	12:38:50 PM	Helium valve opened
7/8/2012	12:38:50 PM	Main Vac valve opened
7/8/2012	12:38:50 PM	Helium MFC set to  20.000000
7/8/2012	12:38:50 PM	H2 MFC set to  0.000000
7/8/2012	12:38:50 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:50 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:50 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:50 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:50 PM	Tube furnace set to 0
7/8/2012	12:38:51 PM	Helium valve closed
7/8/2012	12:38:51 PM	H2 valve closed
7/8/2012	12:38:51 PM	BCl3 valve closed
7/8/2012	12:38:51 PM	PH3 valve closed
7/8/2012	12:38:51 PM	SiCl4 pre valve closed
7/8/2012	12:38:51 PM	SiCl4 post valve closed
7/8/2012	12:38:51 PM	Bypass valve closed
7/8/2012	12:38:51 PM	Bubbler valve closed
7/8/2012	12:38:51 PM	Main Vac valve opened
7/8/2012	12:38:51 PM	Helium MFC set to  0.000000
7/8/2012	12:38:51 PM	H2 MFC set to  0.000000
7/8/2012	12:38:51 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:51 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:51 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:51 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:51 PM	Tube furnace set to 0
7/8/2012	12:38:51 PM	H2 valve closed
7/8/2012	12:38:51 PM	BCl3 valve closed
7/8/2012	12:38:51 PM	PH3 valve closed
7/8/2012	12:38:51 PM	SiCl4 pre valve closed
7/8/2012	12:38:51 PM	SiCl4 post valve closed
7/8/2012	12:38:51 PM	Bypass valve closed
7/8/2012	12:38:51 PM	Bubbler valve closed
7/8/2012	12:38:51 PM	Helium valve opened
7/8/2012	12:38:51 PM	Main Vac valve opened
7/8/2012	12:38:51 PM	Helium MFC set to  20.000000
7/8/2012	12:38:51 PM	H2 MFC set to  0.000000
7/8/2012	12:38:51 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:51 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:51 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:51 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:51 PM	Tube furnace set to 0
7/8/2012	12:38:52 PM	Helium valve closed
7/8/2012	12:38:52 PM	H2 valve closed
7/8/2012	12:38:52 PM	BCl3 valve closed
7/8/2012	12:38:52 PM	PH3 valve closed
7/8/2012	12:38:52 PM	SiCl4 pre valve closed
7/8/2012	12:38:52 PM	SiCl4 post valve closed
7/8/2012	12:38:52 PM	Bypass valve closed
7/8/2012	12:38:52 PM	Bubbler valve closed
7/8/2012	12:38:52 PM	Main Vac valve opened
7/8/2012	12:38:52 PM	Helium MFC set to  0.000000
7/8/2012	12:38:52 PM	H2 MFC set to  0.000000
7/8/2012	12:38:52 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:52 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:52 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:52 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:52 PM	Tube furnace set to 0
7/8/2012	12:38:53 PM	H2 valve closed
7/8/2012	12:38:53 PM	BCl3 valve closed
7/8/2012	12:38:53 PM	PH3 valve closed
7/8/2012	12:38:53 PM	SiCl4 pre valve closed
7/8/2012	12:38:53 PM	SiCl4 post valve closed
7/8/2012	12:38:53 PM	Bypass valve closed
7/8/2012	12:38:53 PM	Bubbler valve closed
7/8/2012	12:38:53 PM	Helium valve opened
7/8/2012	12:38:53 PM	Main Vac valve opened
7/8/2012	12:38:53 PM	Helium MFC set to  20.000000
7/8/2012	12:38:53 PM	H2 MFC set to  0.000000
7/8/2012	12:38:53 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:53 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:53 PM	Tube furnace set to 0
7/8/2012	12:38:53 PM	Helium valve closed
7/8/2012	12:38:53 PM	H2 valve closed
7/8/2012	12:38:53 PM	BCl3 valve closed
7/8/2012	12:38:53 PM	PH3 valve closed
7/8/2012	12:38:53 PM	SiCl4 pre valve closed
7/8/2012	12:38:53 PM	SiCl4 post valve closed
7/8/2012	12:38:53 PM	Bypass valve closed
7/8/2012	12:38:53 PM	Bubbler valve closed
7/8/2012	12:38:53 PM	Main Vac valve opened
7/8/2012	12:38:53 PM	Helium MFC set to  0.000000
7/8/2012	12:38:53 PM	H2 MFC set to  0.000000
7/8/2012	12:38:53 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:53 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:53 PM	Tube furnace set to 0
7/8/2012	12:38:53 PM	H2 valve closed
7/8/2012	12:38:53 PM	BCl3 valve closed
7/8/2012	12:38:53 PM	PH3 valve closed
7/8/2012	12:38:54 PM	SiCl4 pre valve closed
7/8/2012	12:38:54 PM	SiCl4 post valve closed
7/8/2012	12:38:54 PM	Bypass valve closed
7/8/2012	12:38:54 PM	Bubbler valve closed
7/8/2012	12:38:54 PM	Helium valve opened
7/8/2012	12:38:54 PM	Main Vac valve opened
7/8/2012	12:38:54 PM	Helium MFC set to  20.000000
7/8/2012	12:38:54 PM	H2 MFC set to  0.000000
7/8/2012	12:38:54 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:54 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:54 PM	Tube furnace set to 0
7/8/2012	12:38:54 PM	Helium valve closed
7/8/2012	12:38:54 PM	H2 valve closed
7/8/2012	12:38:54 PM	BCl3 valve closed
7/8/2012	12:38:54 PM	PH3 valve closed
7/8/2012	12:38:54 PM	SiCl4 pre valve closed
7/8/2012	12:38:54 PM	SiCl4 post valve closed
7/8/2012	12:38:54 PM	Bypass valve closed
7/8/2012	12:38:54 PM	Bubbler valve closed
7/8/2012	12:38:54 PM	Main Vac valve opened
7/8/2012	12:38:54 PM	Helium MFC set to  0.000000
7/8/2012	12:38:54 PM	H2 MFC set to  0.000000
7/8/2012	12:38:54 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:54 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:54 PM	Tube furnace set to 0
7/8/2012	12:38:55 PM	H2 valve closed
7/8/2012	12:38:55 PM	BCl3 valve closed
7/8/2012	12:38:55 PM	PH3 valve closed
7/8/2012	12:38:55 PM	SiCl4 pre valve closed
7/8/2012	12:38:55 PM	SiCl4 post valve closed
7/8/2012	12:38:55 PM	Bypass valve closed
7/8/2012	12:38:55 PM	Bubbler valve closed
7/8/2012	12:38:55 PM	Helium valve opened
7/8/2012	12:38:55 PM	Main Vac valve opened
7/8/2012	12:38:55 PM	Helium MFC set to  20.000000
7/8/2012	12:38:55 PM	H2 MFC set to  0.000000
7/8/2012	12:38:55 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:55 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:55 PM	Tube furnace set to 0
7/8/2012	12:38:55 PM	Helium valve closed
7/8/2012	12:38:55 PM	H2 valve closed
7/8/2012	12:38:55 PM	BCl3 valve closed
7/8/2012	12:38:55 PM	PH3 valve closed
7/8/2012	12:38:55 PM	SiCl4 pre valve closed
7/8/2012	12:38:55 PM	SiCl4 post valve closed
7/8/2012	12:38:55 PM	Bypass valve closed
7/8/2012	12:38:55 PM	Bubbler valve closed
7/8/2012	12:38:55 PM	Main Vac valve opened
7/8/2012	12:38:55 PM	Helium MFC set to  0.000000
7/8/2012	12:38:55 PM	H2 MFC set to  0.000000
7/8/2012	12:38:55 PM	BCl3 MFC set to  0.000000
7/8/2012	12:38:55 PM	PH3 MFC set to  0.000000
7/8/2012	12:38:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:38:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:38:55 PM	Tube furnace set to 0
7/8/2012	12:39:25 PM	H2 valve closed
7/8/2012	12:39:25 PM	BCl3 valve closed
7/8/2012	12:39:25 PM	PH3 valve closed
7/8/2012	12:39:25 PM	SiCl4 pre valve closed
7/8/2012	12:39:25 PM	SiCl4 post valve closed
7/8/2012	12:39:25 PM	Bypass valve closed
7/8/2012	12:39:25 PM	Bubbler valve closed
7/8/2012	12:39:25 PM	Helium valve opened
7/8/2012	12:39:25 PM	Main Vac valve opened
7/8/2012	12:39:25 PM	Helium MFC set to  20.000000
7/8/2012	12:39:25 PM	H2 MFC set to  0.000000
7/8/2012	12:39:25 PM	BCl3 MFC set to  0.000000
7/8/2012	12:39:25 PM	PH3 MFC set to  0.000000
7/8/2012	12:39:25 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:39:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:39:26 PM	Tube furnace set to 0
7/8/2012	12:39:56 PM	Helium valve closed
7/8/2012	12:39:56 PM	H2 valve closed
7/8/2012	12:39:56 PM	BCl3 valve closed
7/8/2012	12:39:56 PM	PH3 valve closed
7/8/2012	12:39:56 PM	SiCl4 pre valve closed
7/8/2012	12:39:56 PM	SiCl4 post valve closed
7/8/2012	12:39:56 PM	Bypass valve closed
7/8/2012	12:39:56 PM	Bubbler valve closed
7/8/2012	12:39:56 PM	Main Vac valve opened
7/8/2012	12:39:56 PM	Helium MFC set to  0.000000
7/8/2012	12:39:56 PM	H2 MFC set to  0.000000
7/8/2012	12:39:56 PM	BCl3 MFC set to  0.000000
7/8/2012	12:39:56 PM	PH3 MFC set to  0.000000
7/8/2012	12:39:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:39:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:39:56 PM	Tube furnace set to 0
7/8/2012	12:40:26 PM	H2 valve closed
7/8/2012	12:40:26 PM	BCl3 valve closed
7/8/2012	12:40:26 PM	PH3 valve closed
7/8/2012	12:40:26 PM	SiCl4 pre valve closed
7/8/2012	12:40:26 PM	SiCl4 post valve closed
7/8/2012	12:40:26 PM	Bypass valve closed
7/8/2012	12:40:26 PM	Bubbler valve closed
7/8/2012	12:40:26 PM	Helium valve opened
7/8/2012	12:40:26 PM	Main Vac valve opened
7/8/2012	12:40:26 PM	Helium MFC set to  20.000000
7/8/2012	12:40:26 PM	H2 MFC set to  0.000000
7/8/2012	12:40:26 PM	BCl3 MFC set to  0.000000
7/8/2012	12:40:26 PM	PH3 MFC set to  0.000000
7/8/2012	12:40:26 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:40:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:40:26 PM	Tube furnace set to 0
7/8/2012	12:40:56 PM	Helium valve closed
7/8/2012	12:40:56 PM	H2 valve closed
7/8/2012	12:40:56 PM	BCl3 valve closed
7/8/2012	12:40:56 PM	PH3 valve closed
7/8/2012	12:40:56 PM	SiCl4 pre valve closed
7/8/2012	12:40:56 PM	SiCl4 post valve closed
7/8/2012	12:40:56 PM	Bypass valve closed
7/8/2012	12:40:56 PM	Bubbler valve closed
7/8/2012	12:40:56 PM	Main Vac valve opened
7/8/2012	12:40:56 PM	Helium MFC set to  0.000000
7/8/2012	12:40:56 PM	H2 MFC set to  0.000000
7/8/2012	12:40:56 PM	BCl3 MFC set to  0.000000
7/8/2012	12:40:56 PM	PH3 MFC set to  0.000000
7/8/2012	12:40:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:40:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:40:56 PM	Tube furnace set to 200
7/8/2012	12:41:26 PM	H2 valve closed
7/8/2012	12:41:26 PM	BCl3 valve closed
7/8/2012	12:41:26 PM	PH3 valve closed
7/8/2012	12:41:26 PM	SiCl4 pre valve closed
7/8/2012	12:41:26 PM	SiCl4 post valve closed
7/8/2012	12:41:26 PM	Bypass valve closed
7/8/2012	12:41:26 PM	Bubbler valve closed
7/8/2012	12:41:26 PM	Helium valve opened
7/8/2012	12:41:26 PM	Main Vac valve opened
7/8/2012	12:41:26 PM	Helium MFC set to  20.000000
7/8/2012	12:41:26 PM	H2 MFC set to  0.000000
7/8/2012	12:41:26 PM	BCl3 MFC set to  0.000000
7/8/2012	12:41:26 PM	PH3 MFC set to  0.000000
7/8/2012	12:41:26 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:41:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:41:27 PM	Tube furnace set to 200
7/8/2012	12:41:57 PM	Helium valve closed
7/8/2012	12:41:57 PM	H2 valve closed
7/8/2012	12:41:57 PM	BCl3 valve closed
7/8/2012	12:41:57 PM	PH3 valve closed
7/8/2012	12:41:57 PM	SiCl4 pre valve closed
7/8/2012	12:41:57 PM	SiCl4 post valve closed
7/8/2012	12:41:57 PM	Bypass valve closed
7/8/2012	12:41:57 PM	Bubbler valve closed
7/8/2012	12:41:57 PM	Main Vac valve opened
7/8/2012	12:41:57 PM	Helium MFC set to  0.000000
7/8/2012	12:41:57 PM	H2 MFC set to  0.000000
7/8/2012	12:41:57 PM	BCl3 MFC set to  0.000000
7/8/2012	12:41:57 PM	PH3 MFC set to  0.000000
7/8/2012	12:41:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:41:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:41:57 PM	Tube furnace set to 200
7/8/2012	12:42:27 PM	H2 valve closed
7/8/2012	12:42:27 PM	BCl3 valve closed
7/8/2012	12:42:27 PM	PH3 valve closed
7/8/2012	12:42:27 PM	SiCl4 pre valve closed
7/8/2012	12:42:27 PM	SiCl4 post valve closed
7/8/2012	12:42:27 PM	Bypass valve closed
7/8/2012	12:42:27 PM	Bubbler valve closed
7/8/2012	12:42:27 PM	Helium valve opened
7/8/2012	12:42:27 PM	Main Vac valve opened
7/8/2012	12:42:27 PM	Helium MFC set to  20.000000
7/8/2012	12:42:27 PM	H2 MFC set to  0.000000
7/8/2012	12:42:27 PM	BCl3 MFC set to  0.000000
7/8/2012	12:42:27 PM	PH3 MFC set to  0.000000
7/8/2012	12:42:27 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:42:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:42:27 PM	Tube furnace set to 200
7/8/2012	12:42:57 PM	Helium valve closed
7/8/2012	12:42:57 PM	H2 valve closed
7/8/2012	12:42:57 PM	BCl3 valve closed
7/8/2012	12:42:57 PM	PH3 valve closed
7/8/2012	12:42:57 PM	SiCl4 pre valve closed
7/8/2012	12:42:57 PM	SiCl4 post valve closed
7/8/2012	12:42:57 PM	Bypass valve closed
7/8/2012	12:42:57 PM	Bubbler valve closed
7/8/2012	12:42:57 PM	Main Vac valve opened
7/8/2012	12:42:57 PM	Helium MFC set to  0.000000
7/8/2012	12:42:57 PM	H2 MFC set to  0.000000
7/8/2012	12:42:57 PM	BCl3 MFC set to  0.000000
7/8/2012	12:42:57 PM	PH3 MFC set to  0.000000
7/8/2012	12:42:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:42:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:42:57 PM	Tube furnace set to 200
7/8/2012	12:43:27 PM	H2 valve closed
7/8/2012	12:43:27 PM	BCl3 valve closed
7/8/2012	12:43:27 PM	PH3 valve closed
7/8/2012	12:43:27 PM	SiCl4 pre valve closed
7/8/2012	12:43:27 PM	SiCl4 post valve closed
7/8/2012	12:43:27 PM	Bypass valve closed
7/8/2012	12:43:27 PM	Bubbler valve closed
7/8/2012	12:43:27 PM	Helium valve opened
7/8/2012	12:43:27 PM	Main Vac valve opened
7/8/2012	12:43:27 PM	Helium MFC set to  20.000000
7/8/2012	12:43:27 PM	H2 MFC set to  0.000000
7/8/2012	12:43:27 PM	BCl3 MFC set to  0.000000
7/8/2012	12:43:27 PM	PH3 MFC set to  0.000000
7/8/2012	12:43:27 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:43:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:43:28 PM	Tube furnace set to 200
7/8/2012	12:43:58 PM	Helium valve closed
7/8/2012	12:43:58 PM	H2 valve closed
7/8/2012	12:43:58 PM	BCl3 valve closed
7/8/2012	12:43:58 PM	PH3 valve closed
7/8/2012	12:43:58 PM	SiCl4 pre valve closed
7/8/2012	12:43:58 PM	SiCl4 post valve closed
7/8/2012	12:43:58 PM	Bypass valve closed
7/8/2012	12:43:58 PM	Bubbler valve closed
7/8/2012	12:43:58 PM	Main Vac valve opened
7/8/2012	12:43:58 PM	Helium MFC set to  0.000000
7/8/2012	12:43:58 PM	H2 MFC set to  0.000000
7/8/2012	12:43:58 PM	BCl3 MFC set to  0.000000
7/8/2012	12:43:58 PM	PH3 MFC set to  0.000000
7/8/2012	12:43:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:43:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:43:58 PM	Tube furnace set to 200
7/8/2012	12:44:28 PM	H2 valve closed
7/8/2012	12:44:28 PM	BCl3 valve closed
7/8/2012	12:44:28 PM	PH3 valve closed
7/8/2012	12:44:28 PM	SiCl4 pre valve closed
7/8/2012	12:44:28 PM	SiCl4 post valve closed
7/8/2012	12:44:28 PM	Bypass valve closed
7/8/2012	12:44:28 PM	Bubbler valve closed
7/8/2012	12:44:28 PM	Helium valve opened
7/8/2012	12:44:28 PM	Main Vac valve opened
7/8/2012	12:44:28 PM	Helium MFC set to  20.000000
7/8/2012	12:44:28 PM	H2 MFC set to  0.000000
7/8/2012	12:44:28 PM	BCl3 MFC set to  0.000000
7/8/2012	12:44:28 PM	PH3 MFC set to  0.000000
7/8/2012	12:44:28 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:44:28 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:44:28 PM	Tube furnace set to 200
7/8/2012	12:44:58 PM	Helium valve closed
7/8/2012	12:44:58 PM	H2 valve closed
7/8/2012	12:44:58 PM	BCl3 valve closed
7/8/2012	12:44:58 PM	PH3 valve closed
7/8/2012	12:44:58 PM	SiCl4 pre valve closed
7/8/2012	12:44:58 PM	SiCl4 post valve closed
7/8/2012	12:44:58 PM	Bypass valve closed
7/8/2012	12:44:58 PM	Bubbler valve closed
7/8/2012	12:44:58 PM	Main Vac valve opened
7/8/2012	12:44:58 PM	Helium MFC set to  0.000000
7/8/2012	12:44:58 PM	H2 MFC set to  0.000000
7/8/2012	12:44:58 PM	BCl3 MFC set to  0.000000
7/8/2012	12:44:58 PM	PH3 MFC set to  0.000000
7/8/2012	12:44:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:44:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:44:58 PM	Tube furnace set to 200
7/8/2012	12:45:28 PM	H2 valve closed
7/8/2012	12:45:28 PM	BCl3 valve closed
7/8/2012	12:45:28 PM	PH3 valve closed
7/8/2012	12:45:28 PM	SiCl4 pre valve closed
7/8/2012	12:45:28 PM	SiCl4 post valve closed
7/8/2012	12:45:28 PM	Bypass valve closed
7/8/2012	12:45:28 PM	Bubbler valve closed
7/8/2012	12:45:28 PM	Helium valve opened
7/8/2012	12:45:28 PM	Main Vac valve opened
7/8/2012	12:45:28 PM	Helium MFC set to  20.000000
7/8/2012	12:45:28 PM	H2 MFC set to  0.000000
7/8/2012	12:45:28 PM	BCl3 MFC set to  0.000000
7/8/2012	12:45:28 PM	PH3 MFC set to  0.000000
7/8/2012	12:45:28 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:45:28 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:45:28 PM	Tube furnace set to 200
7/8/2012	12:45:59 PM	Helium valve closed
7/8/2012	12:45:59 PM	H2 valve closed
7/8/2012	12:45:59 PM	BCl3 valve closed
7/8/2012	12:45:59 PM	PH3 valve closed
7/8/2012	12:45:59 PM	SiCl4 pre valve closed
7/8/2012	12:45:59 PM	SiCl4 post valve closed
7/8/2012	12:45:59 PM	Bypass valve closed
7/8/2012	12:45:59 PM	Bubbler valve closed
7/8/2012	12:45:59 PM	Main Vac valve opened
7/8/2012	12:45:59 PM	Helium MFC set to  0.000000
7/8/2012	12:45:59 PM	H2 MFC set to  0.000000
7/8/2012	12:45:59 PM	BCl3 MFC set to  0.000000
7/8/2012	12:45:59 PM	PH3 MFC set to  0.000000
7/8/2012	12:45:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:45:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:45:59 PM	Tube furnace set to 200
7/8/2012	12:46:29 PM	H2 valve closed
7/8/2012	12:46:29 PM	BCl3 valve closed
7/8/2012	12:46:29 PM	PH3 valve closed
7/8/2012	12:46:29 PM	SiCl4 pre valve closed
7/8/2012	12:46:29 PM	SiCl4 post valve closed
7/8/2012	12:46:29 PM	Bypass valve closed
7/8/2012	12:46:29 PM	Bubbler valve closed
7/8/2012	12:46:29 PM	Helium valve opened
7/8/2012	12:46:29 PM	Main Vac valve opened
7/8/2012	12:46:29 PM	Helium MFC set to  20.000000
7/8/2012	12:46:29 PM	H2 MFC set to  0.000000
7/8/2012	12:46:29 PM	BCl3 MFC set to  0.000000
7/8/2012	12:46:29 PM	PH3 MFC set to  0.000000
7/8/2012	12:46:29 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:46:29 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:46:29 PM	Tube furnace set to 200
7/8/2012	12:46:59 PM	Helium valve closed
7/8/2012	12:46:59 PM	H2 valve closed
7/8/2012	12:46:59 PM	BCl3 valve closed
7/8/2012	12:46:59 PM	PH3 valve closed
7/8/2012	12:46:59 PM	SiCl4 pre valve closed
7/8/2012	12:46:59 PM	SiCl4 post valve closed
7/8/2012	12:46:59 PM	Bypass valve closed
7/8/2012	12:46:59 PM	Bubbler valve closed
7/8/2012	12:46:59 PM	Main Vac valve opened
7/8/2012	12:46:59 PM	Helium MFC set to  0.000000
7/8/2012	12:46:59 PM	H2 MFC set to  0.000000
7/8/2012	12:46:59 PM	BCl3 MFC set to  0.000000
7/8/2012	12:46:59 PM	PH3 MFC set to  0.000000
7/8/2012	12:46:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:46:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:46:59 PM	Tube furnace set to 0
7/8/2012	12:47:00 PM	Run finished at 12:47 PM
7/8/2012	12:53:34 PM	Main Vac valve closed
7/8/2012	12:53:41 PM	Main Vac valve opened
7/8/2012	12:53:54 PM	Recipe started at 12:53 PM
7/8/2012	12:53:54 PM	Helium valve closed
7/8/2012	12:53:54 PM	H2 valve closed
7/8/2012	12:53:54 PM	BCl3 valve closed
7/8/2012	12:53:54 PM	PH3 valve closed
7/8/2012	12:53:54 PM	SiCl4 pre valve closed
7/8/2012	12:53:54 PM	SiCl4 post valve closed
7/8/2012	12:53:54 PM	Bypass valve closed
7/8/2012	12:53:54 PM	Bubbler valve closed
7/8/2012	12:53:54 PM	Main Vac valve opened
7/8/2012	12:53:54 PM	Helium MFC set to  0.000000
7/8/2012	12:53:54 PM	H2 MFC set to  0.000000
7/8/2012	12:53:54 PM	BCl3 MFC set to  0.000000
7/8/2012	12:53:54 PM	PH3 MFC set to  0.000000
7/8/2012	12:53:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:53:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:53:54 PM	Tube furnace set to 0
7/8/2012	12:54:24 PM	H2 valve closed
7/8/2012	12:54:24 PM	BCl3 valve closed
7/8/2012	12:54:24 PM	PH3 valve closed
7/8/2012	12:54:24 PM	SiCl4 pre valve closed
7/8/2012	12:54:24 PM	SiCl4 post valve closed
7/8/2012	12:54:24 PM	Bypass valve closed
7/8/2012	12:54:24 PM	Bubbler valve closed
7/8/2012	12:54:24 PM	Helium valve opened
7/8/2012	12:54:24 PM	Main Vac valve opened
7/8/2012	12:54:24 PM	Helium MFC set to  20.000000
7/8/2012	12:54:24 PM	H2 MFC set to  0.000000
7/8/2012	12:54:24 PM	BCl3 MFC set to  0.000000
7/8/2012	12:54:24 PM	PH3 MFC set to  0.000000
7/8/2012	12:54:24 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:54:24 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:54:24 PM	Tube furnace set to 0
7/8/2012	12:54:54 PM	Helium valve closed
7/8/2012	12:54:54 PM	H2 valve closed
7/8/2012	12:54:54 PM	BCl3 valve closed
7/8/2012	12:54:54 PM	PH3 valve closed
7/8/2012	12:54:54 PM	SiCl4 pre valve closed
7/8/2012	12:54:54 PM	SiCl4 post valve closed
7/8/2012	12:54:54 PM	Bypass valve closed
7/8/2012	12:54:54 PM	Bubbler valve closed
7/8/2012	12:54:54 PM	Main Vac valve opened
7/8/2012	12:54:54 PM	Helium MFC set to  0.000000
7/8/2012	12:54:54 PM	H2 MFC set to  0.000000
7/8/2012	12:54:54 PM	BCl3 MFC set to  0.000000
7/8/2012	12:54:54 PM	PH3 MFC set to  0.000000
7/8/2012	12:54:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:54:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:54:54 PM	Tube furnace set to 0
7/8/2012	12:55:24 PM	H2 valve closed
7/8/2012	12:55:24 PM	BCl3 valve closed
7/8/2012	12:55:24 PM	PH3 valve closed
7/8/2012	12:55:24 PM	SiCl4 pre valve closed
7/8/2012	12:55:24 PM	SiCl4 post valve closed
7/8/2012	12:55:24 PM	Bypass valve closed
7/8/2012	12:55:24 PM	Bubbler valve closed
7/8/2012	12:55:24 PM	Helium valve opened
7/8/2012	12:55:24 PM	Main Vac valve opened
7/8/2012	12:55:24 PM	Helium MFC set to  20.000000
7/8/2012	12:55:24 PM	H2 MFC set to  0.000000
7/8/2012	12:55:24 PM	BCl3 MFC set to  0.000000
7/8/2012	12:55:24 PM	PH3 MFC set to  0.000000
7/8/2012	12:55:24 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:55:24 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:55:24 PM	Tube furnace set to 0
7/8/2012	12:55:55 PM	Helium valve closed
7/8/2012	12:55:55 PM	H2 valve closed
7/8/2012	12:55:55 PM	BCl3 valve closed
7/8/2012	12:55:55 PM	PH3 valve closed
7/8/2012	12:55:55 PM	SiCl4 pre valve closed
7/8/2012	12:55:55 PM	SiCl4 post valve closed
7/8/2012	12:55:55 PM	Bypass valve closed
7/8/2012	12:55:55 PM	Bubbler valve closed
7/8/2012	12:55:55 PM	Main Vac valve opened
7/8/2012	12:55:55 PM	Helium MFC set to  0.000000
7/8/2012	12:55:55 PM	H2 MFC set to  0.000000
7/8/2012	12:55:55 PM	BCl3 MFC set to  0.000000
7/8/2012	12:55:55 PM	PH3 MFC set to  0.000000
7/8/2012	12:55:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:55:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:55:55 PM	Tube furnace set to 0
7/8/2012	12:56:25 PM	H2 valve closed
7/8/2012	12:56:25 PM	BCl3 valve closed
7/8/2012	12:56:25 PM	PH3 valve closed
7/8/2012	12:56:25 PM	SiCl4 pre valve closed
7/8/2012	12:56:25 PM	SiCl4 post valve closed
7/8/2012	12:56:25 PM	Bypass valve closed
7/8/2012	12:56:25 PM	Bubbler valve closed
7/8/2012	12:56:25 PM	Helium valve opened
7/8/2012	12:56:25 PM	Main Vac valve opened
7/8/2012	12:56:25 PM	Helium MFC set to  20.000000
7/8/2012	12:56:25 PM	H2 MFC set to  0.000000
7/8/2012	12:56:25 PM	BCl3 MFC set to  0.000000
7/8/2012	12:56:25 PM	PH3 MFC set to  0.000000
7/8/2012	12:56:25 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:56:25 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:56:25 PM	Tube furnace set to 0
7/8/2012	12:56:55 PM	Helium valve closed
7/8/2012	12:56:55 PM	H2 valve closed
7/8/2012	12:56:55 PM	BCl3 valve closed
7/8/2012	12:56:55 PM	PH3 valve closed
7/8/2012	12:56:55 PM	SiCl4 pre valve closed
7/8/2012	12:56:55 PM	SiCl4 post valve closed
7/8/2012	12:56:55 PM	Bypass valve closed
7/8/2012	12:56:55 PM	Bubbler valve closed
7/8/2012	12:56:55 PM	Main Vac valve opened
7/8/2012	12:56:55 PM	Helium MFC set to  0.000000
7/8/2012	12:56:55 PM	H2 MFC set to  0.000000
7/8/2012	12:56:55 PM	BCl3 MFC set to  0.000000
7/8/2012	12:56:55 PM	PH3 MFC set to  0.000000
7/8/2012	12:56:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:56:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:56:55 PM	Tube furnace set to 0
7/8/2012	12:57:25 PM	H2 valve closed
7/8/2012	12:57:25 PM	BCl3 valve closed
7/8/2012	12:57:25 PM	PH3 valve closed
7/8/2012	12:57:25 PM	SiCl4 pre valve closed
7/8/2012	12:57:25 PM	SiCl4 post valve closed
7/8/2012	12:57:25 PM	Bypass valve closed
7/8/2012	12:57:25 PM	Bubbler valve closed
7/8/2012	12:57:25 PM	Helium valve opened
7/8/2012	12:57:25 PM	Main Vac valve opened
7/8/2012	12:57:25 PM	Helium MFC set to  20.000000
7/8/2012	12:57:25 PM	H2 MFC set to  0.000000
7/8/2012	12:57:25 PM	BCl3 MFC set to  0.000000
7/8/2012	12:57:25 PM	PH3 MFC set to  0.000000
7/8/2012	12:57:25 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:57:25 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:57:25 PM	Tube furnace set to 0
7/8/2012	12:57:55 PM	Helium valve closed
7/8/2012	12:57:55 PM	H2 valve closed
7/8/2012	12:57:55 PM	BCl3 valve closed
7/8/2012	12:57:55 PM	PH3 valve closed
7/8/2012	12:57:55 PM	SiCl4 pre valve closed
7/8/2012	12:57:55 PM	SiCl4 post valve closed
7/8/2012	12:57:55 PM	Bypass valve closed
7/8/2012	12:57:55 PM	Bubbler valve closed
7/8/2012	12:57:55 PM	Main Vac valve opened
7/8/2012	12:57:55 PM	Helium MFC set to  0.000000
7/8/2012	12:57:55 PM	H2 MFC set to  0.000000
7/8/2012	12:57:55 PM	BCl3 MFC set to  0.000000
7/8/2012	12:57:56 PM	PH3 MFC set to  0.000000
7/8/2012	12:57:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:57:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:57:56 PM	Tube furnace set to 0
7/8/2012	12:58:26 PM	H2 valve closed
7/8/2012	12:58:26 PM	BCl3 valve closed
7/8/2012	12:58:26 PM	PH3 valve closed
7/8/2012	12:58:26 PM	SiCl4 pre valve closed
7/8/2012	12:58:26 PM	SiCl4 post valve closed
7/8/2012	12:58:26 PM	Bypass valve closed
7/8/2012	12:58:26 PM	Bubbler valve closed
7/8/2012	12:58:26 PM	Helium valve opened
7/8/2012	12:58:26 PM	Main Vac valve opened
7/8/2012	12:58:26 PM	Helium MFC set to  20.000000
7/8/2012	12:58:26 PM	H2 MFC set to  0.000000
7/8/2012	12:58:26 PM	BCl3 MFC set to  0.000000
7/8/2012	12:58:26 PM	PH3 MFC set to  0.000000
7/8/2012	12:58:26 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:58:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:58:26 PM	Tube furnace set to 0
7/8/2012	12:58:56 PM	Helium valve closed
7/8/2012	12:58:56 PM	H2 valve closed
7/8/2012	12:58:56 PM	BCl3 valve closed
7/8/2012	12:58:56 PM	PH3 valve closed
7/8/2012	12:58:56 PM	SiCl4 pre valve closed
7/8/2012	12:58:56 PM	SiCl4 post valve closed
7/8/2012	12:58:56 PM	Bypass valve closed
7/8/2012	12:58:56 PM	Bubbler valve closed
7/8/2012	12:58:56 PM	Main Vac valve opened
7/8/2012	12:58:56 PM	Helium MFC set to  0.000000
7/8/2012	12:58:56 PM	H2 MFC set to  0.000000
7/8/2012	12:58:56 PM	BCl3 MFC set to  0.000000
7/8/2012	12:58:56 PM	PH3 MFC set to  0.000000
7/8/2012	12:58:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:58:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:58:56 PM	Tube furnace set to 0
7/8/2012	12:59:26 PM	H2 valve closed
7/8/2012	12:59:26 PM	BCl3 valve closed
7/8/2012	12:59:26 PM	PH3 valve closed
7/8/2012	12:59:26 PM	SiCl4 pre valve closed
7/8/2012	12:59:26 PM	SiCl4 post valve closed
7/8/2012	12:59:26 PM	Bypass valve closed
7/8/2012	12:59:26 PM	Bubbler valve closed
7/8/2012	12:59:26 PM	Helium valve opened
7/8/2012	12:59:26 PM	Main Vac valve opened
7/8/2012	12:59:26 PM	Helium MFC set to  20.000000
7/8/2012	12:59:26 PM	H2 MFC set to  0.000000
7/8/2012	12:59:26 PM	BCl3 MFC set to  0.000000
7/8/2012	12:59:26 PM	PH3 MFC set to  0.000000
7/8/2012	12:59:26 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:59:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:59:26 PM	Tube furnace set to 0
7/8/2012	12:59:56 PM	Helium valve closed
7/8/2012	12:59:56 PM	H2 valve closed
7/8/2012	12:59:56 PM	BCl3 valve closed
7/8/2012	12:59:56 PM	PH3 valve closed
7/8/2012	12:59:56 PM	SiCl4 pre valve closed
7/8/2012	12:59:56 PM	SiCl4 post valve closed
7/8/2012	12:59:56 PM	Bypass valve closed
7/8/2012	12:59:56 PM	Bubbler valve closed
7/8/2012	12:59:56 PM	Main Vac valve opened
7/8/2012	12:59:56 PM	Helium MFC set to  0.000000
7/8/2012	12:59:56 PM	H2 MFC set to  0.000000
7/8/2012	12:59:56 PM	BCl3 MFC set to  0.000000
7/8/2012	12:59:56 PM	PH3 MFC set to  0.000000
7/8/2012	12:59:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	12:59:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	12:59:57 PM	Tube furnace set to 0
7/8/2012	1:00:27 PM	H2 valve closed
7/8/2012	1:00:27 PM	BCl3 valve closed
7/8/2012	1:00:27 PM	PH3 valve closed
7/8/2012	1:00:27 PM	SiCl4 pre valve closed
7/8/2012	1:00:27 PM	SiCl4 post valve closed
7/8/2012	1:00:27 PM	Bypass valve closed
7/8/2012	1:00:27 PM	Bubbler valve closed
7/8/2012	1:00:27 PM	Helium valve opened
7/8/2012	1:00:27 PM	Main Vac valve opened
7/8/2012	1:00:27 PM	Helium MFC set to  20.000000
7/8/2012	1:00:27 PM	H2 MFC set to  0.000000
7/8/2012	1:00:27 PM	BCl3 MFC set to  0.000000
7/8/2012	1:00:27 PM	PH3 MFC set to  0.000000
7/8/2012	1:00:27 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:00:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:00:27 PM	Tube furnace set to 0
7/8/2012	1:00:57 PM	Helium valve closed
7/8/2012	1:00:57 PM	H2 valve closed
7/8/2012	1:00:57 PM	BCl3 valve closed
7/8/2012	1:00:57 PM	PH3 valve closed
7/8/2012	1:00:57 PM	SiCl4 pre valve closed
7/8/2012	1:00:57 PM	SiCl4 post valve closed
7/8/2012	1:00:57 PM	Bypass valve closed
7/8/2012	1:00:57 PM	Bubbler valve closed
7/8/2012	1:00:57 PM	Main Vac valve opened
7/8/2012	1:00:57 PM	Helium MFC set to  0.000000
7/8/2012	1:00:57 PM	H2 MFC set to  0.000000
7/8/2012	1:00:57 PM	BCl3 MFC set to  0.000000
7/8/2012	1:00:57 PM	PH3 MFC set to  0.000000
7/8/2012	1:00:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:00:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:00:57 PM	Tube furnace set to 0
7/8/2012	1:01:27 PM	H2 valve closed
7/8/2012	1:01:27 PM	BCl3 valve closed
7/8/2012	1:01:27 PM	PH3 valve closed
7/8/2012	1:01:27 PM	SiCl4 pre valve closed
7/8/2012	1:01:27 PM	SiCl4 post valve closed
7/8/2012	1:01:27 PM	Bypass valve closed
7/8/2012	1:01:27 PM	Bubbler valve closed
7/8/2012	1:01:27 PM	Helium valve opened
7/8/2012	1:01:27 PM	Main Vac valve opened
7/8/2012	1:01:27 PM	Helium MFC set to  20.000000
7/8/2012	1:01:27 PM	H2 MFC set to  0.000000
7/8/2012	1:01:27 PM	BCl3 MFC set to  0.000000
7/8/2012	1:01:27 PM	PH3 MFC set to  0.000000
7/8/2012	1:01:27 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:01:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:01:27 PM	Tube furnace set to 0
7/8/2012	1:01:57 PM	Helium valve closed
7/8/2012	1:01:57 PM	H2 valve closed
7/8/2012	1:01:57 PM	BCl3 valve closed
7/8/2012	1:01:57 PM	PH3 valve closed
7/8/2012	1:01:57 PM	SiCl4 pre valve closed
7/8/2012	1:01:57 PM	SiCl4 post valve closed
7/8/2012	1:01:57 PM	Bypass valve closed
7/8/2012	1:01:57 PM	Bubbler valve closed
7/8/2012	1:01:57 PM	Main Vac valve opened
7/8/2012	1:01:57 PM	Helium MFC set to  0.000000
7/8/2012	1:01:57 PM	H2 MFC set to  0.000000
7/8/2012	1:01:57 PM	BCl3 MFC set to  0.000000
7/8/2012	1:01:57 PM	PH3 MFC set to  0.000000
7/8/2012	1:01:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:01:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:01:58 PM	Tube furnace set to 0
7/8/2012	1:02:28 PM	H2 valve closed
7/8/2012	1:02:28 PM	BCl3 valve closed
7/8/2012	1:02:28 PM	PH3 valve closed
7/8/2012	1:02:28 PM	SiCl4 pre valve closed
7/8/2012	1:02:28 PM	SiCl4 post valve closed
7/8/2012	1:02:28 PM	Bypass valve closed
7/8/2012	1:02:28 PM	Bubbler valve closed
7/8/2012	1:02:28 PM	Helium valve opened
7/8/2012	1:02:28 PM	Main Vac valve opened
7/8/2012	1:02:28 PM	Helium MFC set to  20.000000
7/8/2012	1:02:28 PM	H2 MFC set to  0.000000
7/8/2012	1:02:28 PM	BCl3 MFC set to  0.000000
7/8/2012	1:02:28 PM	PH3 MFC set to  0.000000
7/8/2012	1:02:28 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:02:28 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:02:28 PM	Tube furnace set to 0
7/8/2012	1:02:58 PM	Helium valve closed
7/8/2012	1:02:58 PM	H2 valve closed
7/8/2012	1:02:58 PM	BCl3 valve closed
7/8/2012	1:02:58 PM	PH3 valve closed
7/8/2012	1:02:58 PM	SiCl4 pre valve closed
7/8/2012	1:02:58 PM	SiCl4 post valve closed
7/8/2012	1:02:58 PM	Bypass valve closed
7/8/2012	1:02:58 PM	Bubbler valve closed
7/8/2012	1:02:58 PM	Main Vac valve opened
7/8/2012	1:02:58 PM	Helium MFC set to  0.000000
7/8/2012	1:02:58 PM	H2 MFC set to  0.000000
7/8/2012	1:02:58 PM	BCl3 MFC set to  0.000000
7/8/2012	1:02:58 PM	PH3 MFC set to  0.000000
7/8/2012	1:02:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:02:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:02:58 PM	Tube furnace set to 200
7/8/2012	1:03:28 PM	H2 valve closed
7/8/2012	1:03:28 PM	BCl3 valve closed
7/8/2012	1:03:28 PM	PH3 valve closed
7/8/2012	1:03:28 PM	SiCl4 pre valve closed
7/8/2012	1:03:28 PM	SiCl4 post valve closed
7/8/2012	1:03:28 PM	Bypass valve closed
7/8/2012	1:03:28 PM	Bubbler valve closed
7/8/2012	1:03:28 PM	Helium valve opened
7/8/2012	1:03:28 PM	Main Vac valve opened
7/8/2012	1:03:28 PM	Helium MFC set to  20.000000
7/8/2012	1:03:28 PM	H2 MFC set to  0.000000
7/8/2012	1:03:28 PM	BCl3 MFC set to  0.000000
7/8/2012	1:03:28 PM	PH3 MFC set to  0.000000
7/8/2012	1:03:28 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:03:28 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:03:28 PM	Tube furnace set to 200
7/8/2012	1:03:58 PM	Helium valve closed
7/8/2012	1:03:58 PM	H2 valve closed
7/8/2012	1:03:58 PM	BCl3 valve closed
7/8/2012	1:03:58 PM	PH3 valve closed
7/8/2012	1:03:58 PM	SiCl4 pre valve closed
7/8/2012	1:03:58 PM	SiCl4 post valve closed
7/8/2012	1:03:58 PM	Bypass valve closed
7/8/2012	1:03:58 PM	Bubbler valve closed
7/8/2012	1:03:58 PM	Main Vac valve opened
7/8/2012	1:03:58 PM	Helium MFC set to  0.000000
7/8/2012	1:03:58 PM	H2 MFC set to  0.000000
7/8/2012	1:03:58 PM	BCl3 MFC set to  0.000000
7/8/2012	1:03:58 PM	PH3 MFC set to  0.000000
7/8/2012	1:03:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:03:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:03:58 PM	Tube furnace set to 200
7/8/2012	1:04:29 PM	H2 valve closed
7/8/2012	1:04:29 PM	BCl3 valve closed
7/8/2012	1:04:29 PM	PH3 valve closed
7/8/2012	1:04:29 PM	SiCl4 pre valve closed
7/8/2012	1:04:29 PM	SiCl4 post valve closed
7/8/2012	1:04:29 PM	Bypass valve closed
7/8/2012	1:04:29 PM	Bubbler valve closed
7/8/2012	1:04:29 PM	Helium valve opened
7/8/2012	1:04:29 PM	Main Vac valve opened
7/8/2012	1:04:29 PM	Helium MFC set to  20.000000
7/8/2012	1:04:29 PM	H2 MFC set to  0.000000
7/8/2012	1:04:29 PM	BCl3 MFC set to  0.000000
7/8/2012	1:04:29 PM	PH3 MFC set to  0.000000
7/8/2012	1:04:29 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:04:29 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:04:29 PM	Tube furnace set to 200
7/8/2012	1:04:59 PM	Helium valve closed
7/8/2012	1:04:59 PM	H2 valve closed
7/8/2012	1:04:59 PM	BCl3 valve closed
7/8/2012	1:04:59 PM	PH3 valve closed
7/8/2012	1:04:59 PM	SiCl4 pre valve closed
7/8/2012	1:04:59 PM	SiCl4 post valve closed
7/8/2012	1:04:59 PM	Bypass valve closed
7/8/2012	1:04:59 PM	Bubbler valve closed
7/8/2012	1:04:59 PM	Main Vac valve opened
7/8/2012	1:04:59 PM	Helium MFC set to  0.000000
7/8/2012	1:04:59 PM	H2 MFC set to  0.000000
7/8/2012	1:04:59 PM	BCl3 MFC set to  0.000000
7/8/2012	1:04:59 PM	PH3 MFC set to  0.000000
7/8/2012	1:04:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:04:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:04:59 PM	Tube furnace set to 200
7/8/2012	1:05:29 PM	H2 valve closed
7/8/2012	1:05:29 PM	BCl3 valve closed
7/8/2012	1:05:29 PM	PH3 valve closed
7/8/2012	1:05:29 PM	SiCl4 pre valve closed
7/8/2012	1:05:29 PM	SiCl4 post valve closed
7/8/2012	1:05:29 PM	Bypass valve closed
7/8/2012	1:05:29 PM	Bubbler valve closed
7/8/2012	1:05:29 PM	Helium valve opened
7/8/2012	1:05:29 PM	Main Vac valve opened
7/8/2012	1:05:29 PM	Helium MFC set to  20.000000
7/8/2012	1:05:29 PM	H2 MFC set to  0.000000
7/8/2012	1:05:29 PM	BCl3 MFC set to  0.000000
7/8/2012	1:05:29 PM	PH3 MFC set to  0.000000
7/8/2012	1:05:29 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:05:29 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:05:29 PM	Tube furnace set to 200
7/8/2012	1:05:59 PM	Helium valve closed
7/8/2012	1:05:59 PM	H2 valve closed
7/8/2012	1:05:59 PM	BCl3 valve closed
7/8/2012	1:05:59 PM	PH3 valve closed
7/8/2012	1:05:59 PM	SiCl4 pre valve closed
7/8/2012	1:05:59 PM	SiCl4 post valve closed
7/8/2012	1:05:59 PM	Bypass valve closed
7/8/2012	1:05:59 PM	Bubbler valve closed
7/8/2012	1:05:59 PM	Main Vac valve opened
7/8/2012	1:05:59 PM	Helium MFC set to  0.000000
7/8/2012	1:05:59 PM	H2 MFC set to  0.000000
7/8/2012	1:05:59 PM	BCl3 MFC set to  0.000000
7/8/2012	1:05:59 PM	PH3 MFC set to  0.000000
7/8/2012	1:05:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:05:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:05:59 PM	Tube furnace set to 200
7/8/2012	1:06:29 PM	H2 valve closed
7/8/2012	1:06:29 PM	BCl3 valve closed
7/8/2012	1:06:29 PM	PH3 valve closed
7/8/2012	1:06:29 PM	SiCl4 pre valve closed
7/8/2012	1:06:29 PM	SiCl4 post valve closed
7/8/2012	1:06:29 PM	Bypass valve closed
7/8/2012	1:06:29 PM	Bubbler valve closed
7/8/2012	1:06:29 PM	Helium valve opened
7/8/2012	1:06:29 PM	Main Vac valve opened
7/8/2012	1:06:30 PM	Helium MFC set to  20.000000
7/8/2012	1:06:30 PM	H2 MFC set to  0.000000
7/8/2012	1:06:30 PM	BCl3 MFC set to  0.000000
7/8/2012	1:06:30 PM	PH3 MFC set to  0.000000
7/8/2012	1:06:30 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:06:30 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:06:30 PM	Tube furnace set to 200
7/8/2012	1:07:00 PM	Helium valve closed
7/8/2012	1:07:00 PM	H2 valve closed
7/8/2012	1:07:00 PM	BCl3 valve closed
7/8/2012	1:07:00 PM	PH3 valve closed
7/8/2012	1:07:00 PM	SiCl4 pre valve closed
7/8/2012	1:07:00 PM	SiCl4 post valve closed
7/8/2012	1:07:00 PM	Bypass valve closed
7/8/2012	1:07:00 PM	Bubbler valve closed
7/8/2012	1:07:00 PM	Main Vac valve opened
7/8/2012	1:07:00 PM	Helium MFC set to  0.000000
7/8/2012	1:07:00 PM	H2 MFC set to  0.000000
7/8/2012	1:07:00 PM	BCl3 MFC set to  0.000000
7/8/2012	1:07:00 PM	PH3 MFC set to  0.000000
7/8/2012	1:07:00 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:07:00 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:07:00 PM	Tube furnace set to 200
7/8/2012	1:07:30 PM	H2 valve closed
7/8/2012	1:07:30 PM	BCl3 valve closed
7/8/2012	1:07:30 PM	PH3 valve closed
7/8/2012	1:07:30 PM	SiCl4 pre valve closed
7/8/2012	1:07:30 PM	SiCl4 post valve closed
7/8/2012	1:07:30 PM	Bypass valve closed
7/8/2012	1:07:30 PM	Bubbler valve closed
7/8/2012	1:07:30 PM	Helium valve opened
7/8/2012	1:07:30 PM	Main Vac valve opened
7/8/2012	1:07:30 PM	Helium MFC set to  20.000000
7/8/2012	1:07:30 PM	H2 MFC set to  0.000000
7/8/2012	1:07:30 PM	BCl3 MFC set to  0.000000
7/8/2012	1:07:30 PM	PH3 MFC set to  0.000000
7/8/2012	1:07:30 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:07:30 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:07:30 PM	Tube furnace set to 200
7/8/2012	1:08:00 PM	Helium valve closed
7/8/2012	1:08:00 PM	H2 valve closed
7/8/2012	1:08:00 PM	BCl3 valve closed
7/8/2012	1:08:00 PM	PH3 valve closed
7/8/2012	1:08:00 PM	SiCl4 pre valve closed
7/8/2012	1:08:00 PM	SiCl4 post valve closed
7/8/2012	1:08:00 PM	Bypass valve closed
7/8/2012	1:08:00 PM	Bubbler valve closed
7/8/2012	1:08:00 PM	Main Vac valve opened
7/8/2012	1:08:00 PM	Helium MFC set to  0.000000
7/8/2012	1:08:00 PM	H2 MFC set to  0.000000
7/8/2012	1:08:00 PM	BCl3 MFC set to  0.000000
7/8/2012	1:08:00 PM	PH3 MFC set to  0.000000
7/8/2012	1:08:00 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:08:00 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:08:00 PM	Tube furnace set to 200
7/8/2012	1:08:30 PM	H2 valve closed
7/8/2012	1:08:30 PM	BCl3 valve closed
7/8/2012	1:08:30 PM	PH3 valve closed
7/8/2012	1:08:30 PM	SiCl4 pre valve closed
7/8/2012	1:08:30 PM	SiCl4 post valve closed
7/8/2012	1:08:30 PM	Bypass valve closed
7/8/2012	1:08:30 PM	Bubbler valve closed
7/8/2012	1:08:30 PM	Helium valve opened
7/8/2012	1:08:30 PM	Main Vac valve opened
7/8/2012	1:08:30 PM	Helium MFC set to  20.000000
7/8/2012	1:08:30 PM	H2 MFC set to  0.000000
7/8/2012	1:08:30 PM	BCl3 MFC set to  0.000000
7/8/2012	1:08:30 PM	PH3 MFC set to  0.000000
7/8/2012	1:08:30 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:08:30 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:08:31 PM	Tube furnace set to 200
7/8/2012	1:09:01 PM	Helium valve closed
7/8/2012	1:09:01 PM	H2 valve closed
7/8/2012	1:09:01 PM	BCl3 valve closed
7/8/2012	1:09:01 PM	PH3 valve closed
7/8/2012	1:09:01 PM	SiCl4 pre valve closed
7/8/2012	1:09:01 PM	SiCl4 post valve closed
7/8/2012	1:09:01 PM	Bypass valve closed
7/8/2012	1:09:01 PM	Bubbler valve closed
7/8/2012	1:09:01 PM	Main Vac valve opened
7/8/2012	1:09:01 PM	Helium MFC set to  0.000000
7/8/2012	1:09:01 PM	H2 MFC set to  0.000000
7/8/2012	1:09:01 PM	BCl3 MFC set to  0.000000
7/8/2012	1:09:01 PM	PH3 MFC set to  0.000000
7/8/2012	1:09:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:09:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:09:01 PM	Tube furnace set to 0
7/8/2012	1:09:02 PM	Run finished at 1:09 PM
7/8/2012	1:36:08 PM	Main Vac valve closed
7/8/2012	1:36:25 PM	Main Vac valve opened
7/8/2012	1:37:20 PM	Recipe started at 1:37 PM
7/8/2012	1:37:20 PM	Helium valve closed
7/8/2012	1:37:20 PM	H2 valve closed
7/8/2012	1:37:20 PM	BCl3 valve closed
7/8/2012	1:37:20 PM	PH3 valve closed
7/8/2012	1:37:20 PM	SiCl4 pre valve closed
7/8/2012	1:37:20 PM	SiCl4 post valve closed
7/8/2012	1:37:20 PM	Main Vac valve closed
7/8/2012	1:37:20 PM	Bypass valve closed
7/8/2012	1:37:20 PM	Bubbler valve closed
7/8/2012	1:37:20 PM	Helium MFC set to  0.000000
7/8/2012	1:37:20 PM	H2 MFC set to  0.000000
7/8/2012	1:37:20 PM	BCl3 MFC set to  0.000000
7/8/2012	1:37:20 PM	PH3 MFC set to  0.000000
7/8/2012	1:37:20 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:37:20 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:37:20 PM	Tube furnace set to 0
7/8/2012	1:37:23 PM	Helium valve closed
7/8/2012	1:37:23 PM	BCl3 valve closed
7/8/2012	1:37:23 PM	PH3 valve closed
7/8/2012	1:37:23 PM	SiCl4 pre valve closed
7/8/2012	1:37:23 PM	SiCl4 post valve closed
7/8/2012	1:37:23 PM	Main Vac valve closed
7/8/2012	1:37:23 PM	Bypass valve closed
7/8/2012	1:37:23 PM	Bubbler valve closed
7/8/2012	1:37:23 PM	H2 valve opened
7/8/2012	1:37:23 PM	Helium MFC set to  0.000000
7/8/2012	1:37:23 PM	H2 MFC set to  500.000000
7/8/2012	1:37:23 PM	BCl3 MFC set to  0.000000
7/8/2012	1:37:23 PM	PH3 MFC set to  0.000000
7/8/2012	1:37:23 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:37:23 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:37:23 PM	Tube furnace set to 0
7/8/2012	1:38:36 PM	Helium valve closed
7/8/2012	1:38:36 PM	BCl3 valve closed
7/8/2012	1:38:36 PM	PH3 valve closed
7/8/2012	1:38:36 PM	SiCl4 pre valve closed
7/8/2012	1:38:36 PM	SiCl4 post valve closed
7/8/2012	1:38:36 PM	Main Vac valve closed
7/8/2012	1:38:36 PM	Bypass valve closed
7/8/2012	1:38:36 PM	H2 valve opened
7/8/2012	1:38:36 PM	Bubbler valve opened
7/8/2012	1:38:36 PM	Helium MFC set to  0.000000
7/8/2012	1:38:36 PM	H2 MFC set to  500.000000
7/8/2012	1:38:36 PM	BCl3 MFC set to  0.000000
7/8/2012	1:38:36 PM	PH3 MFC set to  0.000000
7/8/2012	1:38:36 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:38:36 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:38:36 PM	Tube furnace set to 0
7/8/2012	1:38:37 PM	Helium valve closed
7/8/2012	1:38:37 PM	BCl3 valve closed
7/8/2012	1:38:37 PM	PH3 valve closed
7/8/2012	1:38:37 PM	SiCl4 pre valve closed
7/8/2012	1:38:37 PM	SiCl4 post valve closed
7/8/2012	1:38:37 PM	Main Vac valve closed
7/8/2012	1:38:37 PM	Bypass valve closed
7/8/2012	1:38:37 PM	H2 valve opened
7/8/2012	1:38:37 PM	Bubbler valve opened
7/8/2012	1:38:37 PM	Helium MFC set to  0.000000
7/8/2012	1:38:37 PM	H2 MFC set to  500.000000
7/8/2012	1:38:37 PM	BCl3 MFC set to  0.000000
7/8/2012	1:38:37 PM	PH3 MFC set to  0.000000
7/8/2012	1:38:37 PM	SiCl4 MFC set to  0.000000
7/8/2012	1:38:37 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:38:38 PM	Tube furnace set to 1000
7/8/2012	1:58:38 PM	Helium valve closed
7/8/2012	1:58:38 PM	PH3 valve closed
7/8/2012	1:58:38 PM	Main Vac valve closed
7/8/2012	1:58:38 PM	Bypass valve closed
7/8/2012	1:58:38 PM	H2 valve opened
7/8/2012	1:58:38 PM	BCl3 valve opened
7/8/2012	1:58:38 PM	SiCl4 pre valve opened
7/8/2012	1:58:38 PM	SiCl4 post valve opened
7/8/2012	1:58:38 PM	Bubbler valve opened
7/8/2012	1:58:38 PM	Helium MFC set to  0.000000
7/8/2012	1:58:38 PM	H2 MFC set to  450.000000
7/8/2012	1:58:38 PM	BCl3 MFC set to  1.500000
7/8/2012	1:58:38 PM	PH3 MFC set to  0.000000
7/8/2012	1:58:38 PM	SiCl4 MFC set to  50.000000
7/8/2012	1:58:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	1:58:38 PM	Tube furnace set to 1000
7/8/2012	2:07:38 PM	Helium valve closed
7/8/2012	2:07:38 PM	BCl3 valve closed
7/8/2012	2:07:38 PM	PH3 valve closed
7/8/2012	2:07:38 PM	SiCl4 pre valve closed
7/8/2012	2:07:38 PM	SiCl4 post valve closed
7/8/2012	2:07:38 PM	Main Vac valve closed
7/8/2012	2:07:38 PM	Bypass valve closed
7/8/2012	2:07:38 PM	H2 valve opened
7/8/2012	2:07:38 PM	Bubbler valve opened
7/8/2012	2:07:38 PM	Helium MFC set to  0.000000
7/8/2012	2:07:38 PM	H2 MFC set to  500.000000
7/8/2012	2:07:38 PM	BCl3 MFC set to  0.000000
7/8/2012	2:07:38 PM	PH3 MFC set to  0.000000
7/8/2012	2:07:38 PM	SiCl4 MFC set to  0.000000
7/8/2012	2:07:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	2:07:38 PM	Tube furnace set to 950
7/8/2012	2:09:38 PM	Helium valve closed
7/8/2012	2:09:38 PM	BCl3 valve closed
7/8/2012	2:09:38 PM	PH3 valve closed
7/8/2012	2:09:38 PM	SiCl4 pre valve closed
7/8/2012	2:09:38 PM	SiCl4 post valve closed
7/8/2012	2:09:38 PM	Main Vac valve closed
7/8/2012	2:09:38 PM	Bypass valve closed
7/8/2012	2:09:38 PM	H2 valve opened
7/8/2012	2:09:38 PM	Bubbler valve opened
7/8/2012	2:09:38 PM	Helium MFC set to  0.000000
7/8/2012	2:09:38 PM	H2 MFC set to  500.000000
7/8/2012	2:09:38 PM	BCl3 MFC set to  0.000000
7/8/2012	2:09:38 PM	PH3 MFC set to  0.000000
7/8/2012	2:09:38 PM	SiCl4 MFC set to  0.000000
7/8/2012	2:09:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	2:09:38 PM	Tube furnace set to 900
7/8/2012	2:11:38 PM	Helium valve closed
7/8/2012	2:11:38 PM	BCl3 valve closed
7/8/2012	2:11:38 PM	PH3 valve closed
7/8/2012	2:11:38 PM	SiCl4 pre valve closed
7/8/2012	2:11:38 PM	SiCl4 post valve closed
7/8/2012	2:11:38 PM	Main Vac valve closed
7/8/2012	2:11:38 PM	Bypass valve closed
7/8/2012	2:11:38 PM	H2 valve opened
7/8/2012	2:11:38 PM	Bubbler valve opened
7/8/2012	2:11:38 PM	Helium MFC set to  0.000000
7/8/2012	2:11:38 PM	H2 MFC set to  500.000000
7/8/2012	2:11:38 PM	BCl3 MFC set to  0.000000
7/8/2012	2:11:38 PM	PH3 MFC set to  0.000000
7/8/2012	2:11:38 PM	SiCl4 MFC set to  0.000000
7/8/2012	2:11:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	2:11:38 PM	Tube furnace set to 850
7/8/2012	2:13:39 PM	H2 valve closed
7/8/2012	2:13:39 PM	BCl3 valve closed
7/8/2012	2:13:39 PM	PH3 valve closed
7/8/2012	2:13:39 PM	SiCl4 pre valve closed
7/8/2012	2:13:39 PM	SiCl4 post valve closed
7/8/2012	2:13:39 PM	Main Vac valve closed
7/8/2012	2:13:39 PM	Bypass valve closed
7/8/2012	2:13:39 PM	Helium valve opened
7/8/2012	2:13:39 PM	Bubbler valve opened
7/8/2012	2:13:39 PM	Helium MFC set to  500.000000
7/8/2012	2:13:39 PM	H2 MFC set to  0.000000
7/8/2012	2:13:39 PM	BCl3 MFC set to  0.000000
7/8/2012	2:13:39 PM	PH3 MFC set to  0.000000
7/8/2012	2:13:39 PM	SiCl4 MFC set to  0.000000
7/8/2012	2:13:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	2:13:39 PM	Tube furnace set to 800
7/8/2012	2:15:39 PM	H2 valve closed
7/8/2012	2:15:39 PM	BCl3 valve closed
7/8/2012	2:15:39 PM	PH3 valve closed
7/8/2012	2:15:39 PM	SiCl4 pre valve closed
7/8/2012	2:15:39 PM	SiCl4 post valve closed
7/8/2012	2:15:39 PM	Main Vac valve closed
7/8/2012	2:15:39 PM	Bypass valve closed
7/8/2012	2:15:39 PM	Helium valve opened
7/8/2012	2:15:39 PM	Bubbler valve opened
7/8/2012	2:15:39 PM	Helium MFC set to  500.000000
7/8/2012	2:15:39 PM	H2 MFC set to  0.000000
7/8/2012	2:15:39 PM	BCl3 MFC set to  0.000000
7/8/2012	2:15:39 PM	PH3 MFC set to  0.000000
7/8/2012	2:15:39 PM	SiCl4 MFC set to  0.000000
7/8/2012	2:15:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	2:15:39 PM	Tube furnace set to 750
7/8/2012	2:17:39 PM	H2 valve closed
7/8/2012	2:17:39 PM	BCl3 valve closed
7/8/2012	2:17:39 PM	PH3 valve closed
7/8/2012	2:17:39 PM	SiCl4 pre valve closed
7/8/2012	2:17:39 PM	SiCl4 post valve closed
7/8/2012	2:17:39 PM	Main Vac valve closed
7/8/2012	2:17:39 PM	Bypass valve closed
7/8/2012	2:17:39 PM	Helium valve opened
7/8/2012	2:17:39 PM	Bubbler valve opened
7/8/2012	2:17:39 PM	Helium MFC set to  500.000000
7/8/2012	2:17:39 PM	H2 MFC set to  0.000000
7/8/2012	2:17:39 PM	BCl3 MFC set to  0.000000
7/8/2012	2:17:39 PM	PH3 MFC set to  0.000000
7/8/2012	2:17:39 PM	SiCl4 MFC set to  0.000000
7/8/2012	2:17:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	2:17:39 PM	Tube furnace set to 0
7/8/2012	2:37:39 PM	Helium valve closed
7/8/2012	2:37:39 PM	H2 valve closed
7/8/2012	2:37:39 PM	BCl3 valve closed
7/8/2012	2:37:39 PM	PH3 valve closed
7/8/2012	2:37:39 PM	SiCl4 pre valve closed
7/8/2012	2:37:39 PM	SiCl4 post valve closed
7/8/2012	2:37:39 PM	Main Vac valve closed
7/8/2012	2:37:39 PM	Bypass valve closed
7/8/2012	2:37:39 PM	Bubbler valve closed
7/8/2012	2:37:39 PM	Helium MFC set to  0.000000
7/8/2012	2:37:39 PM	H2 MFC set to  0.000000
7/8/2012	2:37:39 PM	BCl3 MFC set to  0.000000
7/8/2012	2:37:39 PM	PH3 MFC set to  0.000000
7/8/2012	2:37:39 PM	SiCl4 MFC set to  0.000000
7/8/2012	2:37:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	2:37:39 PM	Tube furnace set to 0
7/8/2012	2:37:40 PM	Run finished at 2:37 PM
7/8/2012	3:02:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	3:02:29 PM	Recipe started at 3:02 PM
7/8/2012	3:02:29 PM	Helium valve closed
7/8/2012	3:02:29 PM	H2 valve closed
7/8/2012	3:02:29 PM	BCl3 valve closed
7/8/2012	3:02:29 PM	PH3 valve closed
7/8/2012	3:02:29 PM	SiCl4 pre valve closed
7/8/2012	3:02:29 PM	SiCl4 post valve closed
7/8/2012	3:02:29 PM	Main Vac valve closed
7/8/2012	3:02:29 PM	Bypass valve closed
7/8/2012	3:02:29 PM	Bubbler valve closed
7/8/2012	3:02:29 PM	Helium MFC set to  0.000000
7/8/2012	3:02:29 PM	H2 MFC set to  0.000000
7/8/2012	3:02:29 PM	BCl3 MFC set to  0.000000
7/8/2012	3:02:29 PM	PH3 MFC set to  0.000000
7/8/2012	3:02:29 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:02:29 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:02:29 PM	Tube furnace set to 0
7/8/2012	3:02:32 PM	H2 valve closed
7/8/2012	3:02:32 PM	BCl3 valve closed
7/8/2012	3:02:32 PM	PH3 valve closed
7/8/2012	3:02:32 PM	SiCl4 pre valve closed
7/8/2012	3:02:32 PM	SiCl4 post valve closed
7/8/2012	3:02:32 PM	Main Vac valve closed
7/8/2012	3:02:32 PM	Bypass valve closed
7/8/2012	3:02:32 PM	Bubbler valve closed
7/8/2012	3:02:32 PM	Helium valve opened
7/8/2012	3:02:32 PM	Helium MFC set to  500.000000
7/8/2012	3:02:32 PM	H2 MFC set to  0.000000
7/8/2012	3:02:32 PM	BCl3 MFC set to  0.000000
7/8/2012	3:02:32 PM	PH3 MFC set to  0.000000
7/8/2012	3:02:32 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:02:32 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:02:32 PM	Tube furnace set to 0
7/8/2012	3:02:39 PM	Helium valve closed
7/8/2012	3:02:39 PM	H2 valve closed
7/8/2012	3:02:39 PM	BCl3 valve closed
7/8/2012	3:02:39 PM	PH3 valve closed
7/8/2012	3:02:39 PM	SiCl4 pre valve closed
7/8/2012	3:02:39 PM	SiCl4 post valve closed
7/8/2012	3:02:39 PM	Main Vac valve closed
7/8/2012	3:02:39 PM	Bypass valve closed
7/8/2012	3:02:39 PM	Bubbler valve closed
7/8/2012	3:02:39 PM	Helium MFC set to  0.000000
7/8/2012	3:02:39 PM	H2 MFC set to  0.000000
7/8/2012	3:02:39 PM	BCl3 MFC set to  0.000000
7/8/2012	3:02:39 PM	PH3 MFC set to  0.000000
7/8/2012	3:02:39 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:02:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:02:39 PM	Tube furnace set to 0
7/8/2012	3:02:40 PM	Run finished at 3:02 PM
7/8/2012	3:02:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	3:05:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	3:05:00 PM	Recipe started at 3:05 PM
7/8/2012	3:05:00 PM	Helium valve closed
7/8/2012	3:05:00 PM	H2 valve closed
7/8/2012	3:05:00 PM	BCl3 valve closed
7/8/2012	3:05:00 PM	PH3 valve closed
7/8/2012	3:05:00 PM	SiCl4 pre valve closed
7/8/2012	3:05:00 PM	SiCl4 post valve closed
7/8/2012	3:05:00 PM	Main Vac valve closed
7/8/2012	3:05:00 PM	Bubbler valve closed
7/8/2012	3:05:00 PM	Bypass valve opened
7/8/2012	3:05:00 PM	Helium MFC set to  0.000000
7/8/2012	3:05:00 PM	H2 MFC set to  0.000000
7/8/2012	3:05:00 PM	BCl3 MFC set to  0.000000
7/8/2012	3:05:00 PM	PH3 MFC set to  0.000000
7/8/2012	3:05:00 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:05:00 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:05:01 PM	Tube furnace set to 0
7/8/2012	3:06:06 PM	Helium valve closed
7/8/2012	3:06:06 PM	H2 valve closed
7/8/2012	3:06:06 PM	BCl3 valve closed
7/8/2012	3:06:06 PM	PH3 valve closed
7/8/2012	3:06:06 PM	SiCl4 pre valve closed
7/8/2012	3:06:06 PM	SiCl4 post valve closed
7/8/2012	3:06:06 PM	Main Vac valve closed
7/8/2012	3:06:06 PM	Bubbler valve closed
7/8/2012	3:06:06 PM	Bypass valve opened
7/8/2012	3:06:06 PM	Helium MFC set to  0.000000
7/8/2012	3:06:06 PM	H2 MFC set to  0.000000
7/8/2012	3:06:06 PM	BCl3 MFC set to  0.000000
7/8/2012	3:06:06 PM	PH3 MFC set to  0.000000
7/8/2012	3:06:06 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:06:06 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:06:06 PM	Tube furnace set to 0
7/8/2012	3:07:06 PM	Helium valve closed
7/8/2012	3:07:06 PM	H2 valve closed
7/8/2012	3:07:06 PM	BCl3 valve closed
7/8/2012	3:07:06 PM	PH3 valve closed
7/8/2012	3:07:06 PM	SiCl4 pre valve closed
7/8/2012	3:07:06 PM	SiCl4 post valve closed
7/8/2012	3:07:06 PM	Bypass valve closed
7/8/2012	3:07:06 PM	Bubbler valve closed
7/8/2012	3:07:06 PM	Main Vac valve opened
7/8/2012	3:07:06 PM	Helium MFC set to  0.000000
7/8/2012	3:07:06 PM	H2 MFC set to  0.000000
7/8/2012	3:07:06 PM	BCl3 MFC set to  0.000000
7/8/2012	3:07:06 PM	PH3 MFC set to  0.000000
7/8/2012	3:07:06 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:07:06 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:07:06 PM	Tube furnace set to 0
7/8/2012	3:07:07 PM	Run finished at 3:07 PM
7/8/2012	3:07:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	3:31:03 PM	Recipe started at 3:30 PM
7/8/2012	3:31:03 PM	Helium valve closed
7/8/2012	3:31:03 PM	H2 valve closed
7/8/2012	3:31:03 PM	BCl3 valve closed
7/8/2012	3:31:03 PM	PH3 valve closed
7/8/2012	3:31:03 PM	SiCl4 pre valve closed
7/8/2012	3:31:03 PM	SiCl4 post valve closed
7/8/2012	3:31:03 PM	Bypass valve closed
7/8/2012	3:31:03 PM	Bubbler valve closed
7/8/2012	3:31:03 PM	Main Vac valve opened
7/8/2012	3:31:03 PM	Helium MFC set to  0.000000
7/8/2012	3:31:03 PM	H2 MFC set to  0.000000
7/8/2012	3:31:03 PM	BCl3 MFC set to  0.000000
7/8/2012	3:31:03 PM	PH3 MFC set to  0.000000
7/8/2012	3:31:03 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:31:03 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:31:03 PM	Tube furnace set to 0
7/8/2012	3:31:33 PM	H2 valve closed
7/8/2012	3:31:33 PM	BCl3 valve closed
7/8/2012	3:31:33 PM	PH3 valve closed
7/8/2012	3:31:33 PM	SiCl4 pre valve closed
7/8/2012	3:31:33 PM	SiCl4 post valve closed
7/8/2012	3:31:33 PM	Bypass valve closed
7/8/2012	3:31:33 PM	Bubbler valve closed
7/8/2012	3:31:33 PM	Helium valve opened
7/8/2012	3:31:33 PM	Main Vac valve opened
7/8/2012	3:31:33 PM	Helium MFC set to  20.000000
7/8/2012	3:31:33 PM	H2 MFC set to  0.000000
7/8/2012	3:31:33 PM	BCl3 MFC set to  0.000000
7/8/2012	3:31:33 PM	PH3 MFC set to  0.000000
7/8/2012	3:31:33 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:31:33 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:31:34 PM	Tube furnace set to 0
7/8/2012	3:32:04 PM	Helium valve closed
7/8/2012	3:32:04 PM	H2 valve closed
7/8/2012	3:32:04 PM	BCl3 valve closed
7/8/2012	3:32:04 PM	PH3 valve closed
7/8/2012	3:32:04 PM	SiCl4 pre valve closed
7/8/2012	3:32:04 PM	SiCl4 post valve closed
7/8/2012	3:32:04 PM	Bypass valve closed
7/8/2012	3:32:04 PM	Bubbler valve closed
7/8/2012	3:32:04 PM	Main Vac valve opened
7/8/2012	3:32:04 PM	Helium MFC set to  0.000000
7/8/2012	3:32:04 PM	H2 MFC set to  0.000000
7/8/2012	3:32:04 PM	BCl3 MFC set to  0.000000
7/8/2012	3:32:04 PM	PH3 MFC set to  0.000000
7/8/2012	3:32:04 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:32:04 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:32:04 PM	Tube furnace set to 0
7/8/2012	3:32:34 PM	H2 valve closed
7/8/2012	3:32:34 PM	BCl3 valve closed
7/8/2012	3:32:34 PM	PH3 valve closed
7/8/2012	3:32:34 PM	SiCl4 pre valve closed
7/8/2012	3:32:34 PM	SiCl4 post valve closed
7/8/2012	3:32:34 PM	Bypass valve closed
7/8/2012	3:32:34 PM	Bubbler valve closed
7/8/2012	3:32:34 PM	Helium valve opened
7/8/2012	3:32:34 PM	Main Vac valve opened
7/8/2012	3:32:34 PM	Helium MFC set to  20.000000
7/8/2012	3:32:34 PM	H2 MFC set to  0.000000
7/8/2012	3:32:34 PM	BCl3 MFC set to  0.000000
7/8/2012	3:32:34 PM	PH3 MFC set to  0.000000
7/8/2012	3:32:34 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:32:34 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:32:34 PM	Tube furnace set to 0
7/8/2012	3:33:04 PM	Helium valve closed
7/8/2012	3:33:04 PM	H2 valve closed
7/8/2012	3:33:04 PM	BCl3 valve closed
7/8/2012	3:33:04 PM	PH3 valve closed
7/8/2012	3:33:04 PM	SiCl4 pre valve closed
7/8/2012	3:33:04 PM	SiCl4 post valve closed
7/8/2012	3:33:04 PM	Bypass valve closed
7/8/2012	3:33:04 PM	Bubbler valve closed
7/8/2012	3:33:04 PM	Main Vac valve opened
7/8/2012	3:33:04 PM	Helium MFC set to  0.000000
7/8/2012	3:33:04 PM	H2 MFC set to  0.000000
7/8/2012	3:33:04 PM	BCl3 MFC set to  0.000000
7/8/2012	3:33:04 PM	PH3 MFC set to  0.000000
7/8/2012	3:33:04 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:33:04 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:33:04 PM	Tube furnace set to 0
7/8/2012	3:33:34 PM	H2 valve closed
7/8/2012	3:33:34 PM	BCl3 valve closed
7/8/2012	3:33:34 PM	PH3 valve closed
7/8/2012	3:33:34 PM	SiCl4 pre valve closed
7/8/2012	3:33:34 PM	SiCl4 post valve closed
7/8/2012	3:33:34 PM	Bypass valve closed
7/8/2012	3:33:34 PM	Bubbler valve closed
7/8/2012	3:33:34 PM	Helium valve opened
7/8/2012	3:33:34 PM	Main Vac valve opened
7/8/2012	3:33:34 PM	Helium MFC set to  20.000000
7/8/2012	3:33:34 PM	H2 MFC set to  0.000000
7/8/2012	3:33:34 PM	BCl3 MFC set to  0.000000
7/8/2012	3:33:34 PM	PH3 MFC set to  0.000000
7/8/2012	3:33:34 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:33:34 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:33:35 PM	Tube furnace set to 0
7/8/2012	3:34:05 PM	Helium valve closed
7/8/2012	3:34:05 PM	H2 valve closed
7/8/2012	3:34:05 PM	BCl3 valve closed
7/8/2012	3:34:05 PM	PH3 valve closed
7/8/2012	3:34:05 PM	SiCl4 pre valve closed
7/8/2012	3:34:05 PM	SiCl4 post valve closed
7/8/2012	3:34:05 PM	Bypass valve closed
7/8/2012	3:34:05 PM	Bubbler valve closed
7/8/2012	3:34:05 PM	Main Vac valve opened
7/8/2012	3:34:05 PM	Helium MFC set to  0.000000
7/8/2012	3:34:05 PM	H2 MFC set to  0.000000
7/8/2012	3:34:05 PM	BCl3 MFC set to  0.000000
7/8/2012	3:34:05 PM	PH3 MFC set to  0.000000
7/8/2012	3:34:05 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:34:05 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:34:05 PM	Tube furnace set to 0
7/8/2012	3:34:35 PM	H2 valve closed
7/8/2012	3:34:35 PM	BCl3 valve closed
7/8/2012	3:34:35 PM	PH3 valve closed
7/8/2012	3:34:35 PM	SiCl4 pre valve closed
7/8/2012	3:34:35 PM	SiCl4 post valve closed
7/8/2012	3:34:35 PM	Bypass valve closed
7/8/2012	3:34:35 PM	Bubbler valve closed
7/8/2012	3:34:35 PM	Helium valve opened
7/8/2012	3:34:35 PM	Main Vac valve opened
7/8/2012	3:34:35 PM	Helium MFC set to  20.000000
7/8/2012	3:34:35 PM	H2 MFC set to  0.000000
7/8/2012	3:34:35 PM	BCl3 MFC set to  0.000000
7/8/2012	3:34:35 PM	PH3 MFC set to  0.000000
7/8/2012	3:34:35 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:34:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:34:35 PM	Tube furnace set to 0
7/8/2012	3:35:05 PM	Helium valve closed
7/8/2012	3:35:05 PM	H2 valve closed
7/8/2012	3:35:05 PM	BCl3 valve closed
7/8/2012	3:35:05 PM	PH3 valve closed
7/8/2012	3:35:05 PM	SiCl4 pre valve closed
7/8/2012	3:35:05 PM	SiCl4 post valve closed
7/8/2012	3:35:05 PM	Bypass valve closed
7/8/2012	3:35:05 PM	Bubbler valve closed
7/8/2012	3:35:05 PM	Main Vac valve opened
7/8/2012	3:35:05 PM	Helium MFC set to  0.000000
7/8/2012	3:35:05 PM	H2 MFC set to  0.000000
7/8/2012	3:35:05 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:05 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:05 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:05 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:05 PM	Tube furnace set to 0
7/8/2012	3:35:35 PM	H2 valve closed
7/8/2012	3:35:35 PM	BCl3 valve closed
7/8/2012	3:35:35 PM	PH3 valve closed
7/8/2012	3:35:35 PM	SiCl4 pre valve closed
7/8/2012	3:35:35 PM	SiCl4 post valve closed
7/8/2012	3:35:35 PM	Bypass valve closed
7/8/2012	3:35:35 PM	Bubbler valve closed
7/8/2012	3:35:35 PM	Helium valve opened
7/8/2012	3:35:35 PM	Main Vac valve opened
7/8/2012	3:35:35 PM	Helium MFC set to  20.000000
7/8/2012	3:35:35 PM	H2 MFC set to  0.000000
7/8/2012	3:35:35 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:35 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:35 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:36 PM	Tube furnace set to 0
7/8/2012	3:35:49 PM	Helium valve closed
7/8/2012	3:35:49 PM	H2 valve closed
7/8/2012	3:35:49 PM	BCl3 valve closed
7/8/2012	3:35:49 PM	PH3 valve closed
7/8/2012	3:35:49 PM	SiCl4 pre valve closed
7/8/2012	3:35:49 PM	SiCl4 post valve closed
7/8/2012	3:35:49 PM	Bypass valve closed
7/8/2012	3:35:49 PM	Bubbler valve closed
7/8/2012	3:35:49 PM	Main Vac valve opened
7/8/2012	3:35:49 PM	Helium MFC set to  0.000000
7/8/2012	3:35:49 PM	H2 MFC set to  0.000000
7/8/2012	3:35:49 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:49 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:49 PM	Tube furnace set to 0
7/8/2012	3:35:49 PM	H2 valve closed
7/8/2012	3:35:49 PM	BCl3 valve closed
7/8/2012	3:35:49 PM	PH3 valve closed
7/8/2012	3:35:49 PM	SiCl4 pre valve closed
7/8/2012	3:35:49 PM	SiCl4 post valve closed
7/8/2012	3:35:49 PM	Bypass valve closed
7/8/2012	3:35:49 PM	Bubbler valve closed
7/8/2012	3:35:49 PM	Helium valve opened
7/8/2012	3:35:49 PM	Main Vac valve opened
7/8/2012	3:35:49 PM	Helium MFC set to  20.000000
7/8/2012	3:35:49 PM	H2 MFC set to  0.000000
7/8/2012	3:35:49 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:49 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:49 PM	Tube furnace set to 0
7/8/2012	3:35:50 PM	Helium valve closed
7/8/2012	3:35:50 PM	H2 valve closed
7/8/2012	3:35:50 PM	BCl3 valve closed
7/8/2012	3:35:50 PM	PH3 valve closed
7/8/2012	3:35:50 PM	SiCl4 pre valve closed
7/8/2012	3:35:50 PM	SiCl4 post valve closed
7/8/2012	3:35:50 PM	Bypass valve closed
7/8/2012	3:35:50 PM	Bubbler valve closed
7/8/2012	3:35:50 PM	Main Vac valve opened
7/8/2012	3:35:50 PM	Helium MFC set to  0.000000
7/8/2012	3:35:50 PM	H2 MFC set to  0.000000
7/8/2012	3:35:50 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:50 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:50 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:50 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:50 PM	Tube furnace set to 0
7/8/2012	3:35:50 PM	H2 valve closed
7/8/2012	3:35:50 PM	BCl3 valve closed
7/8/2012	3:35:50 PM	PH3 valve closed
7/8/2012	3:35:50 PM	SiCl4 pre valve closed
7/8/2012	3:35:50 PM	SiCl4 post valve closed
7/8/2012	3:35:50 PM	Bypass valve closed
7/8/2012	3:35:50 PM	Bubbler valve closed
7/8/2012	3:35:50 PM	Helium valve opened
7/8/2012	3:35:50 PM	Main Vac valve opened
7/8/2012	3:35:50 PM	Helium MFC set to  20.000000
7/8/2012	3:35:50 PM	H2 MFC set to  0.000000
7/8/2012	3:35:50 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:50 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:50 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:50 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:50 PM	Tube furnace set to 0
7/8/2012	3:35:51 PM	Helium valve closed
7/8/2012	3:35:51 PM	H2 valve closed
7/8/2012	3:35:51 PM	BCl3 valve closed
7/8/2012	3:35:51 PM	PH3 valve closed
7/8/2012	3:35:51 PM	SiCl4 pre valve closed
7/8/2012	3:35:51 PM	SiCl4 post valve closed
7/8/2012	3:35:51 PM	Bypass valve closed
7/8/2012	3:35:51 PM	Bubbler valve closed
7/8/2012	3:35:51 PM	Main Vac valve opened
7/8/2012	3:35:51 PM	Helium MFC set to  0.000000
7/8/2012	3:35:51 PM	H2 MFC set to  0.000000
7/8/2012	3:35:51 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:51 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:51 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:51 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:51 PM	Tube furnace set to 0
7/8/2012	3:35:51 PM	H2 valve closed
7/8/2012	3:35:52 PM	BCl3 valve closed
7/8/2012	3:35:52 PM	PH3 valve closed
7/8/2012	3:35:52 PM	SiCl4 pre valve closed
7/8/2012	3:35:52 PM	SiCl4 post valve closed
7/8/2012	3:35:52 PM	Bypass valve closed
7/8/2012	3:35:52 PM	Bubbler valve closed
7/8/2012	3:35:52 PM	Helium valve opened
7/8/2012	3:35:52 PM	Main Vac valve opened
7/8/2012	3:35:52 PM	Helium MFC set to  20.000000
7/8/2012	3:35:52 PM	H2 MFC set to  0.000000
7/8/2012	3:35:52 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:52 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:52 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:52 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:52 PM	Tube furnace set to 0
7/8/2012	3:35:54 PM	Helium valve closed
7/8/2012	3:35:54 PM	H2 valve closed
7/8/2012	3:35:54 PM	BCl3 valve closed
7/8/2012	3:35:54 PM	PH3 valve closed
7/8/2012	3:35:54 PM	SiCl4 pre valve closed
7/8/2012	3:35:54 PM	SiCl4 post valve closed
7/8/2012	3:35:54 PM	Bypass valve closed
7/8/2012	3:35:54 PM	Bubbler valve closed
7/8/2012	3:35:54 PM	Main Vac valve opened
7/8/2012	3:35:54 PM	Helium MFC set to  0.000000
7/8/2012	3:35:54 PM	H2 MFC set to  0.000000
7/8/2012	3:35:54 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:54 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:54 PM	Tube furnace set to 0
7/8/2012	3:35:55 PM	H2 valve closed
7/8/2012	3:35:55 PM	BCl3 valve closed
7/8/2012	3:35:55 PM	PH3 valve closed
7/8/2012	3:35:55 PM	SiCl4 pre valve closed
7/8/2012	3:35:55 PM	SiCl4 post valve closed
7/8/2012	3:35:55 PM	Bypass valve closed
7/8/2012	3:35:55 PM	Bubbler valve closed
7/8/2012	3:35:55 PM	Helium valve opened
7/8/2012	3:35:55 PM	Main Vac valve opened
7/8/2012	3:35:55 PM	Helium MFC set to  20.000000
7/8/2012	3:35:55 PM	H2 MFC set to  0.000000
7/8/2012	3:35:55 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:55 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:55 PM	Tube furnace set to 0
7/8/2012	3:35:55 PM	Helium valve closed
7/8/2012	3:35:55 PM	H2 valve closed
7/8/2012	3:35:55 PM	BCl3 valve closed
7/8/2012	3:35:55 PM	PH3 valve closed
7/8/2012	3:35:55 PM	SiCl4 pre valve closed
7/8/2012	3:35:55 PM	SiCl4 post valve closed
7/8/2012	3:35:55 PM	Bypass valve closed
7/8/2012	3:35:55 PM	Bubbler valve closed
7/8/2012	3:35:55 PM	Main Vac valve opened
7/8/2012	3:35:55 PM	Helium MFC set to  0.000000
7/8/2012	3:35:56 PM	H2 MFC set to  0.000000
7/8/2012	3:35:56 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:56 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:56 PM	Tube furnace set to 200
7/8/2012	3:35:56 PM	H2 valve closed
7/8/2012	3:35:56 PM	BCl3 valve closed
7/8/2012	3:35:56 PM	PH3 valve closed
7/8/2012	3:35:56 PM	SiCl4 pre valve closed
7/8/2012	3:35:56 PM	SiCl4 post valve closed
7/8/2012	3:35:56 PM	Bypass valve closed
7/8/2012	3:35:56 PM	Bubbler valve closed
7/8/2012	3:35:56 PM	Helium valve opened
7/8/2012	3:35:56 PM	Main Vac valve opened
7/8/2012	3:35:56 PM	Helium MFC set to  20.000000
7/8/2012	3:35:56 PM	H2 MFC set to  0.000000
7/8/2012	3:35:56 PM	BCl3 MFC set to  0.000000
7/8/2012	3:35:56 PM	PH3 MFC set to  0.000000
7/8/2012	3:35:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:35:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:35:56 PM	Tube furnace set to 200
7/8/2012	3:36:26 PM	Helium valve closed
7/8/2012	3:36:26 PM	H2 valve closed
7/8/2012	3:36:26 PM	BCl3 valve closed
7/8/2012	3:36:26 PM	PH3 valve closed
7/8/2012	3:36:26 PM	SiCl4 pre valve closed
7/8/2012	3:36:26 PM	SiCl4 post valve closed
7/8/2012	3:36:26 PM	Bypass valve closed
7/8/2012	3:36:26 PM	Bubbler valve closed
7/8/2012	3:36:26 PM	Main Vac valve opened
7/8/2012	3:36:26 PM	Helium MFC set to  0.000000
7/8/2012	3:36:26 PM	H2 MFC set to  0.000000
7/8/2012	3:36:26 PM	BCl3 MFC set to  0.000000
7/8/2012	3:36:26 PM	PH3 MFC set to  0.000000
7/8/2012	3:36:26 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:36:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:36:26 PM	Tube furnace set to 200
7/8/2012	3:36:56 PM	H2 valve closed
7/8/2012	3:36:56 PM	BCl3 valve closed
7/8/2012	3:36:56 PM	PH3 valve closed
7/8/2012	3:36:56 PM	SiCl4 pre valve closed
7/8/2012	3:36:56 PM	SiCl4 post valve closed
7/8/2012	3:36:56 PM	Bypass valve closed
7/8/2012	3:36:56 PM	Bubbler valve closed
7/8/2012	3:36:56 PM	Helium valve opened
7/8/2012	3:36:56 PM	Main Vac valve opened
7/8/2012	3:36:56 PM	Helium MFC set to  20.000000
7/8/2012	3:36:56 PM	H2 MFC set to  0.000000
7/8/2012	3:36:56 PM	BCl3 MFC set to  0.000000
7/8/2012	3:36:56 PM	PH3 MFC set to  0.000000
7/8/2012	3:36:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:36:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:36:57 PM	Tube furnace set to 200
7/8/2012	3:37:27 PM	Helium valve closed
7/8/2012	3:37:27 PM	H2 valve closed
7/8/2012	3:37:27 PM	BCl3 valve closed
7/8/2012	3:37:27 PM	PH3 valve closed
7/8/2012	3:37:27 PM	SiCl4 pre valve closed
7/8/2012	3:37:27 PM	SiCl4 post valve closed
7/8/2012	3:37:27 PM	Bypass valve closed
7/8/2012	3:37:27 PM	Bubbler valve closed
7/8/2012	3:37:27 PM	Main Vac valve opened
7/8/2012	3:37:27 PM	Helium MFC set to  0.000000
7/8/2012	3:37:27 PM	H2 MFC set to  0.000000
7/8/2012	3:37:27 PM	BCl3 MFC set to  0.000000
7/8/2012	3:37:27 PM	PH3 MFC set to  0.000000
7/8/2012	3:37:27 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:37:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:37:27 PM	Tube furnace set to 200
7/8/2012	3:37:57 PM	H2 valve closed
7/8/2012	3:37:57 PM	BCl3 valve closed
7/8/2012	3:37:57 PM	PH3 valve closed
7/8/2012	3:37:57 PM	SiCl4 pre valve closed
7/8/2012	3:37:57 PM	SiCl4 post valve closed
7/8/2012	3:37:57 PM	Bypass valve closed
7/8/2012	3:37:57 PM	Bubbler valve closed
7/8/2012	3:37:57 PM	Helium valve opened
7/8/2012	3:37:57 PM	Main Vac valve opened
7/8/2012	3:37:57 PM	Helium MFC set to  20.000000
7/8/2012	3:37:57 PM	H2 MFC set to  0.000000
7/8/2012	3:37:57 PM	BCl3 MFC set to  0.000000
7/8/2012	3:37:57 PM	PH3 MFC set to  0.000000
7/8/2012	3:37:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:37:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:37:57 PM	Tube furnace set to 200
7/8/2012	3:38:27 PM	Helium valve closed
7/8/2012	3:38:27 PM	H2 valve closed
7/8/2012	3:38:27 PM	BCl3 valve closed
7/8/2012	3:38:27 PM	PH3 valve closed
7/8/2012	3:38:27 PM	SiCl4 pre valve closed
7/8/2012	3:38:27 PM	SiCl4 post valve closed
7/8/2012	3:38:27 PM	Bypass valve closed
7/8/2012	3:38:27 PM	Bubbler valve closed
7/8/2012	3:38:27 PM	Main Vac valve opened
7/8/2012	3:38:27 PM	Helium MFC set to  0.000000
7/8/2012	3:38:27 PM	H2 MFC set to  0.000000
7/8/2012	3:38:27 PM	BCl3 MFC set to  0.000000
7/8/2012	3:38:27 PM	PH3 MFC set to  0.000000
7/8/2012	3:38:27 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:38:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:38:27 PM	Tube furnace set to 200
7/8/2012	3:38:57 PM	H2 valve closed
7/8/2012	3:38:57 PM	BCl3 valve closed
7/8/2012	3:38:57 PM	PH3 valve closed
7/8/2012	3:38:57 PM	SiCl4 pre valve closed
7/8/2012	3:38:57 PM	SiCl4 post valve closed
7/8/2012	3:38:57 PM	Bypass valve closed
7/8/2012	3:38:57 PM	Bubbler valve closed
7/8/2012	3:38:57 PM	Helium valve opened
7/8/2012	3:38:57 PM	Main Vac valve opened
7/8/2012	3:38:57 PM	Helium MFC set to  20.000000
7/8/2012	3:38:57 PM	H2 MFC set to  0.000000
7/8/2012	3:38:57 PM	BCl3 MFC set to  0.000000
7/8/2012	3:38:57 PM	PH3 MFC set to  0.000000
7/8/2012	3:38:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:38:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:38:58 PM	Tube furnace set to 200
7/8/2012	3:39:28 PM	Helium valve closed
7/8/2012	3:39:28 PM	H2 valve closed
7/8/2012	3:39:28 PM	BCl3 valve closed
7/8/2012	3:39:28 PM	PH3 valve closed
7/8/2012	3:39:28 PM	SiCl4 pre valve closed
7/8/2012	3:39:28 PM	SiCl4 post valve closed
7/8/2012	3:39:28 PM	Bypass valve closed
7/8/2012	3:39:28 PM	Bubbler valve closed
7/8/2012	3:39:28 PM	Main Vac valve opened
7/8/2012	3:39:28 PM	Helium MFC set to  0.000000
7/8/2012	3:39:28 PM	H2 MFC set to  0.000000
7/8/2012	3:39:28 PM	BCl3 MFC set to  0.000000
7/8/2012	3:39:28 PM	PH3 MFC set to  0.000000
7/8/2012	3:39:28 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:39:28 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:39:28 PM	Tube furnace set to 200
7/8/2012	3:39:58 PM	H2 valve closed
7/8/2012	3:39:58 PM	BCl3 valve closed
7/8/2012	3:39:58 PM	PH3 valve closed
7/8/2012	3:39:58 PM	SiCl4 pre valve closed
7/8/2012	3:39:58 PM	SiCl4 post valve closed
7/8/2012	3:39:58 PM	Bypass valve closed
7/8/2012	3:39:58 PM	Bubbler valve closed
7/8/2012	3:39:58 PM	Helium valve opened
7/8/2012	3:39:58 PM	Main Vac valve opened
7/8/2012	3:39:58 PM	Helium MFC set to  20.000000
7/8/2012	3:39:58 PM	H2 MFC set to  0.000000
7/8/2012	3:39:58 PM	BCl3 MFC set to  0.000000
7/8/2012	3:39:58 PM	PH3 MFC set to  0.000000
7/8/2012	3:39:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:39:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:39:58 PM	Tube furnace set to 200
7/8/2012	3:40:28 PM	Helium valve closed
7/8/2012	3:40:28 PM	H2 valve closed
7/8/2012	3:40:28 PM	BCl3 valve closed
7/8/2012	3:40:28 PM	PH3 valve closed
7/8/2012	3:40:28 PM	SiCl4 pre valve closed
7/8/2012	3:40:28 PM	SiCl4 post valve closed
7/8/2012	3:40:28 PM	Bypass valve closed
7/8/2012	3:40:28 PM	Bubbler valve closed
7/8/2012	3:40:28 PM	Main Vac valve opened
7/8/2012	3:40:28 PM	Helium MFC set to  0.000000
7/8/2012	3:40:28 PM	H2 MFC set to  0.000000
7/8/2012	3:40:28 PM	BCl3 MFC set to  0.000000
7/8/2012	3:40:28 PM	PH3 MFC set to  0.000000
7/8/2012	3:40:28 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:40:28 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:40:28 PM	Tube furnace set to 200
7/8/2012	3:40:58 PM	H2 valve closed
7/8/2012	3:40:58 PM	BCl3 valve closed
7/8/2012	3:40:58 PM	PH3 valve closed
7/8/2012	3:40:58 PM	SiCl4 pre valve closed
7/8/2012	3:40:58 PM	SiCl4 post valve closed
7/8/2012	3:40:58 PM	Bypass valve closed
7/8/2012	3:40:58 PM	Bubbler valve closed
7/8/2012	3:40:58 PM	Helium valve opened
7/8/2012	3:40:58 PM	Main Vac valve opened
7/8/2012	3:40:58 PM	Helium MFC set to  20.000000
7/8/2012	3:40:58 PM	H2 MFC set to  0.000000
7/8/2012	3:40:58 PM	BCl3 MFC set to  0.000000
7/8/2012	3:40:58 PM	PH3 MFC set to  0.000000
7/8/2012	3:40:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:40:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:40:59 PM	Tube furnace set to 200
7/8/2012	3:41:29 PM	Helium valve closed
7/8/2012	3:41:29 PM	H2 valve closed
7/8/2012	3:41:29 PM	BCl3 valve closed
7/8/2012	3:41:29 PM	PH3 valve closed
7/8/2012	3:41:29 PM	SiCl4 pre valve closed
7/8/2012	3:41:29 PM	SiCl4 post valve closed
7/8/2012	3:41:29 PM	Bypass valve closed
7/8/2012	3:41:29 PM	Bubbler valve closed
7/8/2012	3:41:29 PM	Main Vac valve opened
7/8/2012	3:41:29 PM	Helium MFC set to  0.000000
7/8/2012	3:41:29 PM	H2 MFC set to  0.000000
7/8/2012	3:41:29 PM	BCl3 MFC set to  0.000000
7/8/2012	3:41:29 PM	PH3 MFC set to  0.000000
7/8/2012	3:41:29 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:41:29 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:41:29 PM	Tube furnace set to 0
7/8/2012	3:41:30 PM	Run finished at 3:41 PM
7/8/2012	3:53:40 PM	Main Vac valve closed
7/8/2012	3:53:57 PM	Main Vac valve opened
7/8/2012	3:54:35 PM	Recipe started at 3:54 PM
7/8/2012	3:54:35 PM	Helium valve closed
7/8/2012	3:54:35 PM	H2 valve closed
7/8/2012	3:54:35 PM	BCl3 valve closed
7/8/2012	3:54:35 PM	PH3 valve closed
7/8/2012	3:54:35 PM	SiCl4 pre valve closed
7/8/2012	3:54:35 PM	SiCl4 post valve closed
7/8/2012	3:54:35 PM	Main Vac valve closed
7/8/2012	3:54:35 PM	Bypass valve closed
7/8/2012	3:54:35 PM	Bubbler valve closed
7/8/2012	3:54:35 PM	Helium MFC set to  0.000000
7/8/2012	3:54:35 PM	H2 MFC set to  0.000000
7/8/2012	3:54:35 PM	BCl3 MFC set to  0.000000
7/8/2012	3:54:35 PM	PH3 MFC set to  0.000000
7/8/2012	3:54:35 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:54:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:54:35 PM	Tube furnace set to 0
7/8/2012	3:54:38 PM	Helium valve closed
7/8/2012	3:54:38 PM	BCl3 valve closed
7/8/2012	3:54:38 PM	PH3 valve closed
7/8/2012	3:54:38 PM	SiCl4 pre valve closed
7/8/2012	3:54:38 PM	SiCl4 post valve closed
7/8/2012	3:54:38 PM	Main Vac valve closed
7/8/2012	3:54:38 PM	Bypass valve closed
7/8/2012	3:54:38 PM	Bubbler valve closed
7/8/2012	3:54:38 PM	H2 valve opened
7/8/2012	3:54:38 PM	Helium MFC set to  0.000000
7/8/2012	3:54:38 PM	H2 MFC set to  500.000000
7/8/2012	3:54:38 PM	BCl3 MFC set to  0.000000
7/8/2012	3:54:38 PM	PH3 MFC set to  0.000000
7/8/2012	3:54:38 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:54:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:54:39 PM	Tube furnace set to 0
7/8/2012	3:55:51 PM	Helium valve closed
7/8/2012	3:55:51 PM	BCl3 valve closed
7/8/2012	3:55:51 PM	PH3 valve closed
7/8/2012	3:55:51 PM	SiCl4 pre valve closed
7/8/2012	3:55:51 PM	SiCl4 post valve closed
7/8/2012	3:55:51 PM	Main Vac valve closed
7/8/2012	3:55:51 PM	Bypass valve closed
7/8/2012	3:55:51 PM	H2 valve opened
7/8/2012	3:55:51 PM	Bubbler valve opened
7/8/2012	3:55:51 PM	Helium MFC set to  0.000000
7/8/2012	3:55:51 PM	H2 MFC set to  500.000000
7/8/2012	3:55:51 PM	BCl3 MFC set to  0.000000
7/8/2012	3:55:51 PM	PH3 MFC set to  0.000000
7/8/2012	3:55:51 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:55:51 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:55:51 PM	Tube furnace set to 0
7/8/2012	3:55:52 PM	Helium valve closed
7/8/2012	3:55:52 PM	BCl3 valve closed
7/8/2012	3:55:52 PM	PH3 valve closed
7/8/2012	3:55:52 PM	SiCl4 pre valve closed
7/8/2012	3:55:52 PM	SiCl4 post valve closed
7/8/2012	3:55:52 PM	Main Vac valve closed
7/8/2012	3:55:52 PM	Bypass valve closed
7/8/2012	3:55:52 PM	H2 valve opened
7/8/2012	3:55:52 PM	Bubbler valve opened
7/8/2012	3:55:52 PM	Helium MFC set to  0.000000
7/8/2012	3:55:52 PM	H2 MFC set to  500.000000
7/8/2012	3:55:52 PM	BCl3 MFC set to  0.000000
7/8/2012	3:55:52 PM	PH3 MFC set to  0.000000
7/8/2012	3:55:52 PM	SiCl4 MFC set to  0.000000
7/8/2012	3:55:52 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	3:55:52 PM	Tube furnace set to 1000
7/8/2012	4:15:52 PM	Helium valve closed
7/8/2012	4:15:52 PM	PH3 valve closed
7/8/2012	4:15:52 PM	Main Vac valve closed
7/8/2012	4:15:52 PM	Bypass valve closed
7/8/2012	4:15:52 PM	H2 valve opened
7/8/2012	4:15:52 PM	BCl3 valve opened
7/8/2012	4:15:52 PM	SiCl4 pre valve opened
7/8/2012	4:15:52 PM	SiCl4 post valve opened
7/8/2012	4:15:53 PM	Bubbler valve opened
7/8/2012	4:15:53 PM	Helium MFC set to  0.000000
7/8/2012	4:15:53 PM	H2 MFC set to  450.000000
7/8/2012	4:15:53 PM	BCl3 MFC set to  1.500000
7/8/2012	4:15:53 PM	PH3 MFC set to  0.000000
7/8/2012	4:15:53 PM	SiCl4 MFC set to  50.000000
7/8/2012	4:15:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:15:53 PM	Tube furnace set to 1000
7/8/2012	4:23:53 PM	Helium valve closed
7/8/2012	4:23:53 PM	BCl3 valve closed
7/8/2012	4:23:53 PM	PH3 valve closed
7/8/2012	4:23:53 PM	SiCl4 pre valve closed
7/8/2012	4:23:53 PM	SiCl4 post valve closed
7/8/2012	4:23:53 PM	Main Vac valve closed
7/8/2012	4:23:53 PM	Bypass valve closed
7/8/2012	4:23:53 PM	H2 valve opened
7/8/2012	4:23:53 PM	Bubbler valve opened
7/8/2012	4:23:53 PM	Helium MFC set to  0.000000
7/8/2012	4:23:53 PM	H2 MFC set to  500.000000
7/8/2012	4:23:53 PM	BCl3 MFC set to  0.000000
7/8/2012	4:23:53 PM	PH3 MFC set to  0.000000
7/8/2012	4:23:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	4:23:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:23:53 PM	Tube furnace set to 950
7/8/2012	4:25:53 PM	Helium valve closed
7/8/2012	4:25:53 PM	BCl3 valve closed
7/8/2012	4:25:53 PM	PH3 valve closed
7/8/2012	4:25:53 PM	SiCl4 pre valve closed
7/8/2012	4:25:53 PM	SiCl4 post valve closed
7/8/2012	4:25:53 PM	Main Vac valve closed
7/8/2012	4:25:53 PM	Bypass valve closed
7/8/2012	4:25:53 PM	H2 valve opened
7/8/2012	4:25:53 PM	Bubbler valve opened
7/8/2012	4:25:53 PM	Helium MFC set to  0.000000
7/8/2012	4:25:53 PM	H2 MFC set to  500.000000
7/8/2012	4:25:53 PM	BCl3 MFC set to  0.000000
7/8/2012	4:25:53 PM	PH3 MFC set to  0.000000
7/8/2012	4:25:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	4:25:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:25:53 PM	Tube furnace set to 900
7/8/2012	4:27:53 PM	Helium valve closed
7/8/2012	4:27:53 PM	BCl3 valve closed
7/8/2012	4:27:53 PM	PH3 valve closed
7/8/2012	4:27:53 PM	SiCl4 pre valve closed
7/8/2012	4:27:53 PM	SiCl4 post valve closed
7/8/2012	4:27:53 PM	Main Vac valve closed
7/8/2012	4:27:53 PM	Bypass valve closed
7/8/2012	4:27:53 PM	H2 valve opened
7/8/2012	4:27:53 PM	Bubbler valve opened
7/8/2012	4:27:53 PM	Helium MFC set to  0.000000
7/8/2012	4:27:53 PM	H2 MFC set to  500.000000
7/8/2012	4:27:53 PM	BCl3 MFC set to  0.000000
7/8/2012	4:27:53 PM	PH3 MFC set to  0.000000
7/8/2012	4:27:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	4:27:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:27:53 PM	Tube furnace set to 850
7/8/2012	4:29:53 PM	H2 valve closed
7/8/2012	4:29:53 PM	BCl3 valve closed
7/8/2012	4:29:53 PM	PH3 valve closed
7/8/2012	4:29:53 PM	SiCl4 pre valve closed
7/8/2012	4:29:53 PM	SiCl4 post valve closed
7/8/2012	4:29:53 PM	Main Vac valve closed
7/8/2012	4:29:53 PM	Bypass valve closed
7/8/2012	4:29:53 PM	Helium valve opened
7/8/2012	4:29:53 PM	Bubbler valve opened
7/8/2012	4:29:53 PM	Helium MFC set to  500.000000
7/8/2012	4:29:53 PM	H2 MFC set to  0.000000
7/8/2012	4:29:53 PM	BCl3 MFC set to  0.000000
7/8/2012	4:29:53 PM	PH3 MFC set to  0.000000
7/8/2012	4:29:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	4:29:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:29:54 PM	Tube furnace set to 800
7/8/2012	4:31:54 PM	H2 valve closed
7/8/2012	4:31:54 PM	BCl3 valve closed
7/8/2012	4:31:54 PM	PH3 valve closed
7/8/2012	4:31:54 PM	SiCl4 pre valve closed
7/8/2012	4:31:54 PM	SiCl4 post valve closed
7/8/2012	4:31:54 PM	Main Vac valve closed
7/8/2012	4:31:54 PM	Bypass valve closed
7/8/2012	4:31:54 PM	Helium valve opened
7/8/2012	4:31:54 PM	Bubbler valve opened
7/8/2012	4:31:54 PM	Helium MFC set to  500.000000
7/8/2012	4:31:54 PM	H2 MFC set to  0.000000
7/8/2012	4:31:54 PM	BCl3 MFC set to  0.000000
7/8/2012	4:31:54 PM	PH3 MFC set to  0.000000
7/8/2012	4:31:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	4:31:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:31:54 PM	Tube furnace set to 750
7/8/2012	4:33:54 PM	H2 valve closed
7/8/2012	4:33:54 PM	BCl3 valve closed
7/8/2012	4:33:54 PM	PH3 valve closed
7/8/2012	4:33:54 PM	SiCl4 pre valve closed
7/8/2012	4:33:54 PM	SiCl4 post valve closed
7/8/2012	4:33:54 PM	Main Vac valve closed
7/8/2012	4:33:54 PM	Bypass valve closed
7/8/2012	4:33:54 PM	Helium valve opened
7/8/2012	4:33:54 PM	Bubbler valve opened
7/8/2012	4:33:54 PM	Helium MFC set to  500.000000
7/8/2012	4:33:54 PM	H2 MFC set to  0.000000
7/8/2012	4:33:54 PM	BCl3 MFC set to  0.000000
7/8/2012	4:33:54 PM	PH3 MFC set to  0.000000
7/8/2012	4:33:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	4:33:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:33:54 PM	Tube furnace set to 0
7/8/2012	4:53:54 PM	Helium valve closed
7/8/2012	4:53:54 PM	H2 valve closed
7/8/2012	4:53:54 PM	BCl3 valve closed
7/8/2012	4:53:54 PM	PH3 valve closed
7/8/2012	4:53:54 PM	SiCl4 pre valve closed
7/8/2012	4:53:54 PM	SiCl4 post valve closed
7/8/2012	4:53:54 PM	Main Vac valve closed
7/8/2012	4:53:54 PM	Bypass valve closed
7/8/2012	4:53:54 PM	Bubbler valve closed
7/8/2012	4:53:54 PM	Helium MFC set to  0.000000
7/8/2012	4:53:54 PM	H2 MFC set to  0.000000
7/8/2012	4:53:54 PM	BCl3 MFC set to  0.000000
7/8/2012	4:53:54 PM	PH3 MFC set to  0.000000
7/8/2012	4:53:54 PM	SiCl4 MFC set to  0.000000
7/8/2012	4:53:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	4:53:54 PM	Tube furnace set to 0
7/8/2012	4:53:55 PM	Run finished at 4:53 PM
7/8/2012	5:21:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	5:21:58 PM	Recipe started at 5:21 PM
7/8/2012	5:21:58 PM	Helium valve closed
7/8/2012	5:21:58 PM	H2 valve closed
7/8/2012	5:21:58 PM	BCl3 valve closed
7/8/2012	5:21:58 PM	PH3 valve closed
7/8/2012	5:21:58 PM	SiCl4 pre valve closed
7/8/2012	5:21:58 PM	SiCl4 post valve closed
7/8/2012	5:21:58 PM	Main Vac valve closed
7/8/2012	5:21:58 PM	Bypass valve closed
7/8/2012	5:21:58 PM	Bubbler valve closed
7/8/2012	5:21:58 PM	Helium MFC set to  0.000000
7/8/2012	5:21:58 PM	H2 MFC set to  0.000000
7/8/2012	5:21:58 PM	BCl3 MFC set to  0.000000
7/8/2012	5:21:58 PM	PH3 MFC set to  0.000000
7/8/2012	5:21:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:21:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:21:58 PM	Tube furnace set to 0
7/8/2012	5:22:01 PM	H2 valve closed
7/8/2012	5:22:01 PM	BCl3 valve closed
7/8/2012	5:22:01 PM	PH3 valve closed
7/8/2012	5:22:01 PM	SiCl4 pre valve closed
7/8/2012	5:22:01 PM	SiCl4 post valve closed
7/8/2012	5:22:01 PM	Main Vac valve closed
7/8/2012	5:22:01 PM	Bypass valve closed
7/8/2012	5:22:01 PM	Bubbler valve closed
7/8/2012	5:22:01 PM	Helium valve opened
7/8/2012	5:22:01 PM	Helium MFC set to  500.000000
7/8/2012	5:22:01 PM	H2 MFC set to  0.000000
7/8/2012	5:22:01 PM	BCl3 MFC set to  0.000000
7/8/2012	5:22:01 PM	PH3 MFC set to  0.000000
7/8/2012	5:22:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:22:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:22:01 PM	Tube furnace set to 0
7/8/2012	5:22:07 PM	Helium valve closed
7/8/2012	5:22:07 PM	H2 valve closed
7/8/2012	5:22:07 PM	BCl3 valve closed
7/8/2012	5:22:07 PM	PH3 valve closed
7/8/2012	5:22:07 PM	SiCl4 pre valve closed
7/8/2012	5:22:07 PM	SiCl4 post valve closed
7/8/2012	5:22:07 PM	Main Vac valve closed
7/8/2012	5:22:07 PM	Bypass valve closed
7/8/2012	5:22:07 PM	Bubbler valve closed
7/8/2012	5:22:07 PM	Helium MFC set to  0.000000
7/8/2012	5:22:07 PM	H2 MFC set to  0.000000
7/8/2012	5:22:07 PM	BCl3 MFC set to  0.000000
7/8/2012	5:22:07 PM	PH3 MFC set to  0.000000
7/8/2012	5:22:07 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:22:07 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:22:07 PM	Tube furnace set to 0
7/8/2012	5:22:08 PM	Run finished at 5:22 PM
7/8/2012	5:22:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	5:24:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	5:24:55 PM	Recipe started at 5:24 PM
7/8/2012	5:24:55 PM	Helium valve closed
7/8/2012	5:24:55 PM	H2 valve closed
7/8/2012	5:24:55 PM	BCl3 valve closed
7/8/2012	5:24:55 PM	PH3 valve closed
7/8/2012	5:24:55 PM	SiCl4 pre valve closed
7/8/2012	5:24:55 PM	SiCl4 post valve closed
7/8/2012	5:24:55 PM	Main Vac valve closed
7/8/2012	5:24:55 PM	Bubbler valve closed
7/8/2012	5:24:55 PM	Bypass valve opened
7/8/2012	5:24:55 PM	Helium MFC set to  0.000000
7/8/2012	5:24:55 PM	H2 MFC set to  0.000000
7/8/2012	5:24:55 PM	BCl3 MFC set to  0.000000
7/8/2012	5:24:55 PM	PH3 MFC set to  0.000000
7/8/2012	5:24:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:24:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:24:55 PM	Tube furnace set to 0
7/8/2012	5:26:01 PM	Helium valve closed
7/8/2012	5:26:01 PM	H2 valve closed
7/8/2012	5:26:01 PM	BCl3 valve closed
7/8/2012	5:26:01 PM	PH3 valve closed
7/8/2012	5:26:01 PM	SiCl4 pre valve closed
7/8/2012	5:26:01 PM	SiCl4 post valve closed
7/8/2012	5:26:01 PM	Main Vac valve closed
7/8/2012	5:26:01 PM	Bubbler valve closed
7/8/2012	5:26:01 PM	Bypass valve opened
7/8/2012	5:26:01 PM	Helium MFC set to  0.000000
7/8/2012	5:26:01 PM	H2 MFC set to  0.000000
7/8/2012	5:26:01 PM	BCl3 MFC set to  0.000000
7/8/2012	5:26:01 PM	PH3 MFC set to  0.000000
7/8/2012	5:26:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:26:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:26:01 PM	Tube furnace set to 0
7/8/2012	5:27:01 PM	Helium valve closed
7/8/2012	5:27:01 PM	H2 valve closed
7/8/2012	5:27:01 PM	BCl3 valve closed
7/8/2012	5:27:01 PM	PH3 valve closed
7/8/2012	5:27:01 PM	SiCl4 pre valve closed
7/8/2012	5:27:01 PM	SiCl4 post valve closed
7/8/2012	5:27:01 PM	Bypass valve closed
7/8/2012	5:27:01 PM	Bubbler valve closed
7/8/2012	5:27:01 PM	Main Vac valve opened
7/8/2012	5:27:01 PM	Helium MFC set to  0.000000
7/8/2012	5:27:01 PM	H2 MFC set to  0.000000
7/8/2012	5:27:01 PM	BCl3 MFC set to  0.000000
7/8/2012	5:27:01 PM	PH3 MFC set to  0.000000
7/8/2012	5:27:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:27:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:27:01 PM	Tube furnace set to 0
7/8/2012	5:27:02 PM	Run finished at 5:27 PM
7/8/2012	5:27:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	5:28:37 PM	Recipe started at 5:28 PM
7/8/2012	5:28:37 PM	Helium valve closed
7/8/2012	5:28:37 PM	H2 valve closed
7/8/2012	5:28:37 PM	BCl3 valve closed
7/8/2012	5:28:37 PM	PH3 valve closed
7/8/2012	5:28:37 PM	SiCl4 pre valve closed
7/8/2012	5:28:37 PM	SiCl4 post valve closed
7/8/2012	5:28:37 PM	Bypass valve closed
7/8/2012	5:28:37 PM	Bubbler valve closed
7/8/2012	5:28:37 PM	Main Vac valve opened
7/8/2012	5:28:37 PM	Helium MFC set to  0.000000
7/8/2012	5:28:37 PM	H2 MFC set to  0.000000
7/8/2012	5:28:37 PM	BCl3 MFC set to  0.000000
7/8/2012	5:28:37 PM	PH3 MFC set to  0.000000
7/8/2012	5:28:37 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:28:37 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:28:38 PM	Tube furnace set to 0
7/8/2012	5:29:08 PM	H2 valve closed
7/8/2012	5:29:08 PM	BCl3 valve closed
7/8/2012	5:29:08 PM	PH3 valve closed
7/8/2012	5:29:08 PM	SiCl4 pre valve closed
7/8/2012	5:29:08 PM	SiCl4 post valve closed
7/8/2012	5:29:08 PM	Bypass valve closed
7/8/2012	5:29:08 PM	Bubbler valve closed
7/8/2012	5:29:08 PM	Helium valve opened
7/8/2012	5:29:08 PM	Main Vac valve opened
7/8/2012	5:29:08 PM	Helium MFC set to  20.000000
7/8/2012	5:29:08 PM	H2 MFC set to  0.000000
7/8/2012	5:29:08 PM	BCl3 MFC set to  0.000000
7/8/2012	5:29:08 PM	PH3 MFC set to  0.000000
7/8/2012	5:29:08 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:29:08 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:29:08 PM	Tube furnace set to 0
7/8/2012	5:29:38 PM	Helium valve closed
7/8/2012	5:29:38 PM	H2 valve closed
7/8/2012	5:29:38 PM	BCl3 valve closed
7/8/2012	5:29:38 PM	PH3 valve closed
7/8/2012	5:29:38 PM	SiCl4 pre valve closed
7/8/2012	5:29:38 PM	SiCl4 post valve closed
7/8/2012	5:29:38 PM	Bypass valve closed
7/8/2012	5:29:38 PM	Bubbler valve closed
7/8/2012	5:29:38 PM	Main Vac valve opened
7/8/2012	5:29:38 PM	Helium MFC set to  0.000000
7/8/2012	5:29:38 PM	H2 MFC set to  0.000000
7/8/2012	5:29:38 PM	BCl3 MFC set to  0.000000
7/8/2012	5:29:38 PM	PH3 MFC set to  0.000000
7/8/2012	5:29:38 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:29:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:29:38 PM	Tube furnace set to 0
7/8/2012	5:30:08 PM	H2 valve closed
7/8/2012	5:30:08 PM	BCl3 valve closed
7/8/2012	5:30:08 PM	PH3 valve closed
7/8/2012	5:30:08 PM	SiCl4 pre valve closed
7/8/2012	5:30:08 PM	SiCl4 post valve closed
7/8/2012	5:30:08 PM	Bypass valve closed
7/8/2012	5:30:08 PM	Bubbler valve closed
7/8/2012	5:30:08 PM	Helium valve opened
7/8/2012	5:30:08 PM	Main Vac valve opened
7/8/2012	5:30:08 PM	Helium MFC set to  20.000000
7/8/2012	5:30:08 PM	H2 MFC set to  0.000000
7/8/2012	5:30:08 PM	BCl3 MFC set to  0.000000
7/8/2012	5:30:08 PM	PH3 MFC set to  0.000000
7/8/2012	5:30:08 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:30:08 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:30:08 PM	Tube furnace set to 0
7/8/2012	5:30:38 PM	Helium valve closed
7/8/2012	5:30:38 PM	H2 valve closed
7/8/2012	5:30:38 PM	BCl3 valve closed
7/8/2012	5:30:38 PM	PH3 valve closed
7/8/2012	5:30:38 PM	SiCl4 pre valve closed
7/8/2012	5:30:38 PM	SiCl4 post valve closed
7/8/2012	5:30:38 PM	Bypass valve closed
7/8/2012	5:30:38 PM	Bubbler valve closed
7/8/2012	5:30:38 PM	Main Vac valve opened
7/8/2012	5:30:38 PM	Helium MFC set to  0.000000
7/8/2012	5:30:38 PM	H2 MFC set to  0.000000
7/8/2012	5:30:38 PM	BCl3 MFC set to  0.000000
7/8/2012	5:30:38 PM	PH3 MFC set to  0.000000
7/8/2012	5:30:38 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:30:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:30:38 PM	Tube furnace set to 0
7/8/2012	5:31:09 PM	H2 valve closed
7/8/2012	5:31:09 PM	BCl3 valve closed
7/8/2012	5:31:09 PM	PH3 valve closed
7/8/2012	5:31:09 PM	SiCl4 pre valve closed
7/8/2012	5:31:09 PM	SiCl4 post valve closed
7/8/2012	5:31:09 PM	Bypass valve closed
7/8/2012	5:31:09 PM	Bubbler valve closed
7/8/2012	5:31:09 PM	Helium valve opened
7/8/2012	5:31:09 PM	Main Vac valve opened
7/8/2012	5:31:09 PM	Helium MFC set to  20.000000
7/8/2012	5:31:09 PM	H2 MFC set to  0.000000
7/8/2012	5:31:09 PM	BCl3 MFC set to  0.000000
7/8/2012	5:31:09 PM	PH3 MFC set to  0.000000
7/8/2012	5:31:09 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:31:09 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:31:09 PM	Tube furnace set to 0
7/8/2012	5:31:39 PM	Helium valve closed
7/8/2012	5:31:39 PM	H2 valve closed
7/8/2012	5:31:39 PM	BCl3 valve closed
7/8/2012	5:31:39 PM	PH3 valve closed
7/8/2012	5:31:39 PM	SiCl4 pre valve closed
7/8/2012	5:31:39 PM	SiCl4 post valve closed
7/8/2012	5:31:39 PM	Bypass valve closed
7/8/2012	5:31:39 PM	Bubbler valve closed
7/8/2012	5:31:39 PM	Main Vac valve opened
7/8/2012	5:31:39 PM	Helium MFC set to  0.000000
7/8/2012	5:31:39 PM	H2 MFC set to  0.000000
7/8/2012	5:31:39 PM	BCl3 MFC set to  0.000000
7/8/2012	5:31:39 PM	PH3 MFC set to  0.000000
7/8/2012	5:31:39 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:31:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:31:39 PM	Tube furnace set to 0
7/8/2012	5:32:09 PM	H2 valve closed
7/8/2012	5:32:09 PM	BCl3 valve closed
7/8/2012	5:32:09 PM	PH3 valve closed
7/8/2012	5:32:09 PM	SiCl4 pre valve closed
7/8/2012	5:32:09 PM	SiCl4 post valve closed
7/8/2012	5:32:09 PM	Bypass valve closed
7/8/2012	5:32:09 PM	Bubbler valve closed
7/8/2012	5:32:09 PM	Helium valve opened
7/8/2012	5:32:09 PM	Main Vac valve opened
7/8/2012	5:32:09 PM	Helium MFC set to  20.000000
7/8/2012	5:32:09 PM	H2 MFC set to  0.000000
7/8/2012	5:32:09 PM	BCl3 MFC set to  0.000000
7/8/2012	5:32:09 PM	PH3 MFC set to  0.000000
7/8/2012	5:32:09 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:32:09 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:32:09 PM	Tube furnace set to 0
7/8/2012	5:32:39 PM	Helium valve closed
7/8/2012	5:32:39 PM	H2 valve closed
7/8/2012	5:32:39 PM	BCl3 valve closed
7/8/2012	5:32:39 PM	PH3 valve closed
7/8/2012	5:32:39 PM	SiCl4 pre valve closed
7/8/2012	5:32:39 PM	SiCl4 post valve closed
7/8/2012	5:32:39 PM	Bypass valve closed
7/8/2012	5:32:39 PM	Bubbler valve closed
7/8/2012	5:32:39 PM	Main Vac valve opened
7/8/2012	5:32:39 PM	Helium MFC set to  0.000000
7/8/2012	5:32:39 PM	H2 MFC set to  0.000000
7/8/2012	5:32:39 PM	BCl3 MFC set to  0.000000
7/8/2012	5:32:39 PM	PH3 MFC set to  0.000000
7/8/2012	5:32:39 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:32:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:32:39 PM	Tube furnace set to 0
7/8/2012	5:33:09 PM	H2 valve closed
7/8/2012	5:33:09 PM	BCl3 valve closed
7/8/2012	5:33:09 PM	PH3 valve closed
7/8/2012	5:33:09 PM	SiCl4 pre valve closed
7/8/2012	5:33:09 PM	SiCl4 post valve closed
7/8/2012	5:33:09 PM	Bypass valve closed
7/8/2012	5:33:09 PM	Bubbler valve closed
7/8/2012	5:33:09 PM	Helium valve opened
7/8/2012	5:33:10 PM	Main Vac valve opened
7/8/2012	5:33:10 PM	Helium MFC set to  20.000000
7/8/2012	5:33:10 PM	H2 MFC set to  0.000000
7/8/2012	5:33:10 PM	BCl3 MFC set to  0.000000
7/8/2012	5:33:10 PM	PH3 MFC set to  0.000000
7/8/2012	5:33:10 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:33:10 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:33:10 PM	Tube furnace set to 0
7/8/2012	5:33:40 PM	Helium valve closed
7/8/2012	5:33:40 PM	H2 valve closed
7/8/2012	5:33:40 PM	BCl3 valve closed
7/8/2012	5:33:40 PM	PH3 valve closed
7/8/2012	5:33:40 PM	SiCl4 pre valve closed
7/8/2012	5:33:40 PM	SiCl4 post valve closed
7/8/2012	5:33:40 PM	Bypass valve closed
7/8/2012	5:33:40 PM	Bubbler valve closed
7/8/2012	5:33:40 PM	Main Vac valve opened
7/8/2012	5:33:40 PM	Helium MFC set to  0.000000
7/8/2012	5:33:40 PM	H2 MFC set to  0.000000
7/8/2012	5:33:40 PM	BCl3 MFC set to  0.000000
7/8/2012	5:33:40 PM	PH3 MFC set to  0.000000
7/8/2012	5:33:40 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:33:40 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:33:40 PM	Tube furnace set to 0
7/8/2012	5:34:10 PM	H2 valve closed
7/8/2012	5:34:10 PM	BCl3 valve closed
7/8/2012	5:34:10 PM	PH3 valve closed
7/8/2012	5:34:10 PM	SiCl4 pre valve closed
7/8/2012	5:34:10 PM	SiCl4 post valve closed
7/8/2012	5:34:10 PM	Bypass valve closed
7/8/2012	5:34:10 PM	Bubbler valve closed
7/8/2012	5:34:10 PM	Helium valve opened
7/8/2012	5:34:10 PM	Main Vac valve opened
7/8/2012	5:34:10 PM	Helium MFC set to  20.000000
7/8/2012	5:34:10 PM	H2 MFC set to  0.000000
7/8/2012	5:34:10 PM	BCl3 MFC set to  0.000000
7/8/2012	5:34:10 PM	PH3 MFC set to  0.000000
7/8/2012	5:34:10 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:34:10 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:34:10 PM	Tube furnace set to 0
7/8/2012	5:34:40 PM	Helium valve closed
7/8/2012	5:34:40 PM	H2 valve closed
7/8/2012	5:34:40 PM	BCl3 valve closed
7/8/2012	5:34:40 PM	PH3 valve closed
7/8/2012	5:34:40 PM	SiCl4 pre valve closed
7/8/2012	5:34:40 PM	SiCl4 post valve closed
7/8/2012	5:34:40 PM	Bypass valve closed
7/8/2012	5:34:40 PM	Bubbler valve closed
7/8/2012	5:34:40 PM	Main Vac valve opened
7/8/2012	5:34:40 PM	Helium MFC set to  0.000000
7/8/2012	5:34:40 PM	H2 MFC set to  0.000000
7/8/2012	5:34:40 PM	BCl3 MFC set to  0.000000
7/8/2012	5:34:40 PM	PH3 MFC set to  0.000000
7/8/2012	5:34:40 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:34:40 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:34:40 PM	Tube furnace set to 0
7/8/2012	5:35:10 PM	H2 valve closed
7/8/2012	5:35:10 PM	BCl3 valve closed
7/8/2012	5:35:10 PM	PH3 valve closed
7/8/2012	5:35:10 PM	SiCl4 pre valve closed
7/8/2012	5:35:10 PM	SiCl4 post valve closed
7/8/2012	5:35:10 PM	Bypass valve closed
7/8/2012	5:35:10 PM	Bubbler valve closed
7/8/2012	5:35:10 PM	Helium valve opened
7/8/2012	5:35:10 PM	Main Vac valve opened
7/8/2012	5:35:10 PM	Helium MFC set to  20.000000
7/8/2012	5:35:10 PM	H2 MFC set to  0.000000
7/8/2012	5:35:10 PM	BCl3 MFC set to  0.000000
7/8/2012	5:35:10 PM	PH3 MFC set to  0.000000
7/8/2012	5:35:10 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:35:10 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:35:11 PM	Tube furnace set to 0
7/8/2012	5:35:41 PM	Helium valve closed
7/8/2012	5:35:41 PM	H2 valve closed
7/8/2012	5:35:41 PM	BCl3 valve closed
7/8/2012	5:35:41 PM	PH3 valve closed
7/8/2012	5:35:41 PM	SiCl4 pre valve closed
7/8/2012	5:35:41 PM	SiCl4 post valve closed
7/8/2012	5:35:41 PM	Bypass valve closed
7/8/2012	5:35:41 PM	Bubbler valve closed
7/8/2012	5:35:41 PM	Main Vac valve opened
7/8/2012	5:35:41 PM	Helium MFC set to  0.000000
7/8/2012	5:35:41 PM	H2 MFC set to  0.000000
7/8/2012	5:35:41 PM	BCl3 MFC set to  0.000000
7/8/2012	5:35:41 PM	PH3 MFC set to  0.000000
7/8/2012	5:35:41 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:35:41 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:35:41 PM	Tube furnace set to 0
7/8/2012	5:36:11 PM	H2 valve closed
7/8/2012	5:36:11 PM	BCl3 valve closed
7/8/2012	5:36:11 PM	PH3 valve closed
7/8/2012	5:36:11 PM	SiCl4 pre valve closed
7/8/2012	5:36:11 PM	SiCl4 post valve closed
7/8/2012	5:36:11 PM	Bypass valve closed
7/8/2012	5:36:11 PM	Bubbler valve closed
7/8/2012	5:36:11 PM	Helium valve opened
7/8/2012	5:36:11 PM	Main Vac valve opened
7/8/2012	5:36:11 PM	Helium MFC set to  20.000000
7/8/2012	5:36:11 PM	H2 MFC set to  0.000000
7/8/2012	5:36:11 PM	BCl3 MFC set to  0.000000
7/8/2012	5:36:11 PM	PH3 MFC set to  0.000000
7/8/2012	5:36:11 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:36:11 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:36:11 PM	Tube furnace set to 0
7/8/2012	5:36:41 PM	Helium valve closed
7/8/2012	5:36:41 PM	H2 valve closed
7/8/2012	5:36:41 PM	BCl3 valve closed
7/8/2012	5:36:41 PM	PH3 valve closed
7/8/2012	5:36:41 PM	SiCl4 pre valve closed
7/8/2012	5:36:41 PM	SiCl4 post valve closed
7/8/2012	5:36:41 PM	Bypass valve closed
7/8/2012	5:36:41 PM	Bubbler valve closed
7/8/2012	5:36:41 PM	Main Vac valve opened
7/8/2012	5:36:41 PM	Helium MFC set to  0.000000
7/8/2012	5:36:41 PM	H2 MFC set to  0.000000
7/8/2012	5:36:41 PM	BCl3 MFC set to  0.000000
7/8/2012	5:36:41 PM	PH3 MFC set to  0.000000
7/8/2012	5:36:41 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:36:41 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:36:41 PM	Tube furnace set to 0
7/8/2012	5:37:11 PM	H2 valve closed
7/8/2012	5:37:11 PM	BCl3 valve closed
7/8/2012	5:37:11 PM	PH3 valve closed
7/8/2012	5:37:11 PM	SiCl4 pre valve closed
7/8/2012	5:37:11 PM	SiCl4 post valve closed
7/8/2012	5:37:11 PM	Bypass valve closed
7/8/2012	5:37:11 PM	Bubbler valve closed
7/8/2012	5:37:11 PM	Helium valve opened
7/8/2012	5:37:11 PM	Main Vac valve opened
7/8/2012	5:37:11 PM	Helium MFC set to  20.000000
7/8/2012	5:37:11 PM	H2 MFC set to  0.000000
7/8/2012	5:37:11 PM	BCl3 MFC set to  0.000000
7/8/2012	5:37:11 PM	PH3 MFC set to  0.000000
7/8/2012	5:37:11 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:37:11 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:37:12 PM	Tube furnace set to 0
7/8/2012	5:37:42 PM	Helium valve closed
7/8/2012	5:37:42 PM	H2 valve closed
7/8/2012	5:37:42 PM	BCl3 valve closed
7/8/2012	5:37:42 PM	PH3 valve closed
7/8/2012	5:37:42 PM	SiCl4 pre valve closed
7/8/2012	5:37:42 PM	SiCl4 post valve closed
7/8/2012	5:37:42 PM	Bypass valve closed
7/8/2012	5:37:42 PM	Bubbler valve closed
7/8/2012	5:37:42 PM	Main Vac valve opened
7/8/2012	5:37:42 PM	Helium MFC set to  0.000000
7/8/2012	5:37:42 PM	H2 MFC set to  0.000000
7/8/2012	5:37:42 PM	BCl3 MFC set to  0.000000
7/8/2012	5:37:42 PM	PH3 MFC set to  0.000000
7/8/2012	5:37:42 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:37:42 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:37:42 PM	Tube furnace set to 200
7/8/2012	5:38:12 PM	H2 valve closed
7/8/2012	5:38:12 PM	BCl3 valve closed
7/8/2012	5:38:12 PM	PH3 valve closed
7/8/2012	5:38:12 PM	SiCl4 pre valve closed
7/8/2012	5:38:12 PM	SiCl4 post valve closed
7/8/2012	5:38:12 PM	Bypass valve closed
7/8/2012	5:38:12 PM	Bubbler valve closed
7/8/2012	5:38:12 PM	Helium valve opened
7/8/2012	5:38:12 PM	Main Vac valve opened
7/8/2012	5:38:12 PM	Helium MFC set to  20.000000
7/8/2012	5:38:12 PM	H2 MFC set to  0.000000
7/8/2012	5:38:12 PM	BCl3 MFC set to  0.000000
7/8/2012	5:38:12 PM	PH3 MFC set to  0.000000
7/8/2012	5:38:12 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:38:12 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:38:12 PM	Tube furnace set to 200
7/8/2012	5:38:42 PM	Helium valve closed
7/8/2012	5:38:42 PM	H2 valve closed
7/8/2012	5:38:42 PM	BCl3 valve closed
7/8/2012	5:38:42 PM	PH3 valve closed
7/8/2012	5:38:42 PM	SiCl4 pre valve closed
7/8/2012	5:38:42 PM	SiCl4 post valve closed
7/8/2012	5:38:42 PM	Bypass valve closed
7/8/2012	5:38:42 PM	Bubbler valve closed
7/8/2012	5:38:42 PM	Main Vac valve opened
7/8/2012	5:38:42 PM	Helium MFC set to  0.000000
7/8/2012	5:38:42 PM	H2 MFC set to  0.000000
7/8/2012	5:38:42 PM	BCl3 MFC set to  0.000000
7/8/2012	5:38:42 PM	PH3 MFC set to  0.000000
7/8/2012	5:38:42 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:38:42 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:38:42 PM	Tube furnace set to 200
7/8/2012	5:39:12 PM	H2 valve closed
7/8/2012	5:39:12 PM	BCl3 valve closed
7/8/2012	5:39:12 PM	PH3 valve closed
7/8/2012	5:39:12 PM	SiCl4 pre valve closed
7/8/2012	5:39:12 PM	SiCl4 post valve closed
7/8/2012	5:39:12 PM	Bypass valve closed
7/8/2012	5:39:12 PM	Bubbler valve closed
7/8/2012	5:39:12 PM	Helium valve opened
7/8/2012	5:39:12 PM	Main Vac valve opened
7/8/2012	5:39:12 PM	Helium MFC set to  20.000000
7/8/2012	5:39:12 PM	H2 MFC set to  0.000000
7/8/2012	5:39:12 PM	BCl3 MFC set to  0.000000
7/8/2012	5:39:12 PM	PH3 MFC set to  0.000000
7/8/2012	5:39:12 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:39:12 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:39:13 PM	Tube furnace set to 200
7/8/2012	5:39:43 PM	Helium valve closed
7/8/2012	5:39:43 PM	H2 valve closed
7/8/2012	5:39:43 PM	BCl3 valve closed
7/8/2012	5:39:43 PM	PH3 valve closed
7/8/2012	5:39:43 PM	SiCl4 pre valve closed
7/8/2012	5:39:43 PM	SiCl4 post valve closed
7/8/2012	5:39:43 PM	Bypass valve closed
7/8/2012	5:39:43 PM	Bubbler valve closed
7/8/2012	5:39:43 PM	Main Vac valve opened
7/8/2012	5:39:43 PM	Helium MFC set to  0.000000
7/8/2012	5:39:43 PM	H2 MFC set to  0.000000
7/8/2012	5:39:43 PM	BCl3 MFC set to  0.000000
7/8/2012	5:39:43 PM	PH3 MFC set to  0.000000
7/8/2012	5:39:43 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:39:43 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:39:43 PM	Tube furnace set to 200
7/8/2012	5:40:13 PM	H2 valve closed
7/8/2012	5:40:13 PM	BCl3 valve closed
7/8/2012	5:40:13 PM	PH3 valve closed
7/8/2012	5:40:13 PM	SiCl4 pre valve closed
7/8/2012	5:40:13 PM	SiCl4 post valve closed
7/8/2012	5:40:13 PM	Bypass valve closed
7/8/2012	5:40:13 PM	Bubbler valve closed
7/8/2012	5:40:13 PM	Helium valve opened
7/8/2012	5:40:13 PM	Main Vac valve opened
7/8/2012	5:40:13 PM	Helium MFC set to  20.000000
7/8/2012	5:40:13 PM	H2 MFC set to  0.000000
7/8/2012	5:40:13 PM	BCl3 MFC set to  0.000000
7/8/2012	5:40:13 PM	PH3 MFC set to  0.000000
7/8/2012	5:40:13 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:40:13 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:40:13 PM	Tube furnace set to 200
7/8/2012	5:40:43 PM	Helium valve closed
7/8/2012	5:40:43 PM	H2 valve closed
7/8/2012	5:40:43 PM	BCl3 valve closed
7/8/2012	5:40:43 PM	PH3 valve closed
7/8/2012	5:40:43 PM	SiCl4 pre valve closed
7/8/2012	5:40:43 PM	SiCl4 post valve closed
7/8/2012	5:40:43 PM	Bypass valve closed
7/8/2012	5:40:43 PM	Bubbler valve closed
7/8/2012	5:40:43 PM	Main Vac valve opened
7/8/2012	5:40:43 PM	Helium MFC set to  0.000000
7/8/2012	5:40:43 PM	H2 MFC set to  0.000000
7/8/2012	5:40:43 PM	BCl3 MFC set to  0.000000
7/8/2012	5:40:43 PM	PH3 MFC set to  0.000000
7/8/2012	5:40:43 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:40:43 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:40:43 PM	Tube furnace set to 200
7/8/2012	5:41:13 PM	H2 valve closed
7/8/2012	5:41:13 PM	BCl3 valve closed
7/8/2012	5:41:13 PM	PH3 valve closed
7/8/2012	5:41:13 PM	SiCl4 pre valve closed
7/8/2012	5:41:13 PM	SiCl4 post valve closed
7/8/2012	5:41:13 PM	Bypass valve closed
7/8/2012	5:41:13 PM	Bubbler valve closed
7/8/2012	5:41:13 PM	Helium valve opened
7/8/2012	5:41:13 PM	Main Vac valve opened
7/8/2012	5:41:13 PM	Helium MFC set to  20.000000
7/8/2012	5:41:13 PM	H2 MFC set to  0.000000
7/8/2012	5:41:13 PM	BCl3 MFC set to  0.000000
7/8/2012	5:41:13 PM	PH3 MFC set to  0.000000
7/8/2012	5:41:13 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:41:13 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:41:13 PM	Tube furnace set to 200
7/8/2012	5:41:43 PM	Helium valve closed
7/8/2012	5:41:43 PM	H2 valve closed
7/8/2012	5:41:43 PM	BCl3 valve closed
7/8/2012	5:41:43 PM	PH3 valve closed
7/8/2012	5:41:43 PM	SiCl4 pre valve closed
7/8/2012	5:41:43 PM	SiCl4 post valve closed
7/8/2012	5:41:43 PM	Bypass valve closed
7/8/2012	5:41:44 PM	Bubbler valve closed
7/8/2012	5:41:44 PM	Main Vac valve opened
7/8/2012	5:41:44 PM	Helium MFC set to  0.000000
7/8/2012	5:41:44 PM	H2 MFC set to  0.000000
7/8/2012	5:41:44 PM	BCl3 MFC set to  0.000000
7/8/2012	5:41:44 PM	PH3 MFC set to  0.000000
7/8/2012	5:41:44 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:41:44 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:41:44 PM	Tube furnace set to 200
7/8/2012	5:42:14 PM	H2 valve closed
7/8/2012	5:42:14 PM	BCl3 valve closed
7/8/2012	5:42:14 PM	PH3 valve closed
7/8/2012	5:42:14 PM	SiCl4 pre valve closed
7/8/2012	5:42:14 PM	SiCl4 post valve closed
7/8/2012	5:42:14 PM	Bypass valve closed
7/8/2012	5:42:14 PM	Bubbler valve closed
7/8/2012	5:42:14 PM	Helium valve opened
7/8/2012	5:42:14 PM	Main Vac valve opened
7/8/2012	5:42:14 PM	Helium MFC set to  20.000000
7/8/2012	5:42:14 PM	H2 MFC set to  0.000000
7/8/2012	5:42:14 PM	BCl3 MFC set to  0.000000
7/8/2012	5:42:14 PM	PH3 MFC set to  0.000000
7/8/2012	5:42:14 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:42:14 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:42:14 PM	Tube furnace set to 200
7/8/2012	5:42:44 PM	Helium valve closed
7/8/2012	5:42:44 PM	H2 valve closed
7/8/2012	5:42:44 PM	BCl3 valve closed
7/8/2012	5:42:44 PM	PH3 valve closed
7/8/2012	5:42:44 PM	SiCl4 pre valve closed
7/8/2012	5:42:44 PM	SiCl4 post valve closed
7/8/2012	5:42:44 PM	Bypass valve closed
7/8/2012	5:42:44 PM	Bubbler valve closed
7/8/2012	5:42:44 PM	Main Vac valve opened
7/8/2012	5:42:44 PM	Helium MFC set to  0.000000
7/8/2012	5:42:44 PM	H2 MFC set to  0.000000
7/8/2012	5:42:44 PM	BCl3 MFC set to  0.000000
7/8/2012	5:42:44 PM	PH3 MFC set to  0.000000
7/8/2012	5:42:44 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:42:44 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:42:44 PM	Tube furnace set to 200
7/8/2012	5:43:14 PM	H2 valve closed
7/8/2012	5:43:14 PM	BCl3 valve closed
7/8/2012	5:43:14 PM	PH3 valve closed
7/8/2012	5:43:14 PM	SiCl4 pre valve closed
7/8/2012	5:43:14 PM	SiCl4 post valve closed
7/8/2012	5:43:14 PM	Bypass valve closed
7/8/2012	5:43:14 PM	Bubbler valve closed
7/8/2012	5:43:14 PM	Helium valve opened
7/8/2012	5:43:14 PM	Main Vac valve opened
7/8/2012	5:43:14 PM	Helium MFC set to  20.000000
7/8/2012	5:43:14 PM	H2 MFC set to  0.000000
7/8/2012	5:43:14 PM	BCl3 MFC set to  0.000000
7/8/2012	5:43:14 PM	PH3 MFC set to  0.000000
7/8/2012	5:43:14 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:43:14 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:43:14 PM	Tube furnace set to 200
7/8/2012	5:43:44 PM	Helium valve closed
7/8/2012	5:43:44 PM	H2 valve closed
7/8/2012	5:43:44 PM	BCl3 valve closed
7/8/2012	5:43:44 PM	PH3 valve closed
7/8/2012	5:43:44 PM	SiCl4 pre valve closed
7/8/2012	5:43:44 PM	SiCl4 post valve closed
7/8/2012	5:43:44 PM	Bypass valve closed
7/8/2012	5:43:44 PM	Bubbler valve closed
7/8/2012	5:43:44 PM	Main Vac valve opened
7/8/2012	5:43:44 PM	Helium MFC set to  0.000000
7/8/2012	5:43:44 PM	H2 MFC set to  0.000000
7/8/2012	5:43:44 PM	BCl3 MFC set to  0.000000
7/8/2012	5:43:44 PM	PH3 MFC set to  0.000000
7/8/2012	5:43:44 PM	SiCl4 MFC set to  0.000000
7/8/2012	5:43:44 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	5:43:45 PM	Tube furnace set to 0
7/8/2012	5:43:46 PM	Run finished at 5:43 PM
7/8/2012	6:07:12 PM	Recipe started at 6:07 PM
7/8/2012	6:07:12 PM	Helium valve closed
7/8/2012	6:07:12 PM	H2 valve closed
7/8/2012	6:07:12 PM	BCl3 valve closed
7/8/2012	6:07:12 PM	PH3 valve closed
7/8/2012	6:07:12 PM	SiCl4 pre valve closed
7/8/2012	6:07:12 PM	SiCl4 post valve closed
7/8/2012	6:07:12 PM	Bypass valve closed
7/8/2012	6:07:12 PM	Bubbler valve closed
7/8/2012	6:07:12 PM	Main Vac valve opened
7/8/2012	6:07:12 PM	Helium MFC set to  0.000000
7/8/2012	6:07:12 PM	H2 MFC set to  0.000000
7/8/2012	6:07:12 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:12 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:12 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:12 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:12 PM	Tube furnace set to 0
7/8/2012	6:07:13 PM	H2 valve closed
7/8/2012	6:07:13 PM	BCl3 valve closed
7/8/2012	6:07:13 PM	PH3 valve closed
7/8/2012	6:07:13 PM	SiCl4 pre valve closed
7/8/2012	6:07:13 PM	SiCl4 post valve closed
7/8/2012	6:07:13 PM	Bypass valve closed
7/8/2012	6:07:13 PM	Bubbler valve closed
7/8/2012	6:07:13 PM	Helium valve opened
7/8/2012	6:07:13 PM	Main Vac valve opened
7/8/2012	6:07:13 PM	Helium MFC set to  20.000000
7/8/2012	6:07:13 PM	H2 MFC set to  0.000000
7/8/2012	6:07:13 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:13 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:13 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:13 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:13 PM	Tube furnace set to 0
7/8/2012	6:07:14 PM	Helium valve closed
7/8/2012	6:07:14 PM	H2 valve closed
7/8/2012	6:07:14 PM	BCl3 valve closed
7/8/2012	6:07:14 PM	PH3 valve closed
7/8/2012	6:07:14 PM	SiCl4 pre valve closed
7/8/2012	6:07:14 PM	SiCl4 post valve closed
7/8/2012	6:07:14 PM	Bypass valve closed
7/8/2012	6:07:14 PM	Bubbler valve closed
7/8/2012	6:07:14 PM	Main Vac valve opened
7/8/2012	6:07:14 PM	Helium MFC set to  0.000000
7/8/2012	6:07:14 PM	H2 MFC set to  0.000000
7/8/2012	6:07:14 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:14 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:14 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:14 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:14 PM	Tube furnace set to 0
7/8/2012	6:07:14 PM	H2 valve closed
7/8/2012	6:07:14 PM	BCl3 valve closed
7/8/2012	6:07:14 PM	PH3 valve closed
7/8/2012	6:07:14 PM	SiCl4 pre valve closed
7/8/2012	6:07:14 PM	SiCl4 post valve closed
7/8/2012	6:07:14 PM	Bypass valve closed
7/8/2012	6:07:14 PM	Bubbler valve closed
7/8/2012	6:07:14 PM	Helium valve opened
7/8/2012	6:07:14 PM	Main Vac valve opened
7/8/2012	6:07:14 PM	Helium MFC set to  20.000000
7/8/2012	6:07:14 PM	H2 MFC set to  0.000000
7/8/2012	6:07:14 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:14 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:14 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:14 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:14 PM	Tube furnace set to 0
7/8/2012	6:07:15 PM	Helium valve closed
7/8/2012	6:07:15 PM	H2 valve closed
7/8/2012	6:07:15 PM	BCl3 valve closed
7/8/2012	6:07:15 PM	PH3 valve closed
7/8/2012	6:07:15 PM	SiCl4 pre valve closed
7/8/2012	6:07:15 PM	SiCl4 post valve closed
7/8/2012	6:07:15 PM	Bypass valve closed
7/8/2012	6:07:15 PM	Bubbler valve closed
7/8/2012	6:07:15 PM	Main Vac valve opened
7/8/2012	6:07:15 PM	Helium MFC set to  0.000000
7/8/2012	6:07:15 PM	H2 MFC set to  0.000000
7/8/2012	6:07:15 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:15 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:15 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:15 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:15 PM	Tube furnace set to 0
7/8/2012	6:07:16 PM	H2 valve closed
7/8/2012	6:07:16 PM	BCl3 valve closed
7/8/2012	6:07:16 PM	PH3 valve closed
7/8/2012	6:07:16 PM	SiCl4 pre valve closed
7/8/2012	6:07:16 PM	SiCl4 post valve closed
7/8/2012	6:07:16 PM	Bypass valve closed
7/8/2012	6:07:16 PM	Bubbler valve closed
7/8/2012	6:07:16 PM	Helium valve opened
7/8/2012	6:07:16 PM	Main Vac valve opened
7/8/2012	6:07:16 PM	Helium MFC set to  20.000000
7/8/2012	6:07:16 PM	H2 MFC set to  0.000000
7/8/2012	6:07:16 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:16 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:16 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:16 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:16 PM	Tube furnace set to 0
7/8/2012	6:07:16 PM	Helium valve closed
7/8/2012	6:07:16 PM	H2 valve closed
7/8/2012	6:07:16 PM	BCl3 valve closed
7/8/2012	6:07:16 PM	PH3 valve closed
7/8/2012	6:07:16 PM	SiCl4 pre valve closed
7/8/2012	6:07:16 PM	SiCl4 post valve closed
7/8/2012	6:07:16 PM	Bypass valve closed
7/8/2012	6:07:16 PM	Bubbler valve closed
7/8/2012	6:07:16 PM	Main Vac valve opened
7/8/2012	6:07:16 PM	Helium MFC set to  0.000000
7/8/2012	6:07:16 PM	H2 MFC set to  0.000000
7/8/2012	6:07:16 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:16 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:16 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:16 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:16 PM	Tube furnace set to 0
7/8/2012	6:07:17 PM	H2 valve closed
7/8/2012	6:07:17 PM	BCl3 valve closed
7/8/2012	6:07:17 PM	PH3 valve closed
7/8/2012	6:07:17 PM	SiCl4 pre valve closed
7/8/2012	6:07:17 PM	SiCl4 post valve closed
7/8/2012	6:07:17 PM	Bypass valve closed
7/8/2012	6:07:17 PM	Bubbler valve closed
7/8/2012	6:07:17 PM	Helium valve opened
7/8/2012	6:07:17 PM	Main Vac valve opened
7/8/2012	6:07:17 PM	Helium MFC set to  20.000000
7/8/2012	6:07:17 PM	H2 MFC set to  0.000000
7/8/2012	6:07:17 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:17 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:17 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:17 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:17 PM	Tube furnace set to 0
7/8/2012	6:07:18 PM	Helium valve closed
7/8/2012	6:07:18 PM	H2 valve closed
7/8/2012	6:07:18 PM	BCl3 valve closed
7/8/2012	6:07:18 PM	PH3 valve closed
7/8/2012	6:07:18 PM	SiCl4 pre valve closed
7/8/2012	6:07:18 PM	SiCl4 post valve closed
7/8/2012	6:07:18 PM	Bypass valve closed
7/8/2012	6:07:18 PM	Bubbler valve closed
7/8/2012	6:07:18 PM	Main Vac valve opened
7/8/2012	6:07:18 PM	Helium MFC set to  0.000000
7/8/2012	6:07:18 PM	H2 MFC set to  0.000000
7/8/2012	6:07:18 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:18 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:18 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:18 PM	Tube furnace set to 0
7/8/2012	6:07:18 PM	H2 valve closed
7/8/2012	6:07:18 PM	BCl3 valve closed
7/8/2012	6:07:18 PM	PH3 valve closed
7/8/2012	6:07:18 PM	SiCl4 pre valve closed
7/8/2012	6:07:18 PM	SiCl4 post valve closed
7/8/2012	6:07:18 PM	Bypass valve closed
7/8/2012	6:07:18 PM	Bubbler valve closed
7/8/2012	6:07:18 PM	Helium valve opened
7/8/2012	6:07:18 PM	Main Vac valve opened
7/8/2012	6:07:18 PM	Helium MFC set to  20.000000
7/8/2012	6:07:18 PM	H2 MFC set to  0.000000
7/8/2012	6:07:18 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:18 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:18 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:19 PM	Tube furnace set to 0
7/8/2012	6:07:19 PM	Helium valve closed
7/8/2012	6:07:19 PM	H2 valve closed
7/8/2012	6:07:19 PM	BCl3 valve closed
7/8/2012	6:07:19 PM	PH3 valve closed
7/8/2012	6:07:19 PM	SiCl4 pre valve closed
7/8/2012	6:07:19 PM	SiCl4 post valve closed
7/8/2012	6:07:19 PM	Bypass valve closed
7/8/2012	6:07:19 PM	Bubbler valve closed
7/8/2012	6:07:19 PM	Main Vac valve opened
7/8/2012	6:07:19 PM	Helium MFC set to  0.000000
7/8/2012	6:07:19 PM	H2 MFC set to  0.000000
7/8/2012	6:07:19 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:19 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:19 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:19 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:19 PM	Tube furnace set to 0
7/8/2012	6:07:20 PM	H2 valve closed
7/8/2012	6:07:20 PM	BCl3 valve closed
7/8/2012	6:07:20 PM	PH3 valve closed
7/8/2012	6:07:20 PM	SiCl4 pre valve closed
7/8/2012	6:07:20 PM	SiCl4 post valve closed
7/8/2012	6:07:20 PM	Bypass valve closed
7/8/2012	6:07:20 PM	Bubbler valve closed
7/8/2012	6:07:20 PM	Helium valve opened
7/8/2012	6:07:20 PM	Main Vac valve opened
7/8/2012	6:07:20 PM	Helium MFC set to  20.000000
7/8/2012	6:07:20 PM	H2 MFC set to  0.000000
7/8/2012	6:07:20 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:20 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:20 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:20 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:20 PM	Tube furnace set to 0
7/8/2012	6:07:50 PM	Helium valve closed
7/8/2012	6:07:50 PM	H2 valve closed
7/8/2012	6:07:50 PM	BCl3 valve closed
7/8/2012	6:07:50 PM	PH3 valve closed
7/8/2012	6:07:50 PM	SiCl4 pre valve closed
7/8/2012	6:07:50 PM	SiCl4 post valve closed
7/8/2012	6:07:50 PM	Bypass valve closed
7/8/2012	6:07:50 PM	Bubbler valve closed
7/8/2012	6:07:50 PM	Main Vac valve opened
7/8/2012	6:07:50 PM	Helium MFC set to  0.000000
7/8/2012	6:07:50 PM	H2 MFC set to  0.000000
7/8/2012	6:07:50 PM	BCl3 MFC set to  0.000000
7/8/2012	6:07:50 PM	PH3 MFC set to  0.000000
7/8/2012	6:07:50 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:07:50 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:07:50 PM	Tube furnace set to 0
7/8/2012	6:08:20 PM	H2 valve closed
7/8/2012	6:08:20 PM	BCl3 valve closed
7/8/2012	6:08:20 PM	PH3 valve closed
7/8/2012	6:08:20 PM	SiCl4 pre valve closed
7/8/2012	6:08:20 PM	SiCl4 post valve closed
7/8/2012	6:08:20 PM	Bypass valve closed
7/8/2012	6:08:20 PM	Bubbler valve closed
7/8/2012	6:08:20 PM	Helium valve opened
7/8/2012	6:08:20 PM	Main Vac valve opened
7/8/2012	6:08:20 PM	Helium MFC set to  20.000000
7/8/2012	6:08:20 PM	H2 MFC set to  0.000000
7/8/2012	6:08:20 PM	BCl3 MFC set to  0.000000
7/8/2012	6:08:20 PM	PH3 MFC set to  0.000000
7/8/2012	6:08:20 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:08:20 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:08:21 PM	Tube furnace set to 0
7/8/2012	6:08:51 PM	Helium valve closed
7/8/2012	6:08:51 PM	H2 valve closed
7/8/2012	6:08:51 PM	BCl3 valve closed
7/8/2012	6:08:51 PM	PH3 valve closed
7/8/2012	6:08:51 PM	SiCl4 pre valve closed
7/8/2012	6:08:51 PM	SiCl4 post valve closed
7/8/2012	6:08:51 PM	Bypass valve closed
7/8/2012	6:08:51 PM	Bubbler valve closed
7/8/2012	6:08:51 PM	Main Vac valve opened
7/8/2012	6:08:51 PM	Helium MFC set to  0.000000
7/8/2012	6:08:51 PM	H2 MFC set to  0.000000
7/8/2012	6:08:51 PM	BCl3 MFC set to  0.000000
7/8/2012	6:08:51 PM	PH3 MFC set to  0.000000
7/8/2012	6:08:51 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:08:51 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:08:51 PM	Tube furnace set to 0
7/8/2012	6:09:21 PM	H2 valve closed
7/8/2012	6:09:21 PM	BCl3 valve closed
7/8/2012	6:09:21 PM	PH3 valve closed
7/8/2012	6:09:21 PM	SiCl4 pre valve closed
7/8/2012	6:09:21 PM	SiCl4 post valve closed
7/8/2012	6:09:21 PM	Bypass valve closed
7/8/2012	6:09:21 PM	Bubbler valve closed
7/8/2012	6:09:21 PM	Helium valve opened
7/8/2012	6:09:21 PM	Main Vac valve opened
7/8/2012	6:09:21 PM	Helium MFC set to  20.000000
7/8/2012	6:09:21 PM	H2 MFC set to  0.000000
7/8/2012	6:09:21 PM	BCl3 MFC set to  0.000000
7/8/2012	6:09:21 PM	PH3 MFC set to  0.000000
7/8/2012	6:09:21 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:09:21 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:09:21 PM	Tube furnace set to 0
7/8/2012	6:09:51 PM	Helium valve closed
7/8/2012	6:09:51 PM	H2 valve closed
7/8/2012	6:09:51 PM	BCl3 valve closed
7/8/2012	6:09:51 PM	PH3 valve closed
7/8/2012	6:09:51 PM	SiCl4 pre valve closed
7/8/2012	6:09:51 PM	SiCl4 post valve closed
7/8/2012	6:09:51 PM	Bypass valve closed
7/8/2012	6:09:51 PM	Bubbler valve closed
7/8/2012	6:09:51 PM	Main Vac valve opened
7/8/2012	6:09:51 PM	Helium MFC set to  0.000000
7/8/2012	6:09:51 PM	H2 MFC set to  0.000000
7/8/2012	6:09:51 PM	BCl3 MFC set to  0.000000
7/8/2012	6:09:51 PM	PH3 MFC set to  0.000000
7/8/2012	6:09:51 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:09:51 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:09:51 PM	Tube furnace set to 0
7/8/2012	6:10:21 PM	H2 valve closed
7/8/2012	6:10:21 PM	BCl3 valve closed
7/8/2012	6:10:21 PM	PH3 valve closed
7/8/2012	6:10:21 PM	SiCl4 pre valve closed
7/8/2012	6:10:21 PM	SiCl4 post valve closed
7/8/2012	6:10:21 PM	Bypass valve closed
7/8/2012	6:10:21 PM	Bubbler valve closed
7/8/2012	6:10:21 PM	Helium valve opened
7/8/2012	6:10:21 PM	Main Vac valve opened
7/8/2012	6:10:21 PM	Helium MFC set to  20.000000
7/8/2012	6:10:21 PM	H2 MFC set to  0.000000
7/8/2012	6:10:21 PM	BCl3 MFC set to  0.000000
7/8/2012	6:10:21 PM	PH3 MFC set to  0.000000
7/8/2012	6:10:21 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:10:21 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:10:21 PM	Tube furnace set to 0
7/8/2012	6:10:51 PM	Helium valve closed
7/8/2012	6:10:51 PM	H2 valve closed
7/8/2012	6:10:52 PM	BCl3 valve closed
7/8/2012	6:10:52 PM	PH3 valve closed
7/8/2012	6:10:52 PM	SiCl4 pre valve closed
7/8/2012	6:10:52 PM	SiCl4 post valve closed
7/8/2012	6:10:52 PM	Bypass valve closed
7/8/2012	6:10:52 PM	Bubbler valve closed
7/8/2012	6:10:52 PM	Main Vac valve opened
7/8/2012	6:10:52 PM	Helium MFC set to  0.000000
7/8/2012	6:10:52 PM	H2 MFC set to  0.000000
7/8/2012	6:10:52 PM	BCl3 MFC set to  0.000000
7/8/2012	6:10:52 PM	PH3 MFC set to  0.000000
7/8/2012	6:10:52 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:10:52 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:10:52 PM	Tube furnace set to 200
7/8/2012	6:11:22 PM	H2 valve closed
7/8/2012	6:11:22 PM	BCl3 valve closed
7/8/2012	6:11:22 PM	PH3 valve closed
7/8/2012	6:11:22 PM	SiCl4 pre valve closed
7/8/2012	6:11:22 PM	SiCl4 post valve closed
7/8/2012	6:11:22 PM	Bypass valve closed
7/8/2012	6:11:22 PM	Bubbler valve closed
7/8/2012	6:11:22 PM	Helium valve opened
7/8/2012	6:11:22 PM	Main Vac valve opened
7/8/2012	6:11:22 PM	Helium MFC set to  20.000000
7/8/2012	6:11:22 PM	H2 MFC set to  0.000000
7/8/2012	6:11:22 PM	BCl3 MFC set to  0.000000
7/8/2012	6:11:22 PM	PH3 MFC set to  0.000000
7/8/2012	6:11:22 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:11:22 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:11:22 PM	Tube furnace set to 200
7/8/2012	6:11:52 PM	Helium valve closed
7/8/2012	6:11:52 PM	H2 valve closed
7/8/2012	6:11:52 PM	BCl3 valve closed
7/8/2012	6:11:52 PM	PH3 valve closed
7/8/2012	6:11:52 PM	SiCl4 pre valve closed
7/8/2012	6:11:52 PM	SiCl4 post valve closed
7/8/2012	6:11:52 PM	Bypass valve closed
7/8/2012	6:11:52 PM	Bubbler valve closed
7/8/2012	6:11:52 PM	Main Vac valve opened
7/8/2012	6:11:52 PM	Helium MFC set to  0.000000
7/8/2012	6:11:52 PM	H2 MFC set to  0.000000
7/8/2012	6:11:52 PM	BCl3 MFC set to  0.000000
7/8/2012	6:11:52 PM	PH3 MFC set to  0.000000
7/8/2012	6:11:52 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:11:52 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:11:52 PM	Tube furnace set to 200
7/8/2012	6:12:22 PM	H2 valve closed
7/8/2012	6:12:22 PM	BCl3 valve closed
7/8/2012	6:12:22 PM	PH3 valve closed
7/8/2012	6:12:22 PM	SiCl4 pre valve closed
7/8/2012	6:12:22 PM	SiCl4 post valve closed
7/8/2012	6:12:22 PM	Bypass valve closed
7/8/2012	6:12:22 PM	Bubbler valve closed
7/8/2012	6:12:22 PM	Helium valve opened
7/8/2012	6:12:22 PM	Main Vac valve opened
7/8/2012	6:12:22 PM	Helium MFC set to  20.000000
7/8/2012	6:12:22 PM	H2 MFC set to  0.000000
7/8/2012	6:12:22 PM	BCl3 MFC set to  0.000000
7/8/2012	6:12:22 PM	PH3 MFC set to  0.000000
7/8/2012	6:12:22 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:12:22 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:12:22 PM	Tube furnace set to 200
7/8/2012	6:12:52 PM	Helium valve closed
7/8/2012	6:12:52 PM	H2 valve closed
7/8/2012	6:12:52 PM	BCl3 valve closed
7/8/2012	6:12:52 PM	PH3 valve closed
7/8/2012	6:12:52 PM	SiCl4 pre valve closed
7/8/2012	6:12:52 PM	SiCl4 post valve closed
7/8/2012	6:12:52 PM	Bypass valve closed
7/8/2012	6:12:52 PM	Bubbler valve closed
7/8/2012	6:12:52 PM	Main Vac valve opened
7/8/2012	6:12:52 PM	Helium MFC set to  0.000000
7/8/2012	6:12:52 PM	H2 MFC set to  0.000000
7/8/2012	6:12:52 PM	BCl3 MFC set to  0.000000
7/8/2012	6:12:53 PM	PH3 MFC set to  0.000000
7/8/2012	6:12:53 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:12:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:12:53 PM	Tube furnace set to 200
7/8/2012	6:13:23 PM	H2 valve closed
7/8/2012	6:13:23 PM	BCl3 valve closed
7/8/2012	6:13:23 PM	PH3 valve closed
7/8/2012	6:13:23 PM	SiCl4 pre valve closed
7/8/2012	6:13:23 PM	SiCl4 post valve closed
7/8/2012	6:13:23 PM	Bypass valve closed
7/8/2012	6:13:23 PM	Bubbler valve closed
7/8/2012	6:13:23 PM	Helium valve opened
7/8/2012	6:13:23 PM	Main Vac valve opened
7/8/2012	6:13:23 PM	Helium MFC set to  20.000000
7/8/2012	6:13:23 PM	H2 MFC set to  0.000000
7/8/2012	6:13:23 PM	BCl3 MFC set to  0.000000
7/8/2012	6:13:23 PM	PH3 MFC set to  0.000000
7/8/2012	6:13:23 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:13:23 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:13:23 PM	Tube furnace set to 200
7/8/2012	6:13:25 PM	Helium valve closed
7/8/2012	6:13:25 PM	H2 valve closed
7/8/2012	6:13:25 PM	BCl3 valve closed
7/8/2012	6:13:25 PM	PH3 valve closed
7/8/2012	6:13:25 PM	SiCl4 pre valve closed
7/8/2012	6:13:25 PM	SiCl4 post valve closed
7/8/2012	6:13:25 PM	Bypass valve closed
7/8/2012	6:13:25 PM	Bubbler valve closed
7/8/2012	6:13:25 PM	Main Vac valve opened
7/8/2012	6:13:25 PM	Helium MFC set to  0.000000
7/8/2012	6:13:25 PM	H2 MFC set to  0.000000
7/8/2012	6:13:25 PM	BCl3 MFC set to  0.000000
7/8/2012	6:13:25 PM	PH3 MFC set to  0.000000
7/8/2012	6:13:25 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:13:25 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:13:25 PM	Tube furnace set to 200
7/8/2012	6:13:25 PM	H2 valve closed
7/8/2012	6:13:25 PM	BCl3 valve closed
7/8/2012	6:13:25 PM	PH3 valve closed
7/8/2012	6:13:25 PM	SiCl4 pre valve closed
7/8/2012	6:13:25 PM	SiCl4 post valve closed
7/8/2012	6:13:25 PM	Bypass valve closed
7/8/2012	6:13:25 PM	Bubbler valve closed
7/8/2012	6:13:25 PM	Helium valve opened
7/8/2012	6:13:25 PM	Main Vac valve opened
7/8/2012	6:13:25 PM	Helium MFC set to  20.000000
7/8/2012	6:13:25 PM	H2 MFC set to  0.000000
7/8/2012	6:13:25 PM	BCl3 MFC set to  0.000000
7/8/2012	6:13:25 PM	PH3 MFC set to  0.000000
7/8/2012	6:13:25 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:13:25 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:13:26 PM	Tube furnace set to 200
7/8/2012	6:13:28 PM	Helium valve closed
7/8/2012	6:13:28 PM	H2 valve closed
7/8/2012	6:13:28 PM	BCl3 valve closed
7/8/2012	6:13:28 PM	PH3 valve closed
7/8/2012	6:13:28 PM	SiCl4 pre valve closed
7/8/2012	6:13:28 PM	SiCl4 post valve closed
7/8/2012	6:13:28 PM	Bypass valve closed
7/8/2012	6:13:28 PM	Bubbler valve closed
7/8/2012	6:13:28 PM	Main Vac valve opened
7/8/2012	6:13:28 PM	Helium MFC set to  0.000000
7/8/2012	6:13:28 PM	H2 MFC set to  0.000000
7/8/2012	6:13:28 PM	BCl3 MFC set to  0.000000
7/8/2012	6:13:28 PM	PH3 MFC set to  0.000000
7/8/2012	6:13:28 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:13:28 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:13:28 PM	Tube furnace set to 200
7/8/2012	6:13:29 PM	H2 valve closed
7/8/2012	6:13:29 PM	BCl3 valve closed
7/8/2012	6:13:29 PM	PH3 valve closed
7/8/2012	6:13:29 PM	SiCl4 pre valve closed
7/8/2012	6:13:29 PM	SiCl4 post valve closed
7/8/2012	6:13:29 PM	Bypass valve closed
7/8/2012	6:13:29 PM	Bubbler valve closed
7/8/2012	6:13:29 PM	Helium valve opened
7/8/2012	6:13:29 PM	Main Vac valve opened
7/8/2012	6:13:29 PM	Helium MFC set to  20.000000
7/8/2012	6:13:29 PM	H2 MFC set to  0.000000
7/8/2012	6:13:29 PM	BCl3 MFC set to  0.000000
7/8/2012	6:13:29 PM	PH3 MFC set to  0.000000
7/8/2012	6:13:29 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:13:29 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:13:29 PM	Tube furnace set to 200
7/8/2012	6:13:59 PM	Helium valve closed
7/8/2012	6:13:59 PM	H2 valve closed
7/8/2012	6:13:59 PM	BCl3 valve closed
7/8/2012	6:13:59 PM	PH3 valve closed
7/8/2012	6:13:59 PM	SiCl4 pre valve closed
7/8/2012	6:13:59 PM	SiCl4 post valve closed
7/8/2012	6:13:59 PM	Bypass valve closed
7/8/2012	6:13:59 PM	Bubbler valve closed
7/8/2012	6:13:59 PM	Main Vac valve opened
7/8/2012	6:13:59 PM	Helium MFC set to  0.000000
7/8/2012	6:13:59 PM	H2 MFC set to  0.000000
7/8/2012	6:13:59 PM	BCl3 MFC set to  0.000000
7/8/2012	6:13:59 PM	PH3 MFC set to  0.000000
7/8/2012	6:13:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:13:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:13:59 PM	Tube furnace set to 200
7/8/2012	6:14:29 PM	H2 valve closed
7/8/2012	6:14:29 PM	BCl3 valve closed
7/8/2012	6:14:29 PM	PH3 valve closed
7/8/2012	6:14:29 PM	SiCl4 pre valve closed
7/8/2012	6:14:29 PM	SiCl4 post valve closed
7/8/2012	6:14:29 PM	Bypass valve closed
7/8/2012	6:14:29 PM	Bubbler valve closed
7/8/2012	6:14:29 PM	Helium valve opened
7/8/2012	6:14:29 PM	Main Vac valve opened
7/8/2012	6:14:29 PM	Helium MFC set to  20.000000
7/8/2012	6:14:29 PM	H2 MFC set to  0.000000
7/8/2012	6:14:29 PM	BCl3 MFC set to  0.000000
7/8/2012	6:14:29 PM	PH3 MFC set to  0.000000
7/8/2012	6:14:29 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:14:29 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:14:29 PM	Tube furnace set to 200
7/8/2012	6:14:59 PM	Helium valve closed
7/8/2012	6:14:59 PM	H2 valve closed
7/8/2012	6:14:59 PM	BCl3 valve closed
7/8/2012	6:14:59 PM	PH3 valve closed
7/8/2012	6:14:59 PM	SiCl4 pre valve closed
7/8/2012	6:14:59 PM	SiCl4 post valve closed
7/8/2012	6:14:59 PM	Bypass valve closed
7/8/2012	6:14:59 PM	Bubbler valve closed
7/8/2012	6:14:59 PM	Main Vac valve opened
7/8/2012	6:14:59 PM	Helium MFC set to  0.000000
7/8/2012	6:14:59 PM	H2 MFC set to  0.000000
7/8/2012	6:14:59 PM	BCl3 MFC set to  0.000000
7/8/2012	6:14:59 PM	PH3 MFC set to  0.000000
7/8/2012	6:14:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:14:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:15:00 PM	Tube furnace set to 0
7/8/2012	6:15:01 PM	Run finished at 6:15 PM
7/8/2012	6:15:34 PM	Main Vac valve closed
7/8/2012	6:15:51 PM	Main Vac valve opened
7/8/2012	6:16:44 PM	Recipe started at 6:16 PM
7/8/2012	6:16:44 PM	Helium valve closed
7/8/2012	6:16:44 PM	H2 valve closed
7/8/2012	6:16:44 PM	BCl3 valve closed
7/8/2012	6:16:44 PM	PH3 valve closed
7/8/2012	6:16:44 PM	SiCl4 pre valve closed
7/8/2012	6:16:44 PM	SiCl4 post valve closed
7/8/2012	6:16:44 PM	Main Vac valve closed
7/8/2012	6:16:44 PM	Bypass valve closed
7/8/2012	6:16:44 PM	Bubbler valve closed
7/8/2012	6:16:44 PM	Helium MFC set to  0.000000
7/8/2012	6:16:44 PM	H2 MFC set to  0.000000
7/8/2012	6:16:44 PM	BCl3 MFC set to  0.000000
7/8/2012	6:16:44 PM	PH3 MFC set to  0.000000
7/8/2012	6:16:44 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:16:44 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:16:44 PM	Tube furnace set to 0
7/8/2012	6:16:47 PM	Helium valve closed
7/8/2012	6:16:47 PM	BCl3 valve closed
7/8/2012	6:16:47 PM	PH3 valve closed
7/8/2012	6:16:47 PM	SiCl4 pre valve closed
7/8/2012	6:16:47 PM	SiCl4 post valve closed
7/8/2012	6:16:47 PM	Main Vac valve closed
7/8/2012	6:16:47 PM	Bypass valve closed
7/8/2012	6:16:47 PM	Bubbler valve closed
7/8/2012	6:16:47 PM	H2 valve opened
7/8/2012	6:16:47 PM	Helium MFC set to  0.000000
7/8/2012	6:16:47 PM	H2 MFC set to  500.000000
7/8/2012	6:16:47 PM	BCl3 MFC set to  0.000000
7/8/2012	6:16:47 PM	PH3 MFC set to  0.000000
7/8/2012	6:16:47 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:16:47 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:16:47 PM	Tube furnace set to 0
7/8/2012	6:17:59 PM	Helium valve closed
7/8/2012	6:17:59 PM	BCl3 valve closed
7/8/2012	6:17:59 PM	PH3 valve closed
7/8/2012	6:17:59 PM	SiCl4 pre valve closed
7/8/2012	6:17:59 PM	SiCl4 post valve closed
7/8/2012	6:17:59 PM	Main Vac valve closed
7/8/2012	6:17:59 PM	Bypass valve closed
7/8/2012	6:17:59 PM	H2 valve opened
7/8/2012	6:17:59 PM	Bubbler valve opened
7/8/2012	6:17:59 PM	Helium MFC set to  0.000000
7/8/2012	6:17:59 PM	H2 MFC set to  500.000000
7/8/2012	6:17:59 PM	BCl3 MFC set to  0.000000
7/8/2012	6:17:59 PM	PH3 MFC set to  0.000000
7/8/2012	6:17:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:17:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:18:00 PM	Tube furnace set to 0
7/8/2012	6:18:01 PM	Helium valve closed
7/8/2012	6:18:01 PM	BCl3 valve closed
7/8/2012	6:18:01 PM	PH3 valve closed
7/8/2012	6:18:01 PM	SiCl4 pre valve closed
7/8/2012	6:18:01 PM	SiCl4 post valve closed
7/8/2012	6:18:01 PM	Main Vac valve closed
7/8/2012	6:18:01 PM	Bypass valve closed
7/8/2012	6:18:01 PM	H2 valve opened
7/8/2012	6:18:01 PM	Bubbler valve opened
7/8/2012	6:18:01 PM	Helium MFC set to  0.000000
7/8/2012	6:18:01 PM	H2 MFC set to  500.000000
7/8/2012	6:18:01 PM	BCl3 MFC set to  0.000000
7/8/2012	6:18:01 PM	PH3 MFC set to  0.000000
7/8/2012	6:18:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:18:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:18:01 PM	Tube furnace set to 1000
7/8/2012	6:38:01 PM	Helium valve closed
7/8/2012	6:38:01 PM	PH3 valve closed
7/8/2012	6:38:01 PM	Main Vac valve closed
7/8/2012	6:38:01 PM	Bypass valve closed
7/8/2012	6:38:01 PM	H2 valve opened
7/8/2012	6:38:01 PM	BCl3 valve opened
7/8/2012	6:38:01 PM	SiCl4 pre valve opened
7/8/2012	6:38:01 PM	SiCl4 post valve opened
7/8/2012	6:38:01 PM	Bubbler valve opened
7/8/2012	6:38:01 PM	Helium MFC set to  0.000000
7/8/2012	6:38:01 PM	H2 MFC set to  450.000000
7/8/2012	6:38:01 PM	BCl3 MFC set to  1.500000
7/8/2012	6:38:01 PM	PH3 MFC set to  0.000000
7/8/2012	6:38:01 PM	SiCl4 MFC set to  50.000000
7/8/2012	6:38:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:38:01 PM	Tube furnace set to 1000
7/8/2012	6:47:01 PM	Helium valve closed
7/8/2012	6:47:01 PM	BCl3 valve closed
7/8/2012	6:47:01 PM	PH3 valve closed
7/8/2012	6:47:01 PM	SiCl4 pre valve closed
7/8/2012	6:47:01 PM	SiCl4 post valve closed
7/8/2012	6:47:01 PM	Main Vac valve closed
7/8/2012	6:47:01 PM	Bypass valve closed
7/8/2012	6:47:01 PM	H2 valve opened
7/8/2012	6:47:01 PM	Bubbler valve opened
7/8/2012	6:47:01 PM	Helium MFC set to  0.000000
7/8/2012	6:47:01 PM	H2 MFC set to  500.000000
7/8/2012	6:47:01 PM	BCl3 MFC set to  0.000000
7/8/2012	6:47:01 PM	PH3 MFC set to  0.000000
7/8/2012	6:47:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:47:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:47:01 PM	Tube furnace set to 950
7/8/2012	6:49:01 PM	Helium valve closed
7/8/2012	6:49:01 PM	BCl3 valve closed
7/8/2012	6:49:01 PM	PH3 valve closed
7/8/2012	6:49:01 PM	SiCl4 pre valve closed
7/8/2012	6:49:01 PM	SiCl4 post valve closed
7/8/2012	6:49:01 PM	Main Vac valve closed
7/8/2012	6:49:01 PM	Bypass valve closed
7/8/2012	6:49:01 PM	H2 valve opened
7/8/2012	6:49:01 PM	Bubbler valve opened
7/8/2012	6:49:01 PM	Helium MFC set to  0.000000
7/8/2012	6:49:01 PM	H2 MFC set to  500.000000
7/8/2012	6:49:01 PM	BCl3 MFC set to  0.000000
7/8/2012	6:49:01 PM	PH3 MFC set to  0.000000
7/8/2012	6:49:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:49:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:49:02 PM	Tube furnace set to 900
7/8/2012	6:51:02 PM	Helium valve closed
7/8/2012	6:51:02 PM	BCl3 valve closed
7/8/2012	6:51:02 PM	PH3 valve closed
7/8/2012	6:51:02 PM	SiCl4 pre valve closed
7/8/2012	6:51:02 PM	SiCl4 post valve closed
7/8/2012	6:51:02 PM	Main Vac valve closed
7/8/2012	6:51:02 PM	Bypass valve closed
7/8/2012	6:51:02 PM	H2 valve opened
7/8/2012	6:51:02 PM	Bubbler valve opened
7/8/2012	6:51:02 PM	Helium MFC set to  0.000000
7/8/2012	6:51:02 PM	H2 MFC set to  500.000000
7/8/2012	6:51:02 PM	BCl3 MFC set to  0.000000
7/8/2012	6:51:02 PM	PH3 MFC set to  0.000000
7/8/2012	6:51:02 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:51:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:51:02 PM	Tube furnace set to 850
7/8/2012	6:53:02 PM	H2 valve closed
7/8/2012	6:53:02 PM	BCl3 valve closed
7/8/2012	6:53:02 PM	PH3 valve closed
7/8/2012	6:53:02 PM	SiCl4 pre valve closed
7/8/2012	6:53:02 PM	SiCl4 post valve closed
7/8/2012	6:53:02 PM	Main Vac valve closed
7/8/2012	6:53:02 PM	Bypass valve closed
7/8/2012	6:53:02 PM	Helium valve opened
7/8/2012	6:53:02 PM	Bubbler valve opened
7/8/2012	6:53:02 PM	Helium MFC set to  500.000000
7/8/2012	6:53:02 PM	H2 MFC set to  0.000000
7/8/2012	6:53:02 PM	BCl3 MFC set to  0.000000
7/8/2012	6:53:02 PM	PH3 MFC set to  0.000000
7/8/2012	6:53:02 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:53:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:53:02 PM	Tube furnace set to 800
7/8/2012	6:55:02 PM	H2 valve closed
7/8/2012	6:55:02 PM	BCl3 valve closed
7/8/2012	6:55:02 PM	PH3 valve closed
7/8/2012	6:55:02 PM	SiCl4 pre valve closed
7/8/2012	6:55:02 PM	SiCl4 post valve closed
7/8/2012	6:55:02 PM	Main Vac valve closed
7/8/2012	6:55:02 PM	Bypass valve closed
7/8/2012	6:55:02 PM	Helium valve opened
7/8/2012	6:55:02 PM	Bubbler valve opened
7/8/2012	6:55:02 PM	Helium MFC set to  500.000000
7/8/2012	6:55:02 PM	H2 MFC set to  0.000000
7/8/2012	6:55:02 PM	BCl3 MFC set to  0.000000
7/8/2012	6:55:02 PM	PH3 MFC set to  0.000000
7/8/2012	6:55:02 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:55:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:55:02 PM	Tube furnace set to 750
7/8/2012	6:57:02 PM	H2 valve closed
7/8/2012	6:57:02 PM	BCl3 valve closed
7/8/2012	6:57:02 PM	PH3 valve closed
7/8/2012	6:57:02 PM	SiCl4 pre valve closed
7/8/2012	6:57:02 PM	SiCl4 post valve closed
7/8/2012	6:57:02 PM	Main Vac valve closed
7/8/2012	6:57:02 PM	Bypass valve closed
7/8/2012	6:57:02 PM	Helium valve opened
7/8/2012	6:57:02 PM	Bubbler valve opened
7/8/2012	6:57:02 PM	Helium MFC set to  500.000000
7/8/2012	6:57:02 PM	H2 MFC set to  0.000000
7/8/2012	6:57:02 PM	BCl3 MFC set to  0.000000
7/8/2012	6:57:02 PM	PH3 MFC set to  0.000000
7/8/2012	6:57:02 PM	SiCl4 MFC set to  0.000000
7/8/2012	6:57:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	6:57:02 PM	Tube furnace set to 0
7/8/2012	7:17:02 PM	Helium valve closed
7/8/2012	7:17:02 PM	H2 valve closed
7/8/2012	7:17:02 PM	BCl3 valve closed
7/8/2012	7:17:02 PM	PH3 valve closed
7/8/2012	7:17:02 PM	SiCl4 pre valve closed
7/8/2012	7:17:02 PM	SiCl4 post valve closed
7/8/2012	7:17:02 PM	Main Vac valve closed
7/8/2012	7:17:02 PM	Bypass valve closed
7/8/2012	7:17:02 PM	Bubbler valve closed
7/8/2012	7:17:02 PM	Helium MFC set to  0.000000
7/8/2012	7:17:02 PM	H2 MFC set to  0.000000
7/8/2012	7:17:02 PM	BCl3 MFC set to  0.000000
7/8/2012	7:17:02 PM	PH3 MFC set to  0.000000
7/8/2012	7:17:02 PM	SiCl4 MFC set to  0.000000
7/8/2012	7:17:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	7:17:03 PM	Tube furnace set to 0
7/8/2012	7:17:04 PM	Run finished at 7:17 PM
7/8/2012	8:09:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	8:09:21 PM	Recipe started at 8:09 PM
7/8/2012	8:09:21 PM	Helium valve closed
7/8/2012	8:09:21 PM	H2 valve closed
7/8/2012	8:09:21 PM	BCl3 valve closed
7/8/2012	8:09:21 PM	PH3 valve closed
7/8/2012	8:09:21 PM	SiCl4 pre valve closed
7/8/2012	8:09:21 PM	SiCl4 post valve closed
7/8/2012	8:09:21 PM	Main Vac valve closed
7/8/2012	8:09:21 PM	Bypass valve closed
7/8/2012	8:09:21 PM	Bubbler valve closed
7/8/2012	8:09:21 PM	Helium MFC set to  0.000000
7/8/2012	8:09:21 PM	H2 MFC set to  0.000000
7/8/2012	8:09:21 PM	BCl3 MFC set to  0.000000
7/8/2012	8:09:21 PM	PH3 MFC set to  0.000000
7/8/2012	8:09:21 PM	SiCl4 MFC set to  0.000000
7/8/2012	8:09:21 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	8:09:21 PM	Tube furnace set to 0
7/8/2012	8:09:24 PM	H2 valve closed
7/8/2012	8:09:24 PM	BCl3 valve closed
7/8/2012	8:09:24 PM	PH3 valve closed
7/8/2012	8:09:24 PM	SiCl4 pre valve closed
7/8/2012	8:09:24 PM	SiCl4 post valve closed
7/8/2012	8:09:24 PM	Main Vac valve closed
7/8/2012	8:09:24 PM	Bypass valve closed
7/8/2012	8:09:24 PM	Bubbler valve closed
7/8/2012	8:09:24 PM	Helium valve opened
7/8/2012	8:09:24 PM	Helium MFC set to  500.000000
7/8/2012	8:09:24 PM	H2 MFC set to  0.000000
7/8/2012	8:09:24 PM	BCl3 MFC set to  0.000000
7/8/2012	8:09:24 PM	PH3 MFC set to  0.000000
7/8/2012	8:09:24 PM	SiCl4 MFC set to  0.000000
7/8/2012	8:09:24 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	8:09:24 PM	Tube furnace set to 0
7/8/2012	8:09:32 PM	Helium valve closed
7/8/2012	8:09:32 PM	H2 valve closed
7/8/2012	8:09:32 PM	BCl3 valve closed
7/8/2012	8:09:32 PM	PH3 valve closed
7/8/2012	8:09:32 PM	SiCl4 pre valve closed
7/8/2012	8:09:32 PM	SiCl4 post valve closed
7/8/2012	8:09:32 PM	Main Vac valve closed
7/8/2012	8:09:32 PM	Bypass valve closed
7/8/2012	8:09:32 PM	Bubbler valve closed
7/8/2012	8:09:32 PM	Helium MFC set to  0.000000
7/8/2012	8:09:32 PM	H2 MFC set to  0.000000
7/8/2012	8:09:32 PM	BCl3 MFC set to  0.000000
7/8/2012	8:09:32 PM	PH3 MFC set to  0.000000
7/8/2012	8:09:32 PM	SiCl4 MFC set to  0.000000
7/8/2012	8:09:32 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	8:09:32 PM	Tube furnace set to 0
7/8/2012	8:09:33 PM	Run finished at 8:09 PM
7/8/2012	8:09:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2012	8:13:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	8:13:56 PM	Recipe started at 8:13 PM
7/8/2012	8:13:56 PM	Helium valve closed
7/8/2012	8:13:56 PM	H2 valve closed
7/8/2012	8:13:56 PM	BCl3 valve closed
7/8/2012	8:13:56 PM	PH3 valve closed
7/8/2012	8:13:56 PM	SiCl4 pre valve closed
7/8/2012	8:13:56 PM	SiCl4 post valve closed
7/8/2012	8:13:56 PM	Main Vac valve closed
7/8/2012	8:13:56 PM	Bubbler valve closed
7/8/2012	8:13:56 PM	Bypass valve opened
7/8/2012	8:13:56 PM	Helium MFC set to  0.000000
7/8/2012	8:13:56 PM	H2 MFC set to  0.000000
7/8/2012	8:13:56 PM	BCl3 MFC set to  0.000000
7/8/2012	8:13:56 PM	PH3 MFC set to  0.000000
7/8/2012	8:13:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	8:13:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	8:13:56 PM	Tube furnace set to 0
7/8/2012	8:15:03 PM	Helium valve closed
7/8/2012	8:15:03 PM	H2 valve closed
7/8/2012	8:15:03 PM	BCl3 valve closed
7/8/2012	8:15:03 PM	PH3 valve closed
7/8/2012	8:15:03 PM	SiCl4 pre valve closed
7/8/2012	8:15:03 PM	SiCl4 post valve closed
7/8/2012	8:15:03 PM	Main Vac valve closed
7/8/2012	8:15:03 PM	Bubbler valve closed
7/8/2012	8:15:03 PM	Bypass valve opened
7/8/2012	8:15:03 PM	Helium MFC set to  0.000000
7/8/2012	8:15:03 PM	H2 MFC set to  0.000000
7/8/2012	8:15:03 PM	BCl3 MFC set to  0.000000
7/8/2012	8:15:03 PM	PH3 MFC set to  0.000000
7/8/2012	8:15:03 PM	SiCl4 MFC set to  0.000000
7/8/2012	8:15:03 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	8:15:03 PM	Tube furnace set to 0
7/8/2012	8:16:03 PM	Helium valve closed
7/8/2012	8:16:03 PM	H2 valve closed
7/8/2012	8:16:03 PM	BCl3 valve closed
7/8/2012	8:16:03 PM	PH3 valve closed
7/8/2012	8:16:03 PM	SiCl4 pre valve closed
7/8/2012	8:16:03 PM	SiCl4 post valve closed
7/8/2012	8:16:03 PM	Bypass valve closed
7/8/2012	8:16:03 PM	Bubbler valve closed
7/8/2012	8:16:03 PM	Main Vac valve opened
7/8/2012	8:16:03 PM	Helium MFC set to  0.000000
7/8/2012	8:16:03 PM	H2 MFC set to  0.000000
7/8/2012	8:16:03 PM	BCl3 MFC set to  0.000000
7/8/2012	8:16:03 PM	PH3 MFC set to  0.000000
7/8/2012	8:16:03 PM	SiCl4 MFC set to  0.000000
7/8/2012	8:16:03 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	8:16:03 PM	Tube furnace set to 0
7/8/2012	8:16:04 PM	Run finished at 8:16 PM
7/8/2012	8:16:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2012	9:28:30 PM	Recipe started at 9:28 PM
7/8/2012	9:28:30 PM	Helium valve closed
7/8/2012	9:28:30 PM	H2 valve closed
7/8/2012	9:28:30 PM	BCl3 valve closed
7/8/2012	9:28:30 PM	PH3 valve closed
7/8/2012	9:28:30 PM	SiCl4 pre valve closed
7/8/2012	9:28:30 PM	SiCl4 post valve closed
7/8/2012	9:28:30 PM	Bypass valve closed
7/8/2012	9:28:30 PM	Bubbler valve closed
7/8/2012	9:28:30 PM	Main Vac valve opened
7/8/2012	9:28:30 PM	Helium MFC set to  0.000000
7/8/2012	9:28:30 PM	H2 MFC set to  0.000000
7/8/2012	9:28:30 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:30 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:30 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:30 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:30 PM	Tube furnace set to 0
7/8/2012	9:28:55 PM	H2 valve closed
7/8/2012	9:28:55 PM	BCl3 valve closed
7/8/2012	9:28:55 PM	PH3 valve closed
7/8/2012	9:28:55 PM	SiCl4 pre valve closed
7/8/2012	9:28:55 PM	SiCl4 post valve closed
7/8/2012	9:28:55 PM	Bypass valve closed
7/8/2012	9:28:55 PM	Bubbler valve closed
7/8/2012	9:28:55 PM	Helium valve opened
7/8/2012	9:28:55 PM	Main Vac valve opened
7/8/2012	9:28:55 PM	Helium MFC set to  20.000000
7/8/2012	9:28:55 PM	H2 MFC set to  0.000000
7/8/2012	9:28:55 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:55 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:55 PM	Tube furnace set to 0
7/8/2012	9:28:55 PM	Helium valve closed
7/8/2012	9:28:55 PM	H2 valve closed
7/8/2012	9:28:55 PM	BCl3 valve closed
7/8/2012	9:28:55 PM	PH3 valve closed
7/8/2012	9:28:55 PM	SiCl4 pre valve closed
7/8/2012	9:28:55 PM	SiCl4 post valve closed
7/8/2012	9:28:55 PM	Bypass valve closed
7/8/2012	9:28:55 PM	Bubbler valve closed
7/8/2012	9:28:55 PM	Main Vac valve opened
7/8/2012	9:28:55 PM	Helium MFC set to  0.000000
7/8/2012	9:28:55 PM	H2 MFC set to  0.000000
7/8/2012	9:28:55 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:55 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:55 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:55 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:56 PM	Tube furnace set to 0
7/8/2012	9:28:56 PM	H2 valve closed
7/8/2012	9:28:56 PM	BCl3 valve closed
7/8/2012	9:28:56 PM	PH3 valve closed
7/8/2012	9:28:56 PM	SiCl4 pre valve closed
7/8/2012	9:28:56 PM	SiCl4 post valve closed
7/8/2012	9:28:56 PM	Bypass valve closed
7/8/2012	9:28:56 PM	Bubbler valve closed
7/8/2012	9:28:56 PM	Helium valve opened
7/8/2012	9:28:56 PM	Main Vac valve opened
7/8/2012	9:28:56 PM	Helium MFC set to  20.000000
7/8/2012	9:28:56 PM	H2 MFC set to  0.000000
7/8/2012	9:28:56 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:56 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:56 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:56 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:56 PM	Tube furnace set to 0
7/8/2012	9:28:57 PM	Helium valve closed
7/8/2012	9:28:57 PM	H2 valve closed
7/8/2012	9:28:57 PM	BCl3 valve closed
7/8/2012	9:28:57 PM	PH3 valve closed
7/8/2012	9:28:57 PM	SiCl4 pre valve closed
7/8/2012	9:28:57 PM	SiCl4 post valve closed
7/8/2012	9:28:57 PM	Bypass valve closed
7/8/2012	9:28:57 PM	Bubbler valve closed
7/8/2012	9:28:57 PM	Main Vac valve opened
7/8/2012	9:28:57 PM	Helium MFC set to  0.000000
7/8/2012	9:28:57 PM	H2 MFC set to  0.000000
7/8/2012	9:28:57 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:57 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:57 PM	Tube furnace set to 0
7/8/2012	9:28:57 PM	H2 valve closed
7/8/2012	9:28:57 PM	BCl3 valve closed
7/8/2012	9:28:57 PM	PH3 valve closed
7/8/2012	9:28:57 PM	SiCl4 pre valve closed
7/8/2012	9:28:57 PM	SiCl4 post valve closed
7/8/2012	9:28:57 PM	Bypass valve closed
7/8/2012	9:28:57 PM	Bubbler valve closed
7/8/2012	9:28:57 PM	Helium valve opened
7/8/2012	9:28:57 PM	Main Vac valve opened
7/8/2012	9:28:57 PM	Helium MFC set to  20.000000
7/8/2012	9:28:57 PM	H2 MFC set to  0.000000
7/8/2012	9:28:57 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:57 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:57 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:57 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:57 PM	Tube furnace set to 0
7/8/2012	9:28:58 PM	Helium valve closed
7/8/2012	9:28:58 PM	H2 valve closed
7/8/2012	9:28:58 PM	BCl3 valve closed
7/8/2012	9:28:58 PM	PH3 valve closed
7/8/2012	9:28:58 PM	SiCl4 pre valve closed
7/8/2012	9:28:58 PM	SiCl4 post valve closed
7/8/2012	9:28:58 PM	Bypass valve closed
7/8/2012	9:28:58 PM	Bubbler valve closed
7/8/2012	9:28:58 PM	Main Vac valve opened
7/8/2012	9:28:58 PM	Helium MFC set to  0.000000
7/8/2012	9:28:58 PM	H2 MFC set to  0.000000
7/8/2012	9:28:58 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:58 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:58 PM	Tube furnace set to 0
7/8/2012	9:28:58 PM	H2 valve closed
7/8/2012	9:28:58 PM	BCl3 valve closed
7/8/2012	9:28:58 PM	PH3 valve closed
7/8/2012	9:28:58 PM	SiCl4 pre valve closed
7/8/2012	9:28:58 PM	SiCl4 post valve closed
7/8/2012	9:28:58 PM	Bypass valve closed
7/8/2012	9:28:58 PM	Bubbler valve closed
7/8/2012	9:28:58 PM	Helium valve opened
7/8/2012	9:28:58 PM	Main Vac valve opened
7/8/2012	9:28:58 PM	Helium MFC set to  20.000000
7/8/2012	9:28:58 PM	H2 MFC set to  0.000000
7/8/2012	9:28:58 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:58 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:58 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:59 PM	Tube furnace set to 0
7/8/2012	9:28:59 PM	Helium valve closed
7/8/2012	9:28:59 PM	H2 valve closed
7/8/2012	9:28:59 PM	BCl3 valve closed
7/8/2012	9:28:59 PM	PH3 valve closed
7/8/2012	9:28:59 PM	SiCl4 pre valve closed
7/8/2012	9:28:59 PM	SiCl4 post valve closed
7/8/2012	9:28:59 PM	Bypass valve closed
7/8/2012	9:28:59 PM	Bubbler valve closed
7/8/2012	9:28:59 PM	Main Vac valve opened
7/8/2012	9:28:59 PM	Helium MFC set to  0.000000
7/8/2012	9:28:59 PM	H2 MFC set to  0.000000
7/8/2012	9:28:59 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:59 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:28:59 PM	Tube furnace set to 0
7/8/2012	9:28:59 PM	H2 valve closed
7/8/2012	9:28:59 PM	BCl3 valve closed
7/8/2012	9:28:59 PM	PH3 valve closed
7/8/2012	9:28:59 PM	SiCl4 pre valve closed
7/8/2012	9:28:59 PM	SiCl4 post valve closed
7/8/2012	9:28:59 PM	Bypass valve closed
7/8/2012	9:28:59 PM	Bubbler valve closed
7/8/2012	9:28:59 PM	Helium valve opened
7/8/2012	9:28:59 PM	Main Vac valve opened
7/8/2012	9:28:59 PM	Helium MFC set to  20.000000
7/8/2012	9:28:59 PM	H2 MFC set to  0.000000
7/8/2012	9:28:59 PM	BCl3 MFC set to  0.000000
7/8/2012	9:28:59 PM	PH3 MFC set to  0.000000
7/8/2012	9:28:59 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:28:59 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:00 PM	Tube furnace set to 0
7/8/2012	9:29:00 PM	Helium valve closed
7/8/2012	9:29:00 PM	H2 valve closed
7/8/2012	9:29:00 PM	BCl3 valve closed
7/8/2012	9:29:00 PM	PH3 valve closed
7/8/2012	9:29:00 PM	SiCl4 pre valve closed
7/8/2012	9:29:00 PM	SiCl4 post valve closed
7/8/2012	9:29:00 PM	Bypass valve closed
7/8/2012	9:29:00 PM	Bubbler valve closed
7/8/2012	9:29:00 PM	Main Vac valve opened
7/8/2012	9:29:00 PM	Helium MFC set to  0.000000
7/8/2012	9:29:00 PM	H2 MFC set to  0.000000
7/8/2012	9:29:00 PM	BCl3 MFC set to  0.000000
7/8/2012	9:29:00 PM	PH3 MFC set to  0.000000
7/8/2012	9:29:00 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:29:00 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:00 PM	Tube furnace set to 0
7/8/2012	9:29:00 PM	H2 valve closed
7/8/2012	9:29:00 PM	BCl3 valve closed
7/8/2012	9:29:00 PM	PH3 valve closed
7/8/2012	9:29:00 PM	SiCl4 pre valve closed
7/8/2012	9:29:00 PM	SiCl4 post valve closed
7/8/2012	9:29:00 PM	Bypass valve closed
7/8/2012	9:29:00 PM	Bubbler valve closed
7/8/2012	9:29:00 PM	Helium valve opened
7/8/2012	9:29:00 PM	Main Vac valve opened
7/8/2012	9:29:00 PM	Helium MFC set to  20.000000
7/8/2012	9:29:00 PM	H2 MFC set to  0.000000
7/8/2012	9:29:00 PM	BCl3 MFC set to  0.000000
7/8/2012	9:29:00 PM	PH3 MFC set to  0.000000
7/8/2012	9:29:00 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:29:00 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:01 PM	Tube furnace set to 0
7/8/2012	9:29:01 PM	Helium valve closed
7/8/2012	9:29:01 PM	H2 valve closed
7/8/2012	9:29:01 PM	BCl3 valve closed
7/8/2012	9:29:01 PM	PH3 valve closed
7/8/2012	9:29:01 PM	SiCl4 pre valve closed
7/8/2012	9:29:01 PM	SiCl4 post valve closed
7/8/2012	9:29:01 PM	Bypass valve closed
7/8/2012	9:29:01 PM	Bubbler valve closed
7/8/2012	9:29:01 PM	Main Vac valve opened
7/8/2012	9:29:01 PM	Helium MFC set to  0.000000
7/8/2012	9:29:01 PM	H2 MFC set to  0.000000
7/8/2012	9:29:01 PM	BCl3 MFC set to  0.000000
7/8/2012	9:29:01 PM	PH3 MFC set to  0.000000
7/8/2012	9:29:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:29:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:01 PM	Tube furnace set to 0
7/8/2012	9:29:01 PM	H2 valve closed
7/8/2012	9:29:01 PM	BCl3 valve closed
7/8/2012	9:29:01 PM	PH3 valve closed
7/8/2012	9:29:01 PM	SiCl4 pre valve closed
7/8/2012	9:29:01 PM	SiCl4 post valve closed
7/8/2012	9:29:01 PM	Bypass valve closed
7/8/2012	9:29:01 PM	Bubbler valve closed
7/8/2012	9:29:01 PM	Helium valve opened
7/8/2012	9:29:01 PM	Main Vac valve opened
7/8/2012	9:29:01 PM	Helium MFC set to  20.000000
7/8/2012	9:29:01 PM	H2 MFC set to  0.000000
7/8/2012	9:29:01 PM	BCl3 MFC set to  0.000000
7/8/2012	9:29:01 PM	PH3 MFC set to  0.000000
7/8/2012	9:29:01 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:29:01 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:01 PM	Tube furnace set to 0
7/8/2012	9:29:02 PM	Helium valve closed
7/8/2012	9:29:02 PM	H2 valve closed
7/8/2012	9:29:02 PM	BCl3 valve closed
7/8/2012	9:29:02 PM	PH3 valve closed
7/8/2012	9:29:02 PM	SiCl4 pre valve closed
7/8/2012	9:29:02 PM	SiCl4 post valve closed
7/8/2012	9:29:02 PM	Bypass valve closed
7/8/2012	9:29:02 PM	Bubbler valve closed
7/8/2012	9:29:02 PM	Main Vac valve opened
7/8/2012	9:29:02 PM	Helium MFC set to  0.000000
7/8/2012	9:29:02 PM	H2 MFC set to  0.000000
7/8/2012	9:29:02 PM	BCl3 MFC set to  0.000000
7/8/2012	9:29:02 PM	PH3 MFC set to  0.000000
7/8/2012	9:29:02 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:29:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:02 PM	Tube furnace set to 0
7/8/2012	9:29:02 PM	H2 valve closed
7/8/2012	9:29:02 PM	BCl3 valve closed
7/8/2012	9:29:02 PM	PH3 valve closed
7/8/2012	9:29:02 PM	SiCl4 pre valve closed
7/8/2012	9:29:02 PM	SiCl4 post valve closed
7/8/2012	9:29:02 PM	Bypass valve closed
7/8/2012	9:29:02 PM	Bubbler valve closed
7/8/2012	9:29:02 PM	Helium valve opened
7/8/2012	9:29:02 PM	Main Vac valve opened
7/8/2012	9:29:02 PM	Helium MFC set to  20.000000
7/8/2012	9:29:02 PM	H2 MFC set to  0.000000
7/8/2012	9:29:02 PM	BCl3 MFC set to  0.000000
7/8/2012	9:29:02 PM	PH3 MFC set to  0.000000
7/8/2012	9:29:02 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:29:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:02 PM	Tube furnace set to 0
7/8/2012	9:29:32 PM	Helium valve closed
7/8/2012	9:29:32 PM	H2 valve closed
7/8/2012	9:29:32 PM	BCl3 valve closed
7/8/2012	9:29:32 PM	PH3 valve closed
7/8/2012	9:29:32 PM	SiCl4 pre valve closed
7/8/2012	9:29:33 PM	SiCl4 post valve closed
7/8/2012	9:29:33 PM	Bypass valve closed
7/8/2012	9:29:33 PM	Bubbler valve closed
7/8/2012	9:29:33 PM	Main Vac valve opened
7/8/2012	9:29:33 PM	Helium MFC set to  0.000000
7/8/2012	9:29:33 PM	H2 MFC set to  0.000000
7/8/2012	9:29:33 PM	BCl3 MFC set to  0.000000
7/8/2012	9:29:33 PM	PH3 MFC set to  0.000000
7/8/2012	9:29:33 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:29:33 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:29:33 PM	Tube furnace set to 0
7/8/2012	9:30:03 PM	H2 valve closed
7/8/2012	9:30:03 PM	BCl3 valve closed
7/8/2012	9:30:03 PM	PH3 valve closed
7/8/2012	9:30:03 PM	SiCl4 pre valve closed
7/8/2012	9:30:03 PM	SiCl4 post valve closed
7/8/2012	9:30:03 PM	Bypass valve closed
7/8/2012	9:30:03 PM	Bubbler valve closed
7/8/2012	9:30:03 PM	Helium valve opened
7/8/2012	9:30:03 PM	Main Vac valve opened
7/8/2012	9:30:03 PM	Helium MFC set to  20.000000
7/8/2012	9:30:03 PM	H2 MFC set to  0.000000
7/8/2012	9:30:03 PM	BCl3 MFC set to  0.000000
7/8/2012	9:30:03 PM	PH3 MFC set to  0.000000
7/8/2012	9:30:03 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:30:03 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:30:03 PM	Tube furnace set to 0
7/8/2012	9:30:33 PM	Helium valve closed
7/8/2012	9:30:33 PM	H2 valve closed
7/8/2012	9:30:33 PM	BCl3 valve closed
7/8/2012	9:30:33 PM	PH3 valve closed
7/8/2012	9:30:33 PM	SiCl4 pre valve closed
7/8/2012	9:30:33 PM	SiCl4 post valve closed
7/8/2012	9:30:33 PM	Bypass valve closed
7/8/2012	9:30:33 PM	Bubbler valve closed
7/8/2012	9:30:33 PM	Main Vac valve opened
7/8/2012	9:30:33 PM	Helium MFC set to  0.000000
7/8/2012	9:30:33 PM	H2 MFC set to  0.000000
7/8/2012	9:30:33 PM	BCl3 MFC set to  0.000000
7/8/2012	9:30:33 PM	PH3 MFC set to  0.000000
7/8/2012	9:30:33 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:30:33 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:30:33 PM	Tube furnace set to 200
7/8/2012	9:31:03 PM	H2 valve closed
7/8/2012	9:31:03 PM	BCl3 valve closed
7/8/2012	9:31:03 PM	PH3 valve closed
7/8/2012	9:31:03 PM	SiCl4 pre valve closed
7/8/2012	9:31:03 PM	SiCl4 post valve closed
7/8/2012	9:31:03 PM	Bypass valve closed
7/8/2012	9:31:03 PM	Bubbler valve closed
7/8/2012	9:31:03 PM	Helium valve opened
7/8/2012	9:31:03 PM	Main Vac valve opened
7/8/2012	9:31:03 PM	Helium MFC set to  20.000000
7/8/2012	9:31:03 PM	H2 MFC set to  0.000000
7/8/2012	9:31:03 PM	BCl3 MFC set to  0.000000
7/8/2012	9:31:03 PM	PH3 MFC set to  0.000000
7/8/2012	9:31:03 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:31:03 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:31:03 PM	Tube furnace set to 200
7/8/2012	9:31:33 PM	Helium valve closed
7/8/2012	9:31:33 PM	H2 valve closed
7/8/2012	9:31:33 PM	BCl3 valve closed
7/8/2012	9:31:33 PM	PH3 valve closed
7/8/2012	9:31:33 PM	SiCl4 pre valve closed
7/8/2012	9:31:33 PM	SiCl4 post valve closed
7/8/2012	9:31:33 PM	Bypass valve closed
7/8/2012	9:31:33 PM	Bubbler valve closed
7/8/2012	9:31:33 PM	Main Vac valve opened
7/8/2012	9:31:33 PM	Helium MFC set to  0.000000
7/8/2012	9:31:33 PM	H2 MFC set to  0.000000
7/8/2012	9:31:33 PM	BCl3 MFC set to  0.000000
7/8/2012	9:31:33 PM	PH3 MFC set to  0.000000
7/8/2012	9:31:33 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:31:33 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:31:34 PM	Tube furnace set to 200
7/8/2012	9:32:04 PM	H2 valve closed
7/8/2012	9:32:04 PM	BCl3 valve closed
7/8/2012	9:32:04 PM	PH3 valve closed
7/8/2012	9:32:04 PM	SiCl4 pre valve closed
7/8/2012	9:32:04 PM	SiCl4 post valve closed
7/8/2012	9:32:04 PM	Bypass valve closed
7/8/2012	9:32:04 PM	Bubbler valve closed
7/8/2012	9:32:04 PM	Helium valve opened
7/8/2012	9:32:04 PM	Main Vac valve opened
7/8/2012	9:32:04 PM	Helium MFC set to  20.000000
7/8/2012	9:32:04 PM	H2 MFC set to  0.000000
7/8/2012	9:32:04 PM	BCl3 MFC set to  0.000000
7/8/2012	9:32:04 PM	PH3 MFC set to  0.000000
7/8/2012	9:32:04 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:32:04 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:32:04 PM	Tube furnace set to 200
7/8/2012	9:32:34 PM	Helium valve closed
7/8/2012	9:32:34 PM	H2 valve closed
7/8/2012	9:32:34 PM	BCl3 valve closed
7/8/2012	9:32:34 PM	PH3 valve closed
7/8/2012	9:32:34 PM	SiCl4 pre valve closed
7/8/2012	9:32:34 PM	SiCl4 post valve closed
7/8/2012	9:32:34 PM	Bypass valve closed
7/8/2012	9:32:34 PM	Bubbler valve closed
7/8/2012	9:32:34 PM	Main Vac valve opened
7/8/2012	9:32:34 PM	Helium MFC set to  0.000000
7/8/2012	9:32:34 PM	H2 MFC set to  0.000000
7/8/2012	9:32:34 PM	BCl3 MFC set to  0.000000
7/8/2012	9:32:34 PM	PH3 MFC set to  0.000000
7/8/2012	9:32:34 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:32:34 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:32:34 PM	Tube furnace set to 200
7/8/2012	9:33:04 PM	H2 valve closed
7/8/2012	9:33:04 PM	BCl3 valve closed
7/8/2012	9:33:04 PM	PH3 valve closed
7/8/2012	9:33:04 PM	SiCl4 pre valve closed
7/8/2012	9:33:04 PM	SiCl4 post valve closed
7/8/2012	9:33:04 PM	Bypass valve closed
7/8/2012	9:33:04 PM	Bubbler valve closed
7/8/2012	9:33:04 PM	Helium valve opened
7/8/2012	9:33:04 PM	Main Vac valve opened
7/8/2012	9:33:04 PM	Helium MFC set to  20.000000
7/8/2012	9:33:04 PM	H2 MFC set to  0.000000
7/8/2012	9:33:04 PM	BCl3 MFC set to  0.000000
7/8/2012	9:33:04 PM	PH3 MFC set to  0.000000
7/8/2012	9:33:04 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:33:04 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:33:04 PM	Tube furnace set to 200
7/8/2012	9:33:34 PM	Helium valve closed
7/8/2012	9:33:34 PM	H2 valve closed
7/8/2012	9:33:34 PM	BCl3 valve closed
7/8/2012	9:33:34 PM	PH3 valve closed
7/8/2012	9:33:34 PM	SiCl4 pre valve closed
7/8/2012	9:33:34 PM	SiCl4 post valve closed
7/8/2012	9:33:34 PM	Bypass valve closed
7/8/2012	9:33:34 PM	Bubbler valve closed
7/8/2012	9:33:34 PM	Main Vac valve opened
7/8/2012	9:33:34 PM	Helium MFC set to  0.000000
7/8/2012	9:33:34 PM	H2 MFC set to  0.000000
7/8/2012	9:33:34 PM	BCl3 MFC set to  0.000000
7/8/2012	9:33:34 PM	PH3 MFC set to  0.000000
7/8/2012	9:33:34 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:33:34 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:33:35 PM	Tube furnace set to 200
7/8/2012	9:34:05 PM	H2 valve closed
7/8/2012	9:34:05 PM	BCl3 valve closed
7/8/2012	9:34:05 PM	PH3 valve closed
7/8/2012	9:34:05 PM	SiCl4 pre valve closed
7/8/2012	9:34:05 PM	SiCl4 post valve closed
7/8/2012	9:34:05 PM	Bypass valve closed
7/8/2012	9:34:05 PM	Bubbler valve closed
7/8/2012	9:34:05 PM	Helium valve opened
7/8/2012	9:34:05 PM	Main Vac valve opened
7/8/2012	9:34:05 PM	Helium MFC set to  20.000000
7/8/2012	9:34:05 PM	H2 MFC set to  0.000000
7/8/2012	9:34:05 PM	BCl3 MFC set to  0.000000
7/8/2012	9:34:05 PM	PH3 MFC set to  0.000000
7/8/2012	9:34:05 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:34:05 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:34:05 PM	Tube furnace set to 200
7/8/2012	9:34:35 PM	Helium valve closed
7/8/2012	9:34:35 PM	H2 valve closed
7/8/2012	9:34:35 PM	BCl3 valve closed
7/8/2012	9:34:35 PM	PH3 valve closed
7/8/2012	9:34:35 PM	SiCl4 pre valve closed
7/8/2012	9:34:35 PM	SiCl4 post valve closed
7/8/2012	9:34:35 PM	Bypass valve closed
7/8/2012	9:34:35 PM	Bubbler valve closed
7/8/2012	9:34:35 PM	Main Vac valve opened
7/8/2012	9:34:35 PM	Helium MFC set to  0.000000
7/8/2012	9:34:35 PM	H2 MFC set to  0.000000
7/8/2012	9:34:35 PM	BCl3 MFC set to  0.000000
7/8/2012	9:34:35 PM	PH3 MFC set to  0.000000
7/8/2012	9:34:35 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:34:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:34:35 PM	Tube furnace set to 200
7/8/2012	9:35:05 PM	H2 valve closed
7/8/2012	9:35:05 PM	BCl3 valve closed
7/8/2012	9:35:05 PM	PH3 valve closed
7/8/2012	9:35:05 PM	SiCl4 pre valve closed
7/8/2012	9:35:05 PM	SiCl4 post valve closed
7/8/2012	9:35:05 PM	Bypass valve closed
7/8/2012	9:35:05 PM	Bubbler valve closed
7/8/2012	9:35:05 PM	Helium valve opened
7/8/2012	9:35:05 PM	Main Vac valve opened
7/8/2012	9:35:05 PM	Helium MFC set to  20.000000
7/8/2012	9:35:05 PM	H2 MFC set to  0.000000
7/8/2012	9:35:05 PM	BCl3 MFC set to  0.000000
7/8/2012	9:35:05 PM	PH3 MFC set to  0.000000
7/8/2012	9:35:05 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:35:05 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:35:05 PM	Tube furnace set to 200
7/8/2012	9:35:35 PM	Helium valve closed
7/8/2012	9:35:35 PM	H2 valve closed
7/8/2012	9:35:35 PM	BCl3 valve closed
7/8/2012	9:35:35 PM	PH3 valve closed
7/8/2012	9:35:35 PM	SiCl4 pre valve closed
7/8/2012	9:35:35 PM	SiCl4 post valve closed
7/8/2012	9:35:35 PM	Bypass valve closed
7/8/2012	9:35:35 PM	Bubbler valve closed
7/8/2012	9:35:35 PM	Main Vac valve opened
7/8/2012	9:35:35 PM	Helium MFC set to  0.000000
7/8/2012	9:35:35 PM	H2 MFC set to  0.000000
7/8/2012	9:35:35 PM	BCl3 MFC set to  0.000000
7/8/2012	9:35:35 PM	PH3 MFC set to  0.000000
7/8/2012	9:35:35 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:35:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:35:36 PM	Tube furnace set to 200
7/8/2012	9:36:06 PM	H2 valve closed
7/8/2012	9:36:06 PM	BCl3 valve closed
7/8/2012	9:36:06 PM	PH3 valve closed
7/8/2012	9:36:06 PM	SiCl4 pre valve closed
7/8/2012	9:36:06 PM	SiCl4 post valve closed
7/8/2012	9:36:06 PM	Bypass valve closed
7/8/2012	9:36:06 PM	Bubbler valve closed
7/8/2012	9:36:06 PM	Helium valve opened
7/8/2012	9:36:06 PM	Main Vac valve opened
7/8/2012	9:36:06 PM	Helium MFC set to  20.000000
7/8/2012	9:36:06 PM	H2 MFC set to  0.000000
7/8/2012	9:36:06 PM	BCl3 MFC set to  0.000000
7/8/2012	9:36:06 PM	PH3 MFC set to  0.000000
7/8/2012	9:36:06 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:36:06 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:36:06 PM	Tube furnace set to 200
7/8/2012	9:36:36 PM	Helium valve closed
7/8/2012	9:36:36 PM	H2 valve closed
7/8/2012	9:36:36 PM	BCl3 valve closed
7/8/2012	9:36:36 PM	PH3 valve closed
7/8/2012	9:36:36 PM	SiCl4 pre valve closed
7/8/2012	9:36:36 PM	SiCl4 post valve closed
7/8/2012	9:36:36 PM	Bypass valve closed
7/8/2012	9:36:36 PM	Bubbler valve closed
7/8/2012	9:36:36 PM	Main Vac valve opened
7/8/2012	9:36:36 PM	Helium MFC set to  0.000000
7/8/2012	9:36:36 PM	H2 MFC set to  0.000000
7/8/2012	9:36:36 PM	BCl3 MFC set to  0.000000
7/8/2012	9:36:36 PM	PH3 MFC set to  0.000000
7/8/2012	9:36:36 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:36:36 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:36:36 PM	Tube furnace set to 0
7/8/2012	9:36:37 PM	Run finished at 9:36 PM
7/8/2012	9:38:41 PM	Main Vac valve closed
7/8/2012	9:39:02 PM	Main Vac valve opened
7/8/2012	9:39:31 PM	Recipe started at 9:39 PM
7/8/2012	9:39:31 PM	Helium valve closed
7/8/2012	9:39:31 PM	H2 valve closed
7/8/2012	9:39:31 PM	BCl3 valve closed
7/8/2012	9:39:31 PM	PH3 valve closed
7/8/2012	9:39:31 PM	SiCl4 pre valve closed
7/8/2012	9:39:31 PM	SiCl4 post valve closed
7/8/2012	9:39:31 PM	Main Vac valve closed
7/8/2012	9:39:31 PM	Bypass valve closed
7/8/2012	9:39:31 PM	Bubbler valve closed
7/8/2012	9:39:31 PM	Helium MFC set to  0.000000
7/8/2012	9:39:31 PM	H2 MFC set to  0.000000
7/8/2012	9:39:31 PM	BCl3 MFC set to  0.000000
7/8/2012	9:39:31 PM	PH3 MFC set to  0.000000
7/8/2012	9:39:31 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:39:31 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:39:32 PM	Tube furnace set to 0
7/8/2012	9:39:35 PM	Helium valve closed
7/8/2012	9:39:35 PM	BCl3 valve closed
7/8/2012	9:39:35 PM	PH3 valve closed
7/8/2012	9:39:35 PM	SiCl4 pre valve closed
7/8/2012	9:39:35 PM	SiCl4 post valve closed
7/8/2012	9:39:35 PM	Main Vac valve closed
7/8/2012	9:39:35 PM	Bypass valve closed
7/8/2012	9:39:35 PM	Bubbler valve closed
7/8/2012	9:39:35 PM	H2 valve opened
7/8/2012	9:39:35 PM	Helium MFC set to  0.000000
7/8/2012	9:39:35 PM	H2 MFC set to  500.000000
7/8/2012	9:39:35 PM	BCl3 MFC set to  0.000000
7/8/2012	9:39:35 PM	PH3 MFC set to  0.000000
7/8/2012	9:39:35 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:39:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:39:35 PM	Tube furnace set to 0
7/8/2012	9:40:47 PM	Helium valve closed
7/8/2012	9:40:47 PM	BCl3 valve closed
7/8/2012	9:40:47 PM	PH3 valve closed
7/8/2012	9:40:47 PM	SiCl4 pre valve closed
7/8/2012	9:40:47 PM	SiCl4 post valve closed
7/8/2012	9:40:47 PM	Main Vac valve closed
7/8/2012	9:40:47 PM	Bypass valve closed
7/8/2012	9:40:47 PM	H2 valve opened
7/8/2012	9:40:47 PM	Bubbler valve opened
7/8/2012	9:40:47 PM	Helium MFC set to  0.000000
7/8/2012	9:40:47 PM	H2 MFC set to  500.000000
7/8/2012	9:40:47 PM	BCl3 MFC set to  0.000000
7/8/2012	9:40:47 PM	PH3 MFC set to  0.000000
7/8/2012	9:40:47 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:40:47 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:40:47 PM	Tube furnace set to 0
7/8/2012	9:40:48 PM	Helium valve closed
7/8/2012	9:40:48 PM	BCl3 valve closed
7/8/2012	9:40:48 PM	PH3 valve closed
7/8/2012	9:40:48 PM	SiCl4 pre valve closed
7/8/2012	9:40:48 PM	SiCl4 post valve closed
7/8/2012	9:40:48 PM	Main Vac valve closed
7/8/2012	9:40:48 PM	Bypass valve closed
7/8/2012	9:40:48 PM	H2 valve opened
7/8/2012	9:40:48 PM	Bubbler valve opened
7/8/2012	9:40:48 PM	Helium MFC set to  0.000000
7/8/2012	9:40:48 PM	H2 MFC set to  500.000000
7/8/2012	9:40:48 PM	BCl3 MFC set to  0.000000
7/8/2012	9:40:48 PM	PH3 MFC set to  0.000000
7/8/2012	9:40:48 PM	SiCl4 MFC set to  0.000000
7/8/2012	9:40:48 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	9:40:48 PM	Tube furnace set to 1000
7/8/2012	10:00:48 PM	Helium valve closed
7/8/2012	10:00:48 PM	PH3 valve closed
7/8/2012	10:00:48 PM	Main Vac valve closed
7/8/2012	10:00:48 PM	Bypass valve closed
7/8/2012	10:00:48 PM	H2 valve opened
7/8/2012	10:00:48 PM	BCl3 valve opened
7/8/2012	10:00:48 PM	SiCl4 pre valve opened
7/8/2012	10:00:48 PM	SiCl4 post valve opened
7/8/2012	10:00:48 PM	Bubbler valve opened
7/8/2012	10:00:48 PM	Helium MFC set to  0.000000
7/8/2012	10:00:48 PM	H2 MFC set to  450.000000
7/8/2012	10:00:48 PM	BCl3 MFC set to  1.500000
7/8/2012	10:00:48 PM	PH3 MFC set to  0.000000
7/8/2012	10:00:48 PM	SiCl4 MFC set to  50.000000
7/8/2012	10:00:48 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:00:49 PM	Tube furnace set to 1000
7/8/2012	10:10:49 PM	Helium valve closed
7/8/2012	10:10:49 PM	BCl3 valve closed
7/8/2012	10:10:49 PM	PH3 valve closed
7/8/2012	10:10:49 PM	SiCl4 pre valve closed
7/8/2012	10:10:49 PM	SiCl4 post valve closed
7/8/2012	10:10:49 PM	Main Vac valve closed
7/8/2012	10:10:49 PM	Bypass valve closed
7/8/2012	10:10:49 PM	H2 valve opened
7/8/2012	10:10:49 PM	Bubbler valve opened
7/8/2012	10:10:49 PM	Helium MFC set to  0.000000
7/8/2012	10:10:49 PM	H2 MFC set to  500.000000
7/8/2012	10:10:49 PM	BCl3 MFC set to  0.000000
7/8/2012	10:10:49 PM	PH3 MFC set to  0.000000
7/8/2012	10:10:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	10:10:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:10:49 PM	Tube furnace set to 950
7/8/2012	10:12:49 PM	Helium valve closed
7/8/2012	10:12:49 PM	BCl3 valve closed
7/8/2012	10:12:49 PM	PH3 valve closed
7/8/2012	10:12:49 PM	SiCl4 pre valve closed
7/8/2012	10:12:49 PM	SiCl4 post valve closed
7/8/2012	10:12:49 PM	Main Vac valve closed
7/8/2012	10:12:49 PM	Bypass valve closed
7/8/2012	10:12:49 PM	H2 valve opened
7/8/2012	10:12:49 PM	Bubbler valve opened
7/8/2012	10:12:49 PM	Helium MFC set to  0.000000
7/8/2012	10:12:49 PM	H2 MFC set to  500.000000
7/8/2012	10:12:49 PM	BCl3 MFC set to  0.000000
7/8/2012	10:12:49 PM	PH3 MFC set to  0.000000
7/8/2012	10:12:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	10:12:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:12:49 PM	Tube furnace set to 900
7/8/2012	10:14:49 PM	Helium valve closed
7/8/2012	10:14:49 PM	BCl3 valve closed
7/8/2012	10:14:49 PM	PH3 valve closed
7/8/2012	10:14:49 PM	SiCl4 pre valve closed
7/8/2012	10:14:49 PM	SiCl4 post valve closed
7/8/2012	10:14:49 PM	Main Vac valve closed
7/8/2012	10:14:49 PM	Bypass valve closed
7/8/2012	10:14:49 PM	H2 valve opened
7/8/2012	10:14:49 PM	Bubbler valve opened
7/8/2012	10:14:49 PM	Helium MFC set to  0.000000
7/8/2012	10:14:49 PM	H2 MFC set to  500.000000
7/8/2012	10:14:49 PM	BCl3 MFC set to  0.000000
7/8/2012	10:14:49 PM	PH3 MFC set to  0.000000
7/8/2012	10:14:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	10:14:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:14:49 PM	Tube furnace set to 850
7/8/2012	10:16:49 PM	H2 valve closed
7/8/2012	10:16:49 PM	BCl3 valve closed
7/8/2012	10:16:49 PM	PH3 valve closed
7/8/2012	10:16:49 PM	SiCl4 pre valve closed
7/8/2012	10:16:49 PM	SiCl4 post valve closed
7/8/2012	10:16:49 PM	Main Vac valve closed
7/8/2012	10:16:49 PM	Bypass valve closed
7/8/2012	10:16:49 PM	Helium valve opened
7/8/2012	10:16:49 PM	Bubbler valve opened
7/8/2012	10:16:49 PM	Helium MFC set to  500.000000
7/8/2012	10:16:49 PM	H2 MFC set to  0.000000
7/8/2012	10:16:49 PM	BCl3 MFC set to  0.000000
7/8/2012	10:16:49 PM	PH3 MFC set to  0.000000
7/8/2012	10:16:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	10:16:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:16:49 PM	Tube furnace set to 800
7/8/2012	10:18:49 PM	H2 valve closed
7/8/2012	10:18:49 PM	BCl3 valve closed
7/8/2012	10:18:49 PM	PH3 valve closed
7/8/2012	10:18:49 PM	SiCl4 pre valve closed
7/8/2012	10:18:49 PM	SiCl4 post valve closed
7/8/2012	10:18:49 PM	Main Vac valve closed
7/8/2012	10:18:49 PM	Bypass valve closed
7/8/2012	10:18:49 PM	Helium valve opened
7/8/2012	10:18:49 PM	Bubbler valve opened
7/8/2012	10:18:49 PM	Helium MFC set to  500.000000
7/8/2012	10:18:49 PM	H2 MFC set to  0.000000
7/8/2012	10:18:49 PM	BCl3 MFC set to  0.000000
7/8/2012	10:18:49 PM	PH3 MFC set to  0.000000
7/8/2012	10:18:49 PM	SiCl4 MFC set to  0.000000
7/8/2012	10:18:49 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:18:50 PM	Tube furnace set to 750
7/8/2012	10:20:50 PM	H2 valve closed
7/8/2012	10:20:50 PM	BCl3 valve closed
7/8/2012	10:20:50 PM	PH3 valve closed
7/8/2012	10:20:50 PM	SiCl4 pre valve closed
7/8/2012	10:20:50 PM	SiCl4 post valve closed
7/8/2012	10:20:50 PM	Main Vac valve closed
7/8/2012	10:20:50 PM	Bypass valve closed
7/8/2012	10:20:50 PM	Helium valve opened
7/8/2012	10:20:50 PM	Bubbler valve opened
7/8/2012	10:20:50 PM	Helium MFC set to  500.000000
7/8/2012	10:20:50 PM	H2 MFC set to  0.000000
7/8/2012	10:20:50 PM	BCl3 MFC set to  0.000000
7/8/2012	10:20:50 PM	PH3 MFC set to  0.000000
7/8/2012	10:20:50 PM	SiCl4 MFC set to  0.000000
7/8/2012	10:20:50 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:20:50 PM	Tube furnace set to 0
7/8/2012	10:40:50 PM	Helium valve closed
7/8/2012	10:40:50 PM	H2 valve closed
7/8/2012	10:40:50 PM	BCl3 valve closed
7/8/2012	10:40:50 PM	PH3 valve closed
7/8/2012	10:40:50 PM	SiCl4 pre valve closed
7/8/2012	10:40:50 PM	SiCl4 post valve closed
7/8/2012	10:40:50 PM	Main Vac valve closed
7/8/2012	10:40:50 PM	Bypass valve closed
7/8/2012	10:40:50 PM	Bubbler valve closed
7/8/2012	10:40:50 PM	Helium MFC set to  0.000000
7/8/2012	10:40:50 PM	H2 MFC set to  0.000000
7/8/2012	10:40:50 PM	BCl3 MFC set to  0.000000
7/8/2012	10:40:50 PM	PH3 MFC set to  0.000000
7/8/2012	10:40:50 PM	SiCl4 MFC set to  0.000000
7/8/2012	10:40:50 PM	Bypass solenoid MFC set to  0.000000
7/8/2012	10:40:50 PM	Tube furnace set to 0
7/8/2012	10:40:51 PM	Run finished at 10:40 PM
